Minshall; Edmund

Patent Applications and Registrations

Patent applications and USPTO patent grants for Minshall; Edmund.The latest application filed is for "planar substrate edge contact with open volume equalization pathways and side containment".

Company Profile

3.5.5

Minshall; Edmund - Sherwood OR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Planar substrate edge contact with open volume equalization pathways and side containment Grant 11,443,975 - Breiling , et al. September 13, 2	2022-09-13
Planar Substrate Edge Contact With Open Volume Equalization Pathways And Side Containment App 20200227304 - Breiling; Patrick ; et al.	2020-07-16
Integrated Showerhead With Thermal Control For Delivering Radical And Precursor Gas To A Downstream Chamber To Enable Remote Pla App 20200219757 - BREILING; Patrick ; et al.	2020-07-09
Planar substrate edge contact with open volume equalization pathways and side containment Grant 10,622,243 - Breiling , et al.	2020-04-14
Planar Substrate Edge Contact With Open Volume Equalization Pathways And Side Containment App 20180122685 - Breiling; Patrick ; et al.	2018-05-03
Plasma Suppression Behind A Showerhead Through The Use Of Increased Pressure App 20170260627 - Breiling; Patrick Girard ; et al.	2017-09-14
Plasma suppression behind a showerhead through the use of increased pressure Grant 9,758,868 - Breiling , et al. September 12, 2	2017-09-12
CMP apparatus and method Grant 7,229,339 - Stumpf , et al. June 12, 2	2007-06-12
Compound angled pad end-effector Grant 7,048,316 - Blank , et al. May 23, 2	2006-05-23
CMP apparatus and method App 20060003671 - Stumpf; John F. ; et al.	2006-01-05

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