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Patent applications and USPTO patent grants for Minamitsu; Akihito.The latest application filed is for "axis determination apparatus, film-thickness measurement apparatus, deposition apparatus, axis determination method, and film-thickness measurement method".
Patent | Date |
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Axis determination apparatus, film-thickness measurement apparatus, deposition apparatus, axis determination method, and film-thickness measurement method Grant 6,753,964 - Chen , et al. June 22, 2 | 2004-06-22 |
Apparatus for measuring the thickness of a thin film having eddy current coil sensor Grant 6,700,370 - Chen , et al. March 2, 2 | 2004-03-02 |
Axis determination apparatus, film-thickness measurement apparatus, deposition apparatus, axis determination method, and film-thickness measurement method App 20020071129 - Chen, Kai ;   et al. | 2002-06-13 |
Apparatus for measuring the thickness of a thin film App 20020053904 - Chen, Kai ;   et al. | 2002-05-09 |
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