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Fluid control device Grant 11,390,951 - Hidaka , et al. July 19, 2 | 2022-07-19 |
Fluid supply device and liquid discharge method of this device Grant 11,322,372 - Yoshida , et al. May 3, 2 | 2022-05-03 |
Fluid Supply Device And Fluid Supply Method App 20210125840 - YOSHIDA; Toshihide ;   et al. | 2021-04-29 |
Fluid Supply Device And Fluid Supply Method App 20210125839 - YOSHIDA; Toshihide ;   et al. | 2021-04-29 |
Fluid Control Device App 20200199753 - HIDAKA; Atsushi ;   et al. | 2020-06-25 |
Fluid Supply Device And Liquid Discharge Method Of This Device App 20200161147 - YOSHIDA; Toshihide ;   et al. | 2020-05-21 |
Fluid Control Device App 20200149162 - HIDAKA; Atsushi ;   et al. | 2020-05-14 |
Method for parallel operation of reactors that generate moisture Grant 8,469,046 - Minami , et al. June 25, 2 | 2013-06-25 |
Reactor for Moisture Generation App 20120082596 - OHMI; Tadahiro ;   et al. | 2012-04-05 |
Reactor for generating moisture and moisture generating and feeding apparatus for which the reactor is employed Grant 7,815,872 - Nariai , et al. October 19, 2 | 2010-10-19 |
Method For Parallel Operation Of Reactors That Generate Moisture App 20100143239 - Minami; Yukio ;   et al. | 2010-06-10 |
Vacuum thermal insulating valve Grant 7,673,649 - Ohmi , et al. March 9, 2 | 2010-03-09 |
Process of forming platinum coating catalyst layer in moisture-generating reactor Grant 7,595,087 - Ohmi , et al. September 29, 2 | 2009-09-29 |
Apparatus and reactor for generating and feeding high purity moisture Grant 7,553,459 - Ohmi , et al. June 30, 2 | 2009-06-30 |
Vacuum Thermal Insulating Valve App 20090032115 - Ohmi; Tadahiro ;   et al. | 2009-02-05 |
Reactor for Generating Moisture and Moisture Generating and Feeding Apparatus for Which the Reactor is Employed App 20080241022 - Nariai; Toshirou ;   et al. | 2008-10-02 |
Apparatus and reactor for generating and feeding high purity moisture Grant 7,368,092 - Ohmi , et al. May 6, 2 | 2008-05-06 |
Apparatus And Reactor For Generating And Feeding High Purity Moisture App 20070231225 - Ohmi; Tadahiro ;   et al. | 2007-10-04 |
Apparatus and reactor for generating and feeding high purity moisture Grant 7,258,845 - Ohmi , et al. August 21, 2 | 2007-08-21 |
Apparatus and reactor for generating and feeding high purity moisture App 20060292047 - Ohmi; Tadahiro ;   et al. | 2006-12-28 |
Rotary silicon wafer cleaning apparatus Grant 7,103,990 - Ohmi , et al. September 12, 2 | 2006-09-12 |
Reactor for generating moisture Grant 7,008,598 - Ohmi , et al. March 7, 2 | 2006-03-07 |
Method for forming platinum coating catalyst layer in reaction furnace ofr generating water gas App 20050157834 - Ohmi, Tadahiro ;   et al. | 2005-07-21 |
Reactor for generating moisture Grant 6,919,056 - Ohmi , et al. July 19, 2 | 2005-07-19 |
Rotary silicon wafer cleaning apparatus App 20050126030 - Ohmi, Tadahiro ;   et al. | 2005-06-16 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus Grant 6,848,470 - Ohmi , et al. February 1, 2 | 2005-02-01 |
Reactor for generating moisture App 20040247502 - Ohmi, Tadahiro ;   et al. | 2004-12-09 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus Grant 6,820,632 - Ohmi , et al. November 23, 2 | 2004-11-23 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus App 20040154664 - Ohmi, Tadahiro ;   et al. | 2004-08-12 |
Apparatus and reactor for generating and feeding high purity moisture App 20040137744 - Ohmi, Tadahiro ;   et al. | 2004-07-15 |
Reactor for generating moisture Grant 6,733,732 - Ohmi , et al. May 11, 2 | 2004-05-11 |
Gas detection sensor Grant 6,622,543 - Ohmi , et al. September 23, 2 | 2003-09-23 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus App 20020179149 - Ohmi, Tadahiro ;   et al. | 2002-12-05 |
Unreacted gas detector and unreacted gas sensor App 20020134135 - Komehana, Katsunori ;   et al. | 2002-09-26 |
Reactor for generating moisture App 20020136676 - Komehana, Katsunori ;   et al. | 2002-09-26 |
Fluid control device App 20020124894 - Ohmi, Tadahiro ;   et al. | 2002-09-12 |
Apparatus and reactor for generating and feeding high purity moisture App 20020122758 - Ohmi, Tadahiro ;   et al. | 2002-09-05 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus Grant 6,422,264 - Ohmi , et al. July 23, 2 | 2002-07-23 |
Fluid control device Grant 6,408,879 - Ohmi , et al. June 25, 2 | 2002-06-25 |
Method of removing moisture in gas supply system App 20020000161 - Ikeda, Nobukazu ;   et al. | 2002-01-03 |
Reactor for generating moisture App 20010048907 - Ohmi, Tadahiro ;   et al. | 2001-12-06 |
Method for generating moisture, reactor for generating moisture, method for controlling temperature of reactor for generating moisture, and method for forming platinum-coated catalyst layer App 20010042344 - Ohmi, Tadahiro ;   et al. | 2001-11-22 |
Apparatus for the treatment of exhaust gases by combining hydrogen and oxygen Grant 6,274,098 - Tanabe , et al. August 14, 2 | 2001-08-14 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus App 20010004903 - Ohmi, Tadahiro ;   et al. | 2001-06-28 |
Fluid supply apparatus Grant 6,178,995 - Ohmi , et al. January 30, 2 | 2001-01-30 |
Device for heating fluid controller Grant 6,060,691 - Minami , et al. May 9, 2 | 2000-05-09 |
Shutoff-opening device Grant 5,983,933 - Ohmi , et al. November 16, 1 | 1999-11-16 |
Fluid control device Grant 5,975,112 - Ohmi , et al. November 2, 1 | 1999-11-02 |
Pressure type flow rate control apparatus Grant 5,816,285 - Ohmi , et al. October 6, 1 | 1998-10-06 |
Pressure type flow rate control apparatus Grant 5,791,369 - Nishino , et al. August 11, 1 | 1998-08-11 |
Pressure type flow rate control apparatus Grant 5,669,408 - Nishino , et al. September 23, 1 | 1997-09-23 |
Method and apparatus for feeding gas into a chamber Grant 5,488,967 - Minami , et al. February 6, 1 | 1996-02-06 |
Control valve Grant 5,379,982 - Koyomogi , et al. January 10, 1 | 1995-01-10 |