loadpatents
Patent applications and USPTO patent grants for Minamida; Junya.The latest application filed is for "substrate processing apparatus".
Patent | Date |
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Substrate processing apparatus Grant 11,404,295 - Minamida , et al. August 2, 2 | 2022-08-02 |
Substrate Processing Apparatus App 20200219736 - Aoki; Daisuke ;   et al. | 2020-07-09 |
Substrate Processing Apparatus App 20190252223 - Minamida; Junya ;   et al. | 2019-08-15 |
Substrate processing apparatus Grant 10,373,849 - Minamida , et al. | 2019-08-06 |
Substrate processing apparatus Grant 10,186,433 - Minamida , et al. Ja | 2019-01-22 |
Substrate liquid processing apparatus Grant 10,128,132 - Minamida , et al. November 13, 2 | 2018-11-13 |
Substrate liquid processing apparatus Grant 10,056,269 - Minamida , et al. August 21, 2 | 2018-08-21 |
Substrate Liquid Processing Apparatus App 20180068873 - Minamida; Junya ;   et al. | 2018-03-08 |
Substrate Processing Apparatus App 20180061688 - Minamida; Junya ;   et al. | 2018-03-01 |
Substrate liquid processing apparatus, exhaust switching unit and substrate liquid processing method Grant 9,842,747 - Minamida , et al. December 12, 2 | 2017-12-12 |
Substrate processing apparatus Grant 9,666,463 - Morikawa , et al. May 30, 2 | 2017-05-30 |
Substrate Liquid Processing Apparatus App 20160126112 - Minamida; Junya ;   et al. | 2016-05-05 |
Substrate Liquid Processing Apparatus, Exhaust Switching Unit And Substrate Liquid Processing Method App 20160124438 - Minamida; Junya ;   et al. | 2016-05-05 |
Substrate Processing Apparatus App 20160121373 - Minamida; Junya ;   et al. | 2016-05-05 |
Substrate Processing Apparatus App 20150187621 - Morikawa; Katsuhiro ;   et al. | 2015-07-02 |
Substrate processing apparatus Grant 8,978,670 - Minamida , et al. March 17, 2 | 2015-03-17 |
Substrate processing apparatus Grant 8,662,811 - Minamida , et al. March 4, 2 | 2014-03-04 |
Substrate processing system Grant 8,033,244 - Minamida , et al. October 11, 2 | 2011-10-11 |
Substrate Processing Apparatus App 20110103923 - Minamida; Junya ;   et al. | 2011-05-05 |
Substrate Processing Apparatus App 20110079252 - MINAMIDA; Junya ;   et al. | 2011-04-07 |
Processing solution supply system, processing solution supply method and recording medium for storing processing solution supply control program Grant 7,918,242 - Minamida , et al. April 5, 2 | 2011-04-05 |
Substrate Processing System App 20090151631 - MINAMIDA; Junya ;   et al. | 2009-06-18 |
Coating process method and coating process apparatus Grant 7,485,188 - Takekuma , et al. February 3, 2 | 2009-02-03 |
Processing solution supply system, processing solution supply method and recording medium for storing processing solution supply control program App 20070269207 - Minamida; Junya ;   et al. | 2007-11-22 |
Coating process method and coating process apparatus App 20060144330 - Takekuma; Takashi ;   et al. | 2006-07-06 |
Coating process method and coating process apparatus App 20030180444 - Takekuma, Takashi ;   et al. | 2003-09-25 |
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