| Patent | Date |
|---|
Apparatus And Method For Real-time Sensing Of Properties In Industrial Manufacturing Equipment
App 20210343560 - Ballandras; Sylvain ; et al. | 2021-11-04 |
Apparatus and method for real-time sensing of properties in industrial manufacturing equipment
Grant 11,114,321 - Ballandras , et al. September 7, 2 | 2021-09-07 |
Temperature Measurement Sensor, Temperature Measurement System, And Temperature Measurement Method
App 20200408613 - WU; Tong ; et al. | 2020-12-31 |
Antenna Device And Temperature Detection Method
App 20200408612 - WU; Tong ; et al. | 2020-12-31 |
Electrostatic capacitance measuring device
Grant 10,837,991 - Sugita , et al. November 17, 2 | 2020-11-17 |
Method for calibrating measuring device and case used in the calibration method
Grant 10,837,810 - Sugita , et al. November 17, 2 | 2020-11-17 |
Measuring instrument for measuring electrostatic capacity and method of calibrating transfer position data in processing system by using measuring instrument
Grant 10,634,479 - Sugita , et al. | 2020-04-28 |
Apparatus And Method For Real-time Sensing Of Properties In Industrial Manufacturing Equipment
App 20190057887 - Ballandras; Sylvain ; et al. | 2019-02-21 |
Method For Calibrating Measuring Device And Case Used In The Calibration Method
App 20190033103 - Sugita; Kippei ; et al. | 2019-01-31 |
Electrostatic Capacitance Measuring Device
App 20180284171 - SUGITA; Kippei ; et al. | 2018-10-04 |
Method for acquiring data indicating electrostatic capacitance
Grant 10,074,549 - Sugita , et al. September 11, 2 | 2018-09-11 |
Sensor chip for electrostatic capacitance measurement and measuring device having the same
Grant 10,018,484 - Sugita , et al. July 10, 2 | 2018-07-10 |
Sensor Chip For Electrostatic Capacitance Measurement And Measuring Device Having The Same
App 20180136013 - Sugita; Kippei ; et al. | 2018-05-17 |
Pressure measuring device and pressure measuring method
Grant 9,970,838 - Minami May 15, 2 | 2018-05-15 |
Sensor chip for electrostatic capacitance measurement and measuring device having the same
Grant 9,903,739 - Sugita , et al. February 27, 2 | 2018-02-27 |
Measuring Instrument For Measuring Electrostatic Capacity And Method Of Calibrating Transfer Position Data In Processing System By Using Measuring Instrument
App 20170363407 - SUGITA; Kippei ; et al. | 2017-12-21 |
System of inspecting focus ring and method of inspecting focus ring
Grant 9,841,395 - Sugita , et al. December 12, 2 | 2017-12-12 |
Method For Acquiring Data Indicating Electrostatic Capacitance
App 20170278735 - SUGITA; Kippei ; et al. | 2017-09-28 |
Pressure sensor and method for manufacturing the same
Grant 9,709,453 - Minami July 18, 2 | 2017-07-18 |
Pressure sensor and method for manufacturing the same
Grant 9,702,038 - Minami July 11, 2 | 2017-07-11 |
System Of Inspecting Focus Ring And Method Of Inspecting Focus Ring
App 20160363556 - Sugita; Kippei ; et al. | 2016-12-15 |
Sensor Chip For Electrostatic Capacitance Measurement And Measuring Device Having The Same
App 20160363433 - Sugita; Kippei ; et al. | 2016-12-15 |
Pressure Sensor And Method For Manufacturing The Same
App 20150377812 - MINAMI; Tomohide | 2015-12-31 |
Pressure Sensor And Method For Manufacturing The Same
App 20150377735 - MINAMI; Tomohide | 2015-12-31 |
Pressure Measuring Device And Pressure Measuring Method
App 20150377732 - MINAMI; Tomohide | 2015-12-31 |
Position detecting method for performing position alignment of transfer point of transfer arm
Grant 8,749,257 - Matsumoto , et al. June 10, 2 | 2014-06-10 |
Position Detecting Method
App 20120158355 - Matsumoto; Toshiyuki ; et al. | 2012-06-21 |
Jig for detecting position
Grant 8,149,005 - Matsumoto , et al. April 3, 2 | 2012-04-03 |
Jig for detecting position
Grant 7,994,793 - Matsumoto , et al. August 9, 2 | 2011-08-09 |
Temperature measuring device using oscillating frequency signals
Grant 7,977,609 - Sata , et al. July 12, 2 | 2011-07-12 |
Temperature measuring device and method for measuring wafer-type thermometers
Grant 7,923,665 - Matsumoto , et al. April 12, 2 | 2011-04-12 |
Jig For Detecting Position
App 20090115422 - Matsumoto; Toshiyuki ; et al. | 2009-05-07 |
Wafer-Shaped Measuring Apparatus and Method for Manufacturing the Same
App 20090085031 - Matsuda; Kenji ; et al. | 2009-04-02 |
Coating film forming method and apparatus
Grant 7,510,611 - Minami , et al. March 31, 2 | 2009-03-31 |
Coating film forming method and system
Grant 7,488,505 - Minami , et al. February 10, 2 | 2009-02-10 |
Jig For Detecting Postion
App 20090033908 - Matsumoto; Toshiyuki ; et al. | 2009-02-05 |
Temperature measuring device, thermal processor having temperature measurement function and temperature measurement method
App 20070170170 - Sata; Noboyuki ; et al. | 2007-07-26 |
Temperature measuring device and method for measuring wafer-type thermometers
App 20070147468 - Matsumoto; Toshiyuki ; et al. | 2007-06-28 |
Low-pressure dryer and low-pressure drying method
Grant 7,024,798 - Minami , et al. April 11, 2 | 2006-04-11 |
Low-pressure dryer and low-pressure drying method
Grant 6,986,214 - Minami , et al. January 17, 2 | 2006-01-17 |
Coating film forming method and apparatus
App 20050170087 - Minami, Tomohide ; et al. | 2005-08-04 |
Low-pressure dryer and low-pressure drying method
App 20050160619 - Minami, Tomohide ; et al. | 2005-07-28 |
Coating film forming method and apparatus
Grant 6,884,294 - Minami , et al. April 26, 2 | 2005-04-26 |
Coating apparatus and coating method
App 20040261701 - Kobayashi, Shinji ; et al. | 2004-12-30 |
Coating film forming method and system
App 20040241320 - Minami, Tomohide ; et al. | 2004-12-02 |
Low-pressure dryer and low-pressure drying method
App 20040216325 - Minami, Tomohide ; et al. | 2004-11-04 |
Low-pressure dryer and low-pressure drying method
Grant 6,796,054 - Minami , et al. September 28, 2 | 2004-09-28 |
Coating film forming method and system
Grant 6,776,845 - Minami , et al. August 17, 2 | 2004-08-17 |
Low-pressure dryer and low-pressure drying method
App 20030172542 - Minami, Tomohide ; et al. | 2003-09-18 |
Coating film forming method and system
App 20020176928 - Minami, Tomohide ; et al. | 2002-11-28 |
Coating film forming method and apparatus
App 20020150679 - Minami, Tomohide ; et al. | 2002-10-17 |
Film forming method and film forming apparatus
Grant 6,371,667 - Kitano , et al. April 16, 2 | 2002-04-16 |
Film forming method and film forming apparatus
App 20010033895 - Minami, Tomohide ; et al. | 2001-10-25 |
Processing solution supply apparatus
Grant 6,238,109 - Minami May 29, 2 | 2001-05-29 |
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