Mirkovich; Ninko T.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Mirkovich; Ninko T..The latest application filed is for "cassette elevator for use in a modular article processing machine".
- Mirkovich; Ninko T. - Novato CA
| Patent | Date |
|---|---|
| Cassette elevator for use in a modular article processing machine Grant 4,861,222 - Mirkovich August 29, 1 | 1989-08-29 |
| Modular article processing machine and method of article handling therein Grant 4,801,241 - Zajac , et al. January 31, 1 | 1989-01-31 |
| Wafer cassette having multi-directional access Grant 4,727,993 - Mirkovich , et al. March 1, 1 | 1988-03-01 |
| Vacuum load lock apparatus Grant 4,632,624 - Mirkovich , et al. December 30, 1 | 1986-12-30 |
| Article transport apparatus Grant 4,619,573 - Rathmann , et al. October 28, 1 | 1986-10-28 |
| Plasma reactor chuck assembly Grant 4,547,247 - Warenback , et al. October 15, 1 | 1985-10-15 |
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