MINAMI; Hirofumi
Patent Applications and Registrations
Patent applications and USPTO patent grants for MINAMI; Hirofumi.The latest application filed is for "substrate transport device and substrate transporting method".
Company Profile
4.23.27
- MINAMI; Hirofumi - Chigasaki-shi JP
- Minami; Hirofumi - Chigasaki JP
- Minami; Hirofumi - Kanagawa JP
Patent Activity
| Patent | Date |
|---|---|
| Substrate Transport Device And Substrate Transporting Method App 20210107149 - MUSHA; Kazuhiro ; et al. | 2021-04-15 |
| Substrate Transport Device And Substrate Transporting Method App 20210101281 - MUSHA; Kazuhiro ; et al. | 2021-04-08 |
| Vacuum processing apparatus Grant 10,612,130 - Minami , et al. | 2020-04-07 |
| Vacuum Processing Apparatus App 20190233224 - MINAMI; Hirofumi ; et al. | 2019-08-01 |
| Rotation-transmitting mechanism, conveying apparatus, and driving apparatus Grant 9,193,067 - Fujimura , et al. November 24, 2 | 2015-11-24 |
| Seal mechanism and treatment apparatus Grant 8,840,116 - Musha , et al. September 23, 2 | 2014-09-23 |
| Substrate conveyance method and substrate conveyance system Grant 8,717,737 - Minami , et al. May 6, 2 | 2014-05-06 |
| Conveying device and vacuum apparatus Grant 8,505,991 - Minami August 13, 2 | 2013-08-13 |
| Substrate Conveyance Method and Substrate Conveyance System App 20130129462 - Minami; Hirofumi ; et al. | 2013-05-23 |
| Stage apparatus Grant 8,408,503 - Tanaka , et al. April 2, 2 | 2013-04-02 |
| Transport apparatus Grant 8,382,421 - Musha , et al. February 26, 2 | 2013-02-26 |
| Rotation introduction mechanism, substrate transfer apparatus, and vacuum processing apparatus Grant 8,366,375 - Musha , et al. February 5, 2 | 2013-02-05 |
| Conveying Device And Vacuum Apparatus App 20120288347 - MINAMI; Hirofumi | 2012-11-15 |
| Stage apparatus assembling method Grant 8,286,318 - Tanaka , et al. October 16, 2 | 2012-10-16 |
| Rotation-transmitting Mechanism, Conveying Apparatus, And Driving Apparatus App 20120251287 - Fujimura; Kazuhiro ; et al. | 2012-10-04 |
| Holding Apparatus, Conveying Apparatus, And Rotation-transmitting Apparatus App 20120114456 - Musha; Kazuhiro ; et al. | 2012-05-10 |
| Discharge unit and discharge apparatus Grant 8,167,417 - Miyata , et al. May 1, 2 | 2012-05-01 |
| Holding Apparatus, Conveying Apparatus, And Rotation-transmitting Apparatus App 20120025054 - Musha; Kazuhiro ; et al. | 2012-02-02 |
| Stage apparatus Grant 8,100,524 - Tanaka , et al. January 24, 2 | 2012-01-24 |
| Seal Mechanism and Treatment Apparatus App 20110227294 - Musha; Kazuhiro ; et al. | 2011-09-22 |
| Conveying Device And Vacuum Apparatus App 20110211936 - MINAMI; Hirofumi | 2011-09-01 |
| Discharge Unit And Discharge Apparatus App 20110199441 - MIYATA; Takahiro ; et al. | 2011-08-18 |
| Stage Equipped With Alignment Function, Processing Apparatus Having The Stage Equipped With Alignment Function, And Method Of Aligning Substrate App 20110062641 - Sato; Seiichi ; et al. | 2011-03-17 |
| Stage Apparatus App 20100177153 - TANAKA; Yasuzo ; et al. | 2010-07-15 |
| Stage Apparatus App 20100163703 - TANAKA; Yasuzo ; et al. | 2010-07-01 |
| Stage Apparatus Assembling Method App 20100146762 - TANAKA; Yasuzo ; et al. | 2010-06-17 |
| Rotation Introduction Mechanism, Substrate Transfer Apparatus, And Vacuum Processing Apparatus App 20100135751 - Musha; Kazuhiro ; et al. | 2010-06-03 |
| Substrate Holding Mechanism and Substrate Assembly Apparatus Including the Same App 20100109220 - Musha; Kazuhiro ; et al. | 2010-05-06 |
| Transfer Device And Vacuum Processing Apparatus Using The Same App 20100111649 - MINAMI; Hirofumi ; et al. | 2010-05-06 |
| Transport Apparatus App 20100040447 - MUSHA; Kazuhiro ; et al. | 2010-02-18 |
| Transport apparatus, control method for the same, and vacuum processing system Grant 7,645,112 - Minami , et al. January 12, 2 | 2010-01-12 |
| Carrying mechanism, a carrying device and a vacuum processing apparatus Grant 7,591,625 - Minami , et al. September 22, 2 | 2009-09-22 |
| Transport apparatus, control method for the same, and vacuum processing system Grant 7,572,093 - Minami , et al. August 11, 2 | 2009-08-11 |
| Stage apparatus App 20090173278 - Tanaka; Yasuzou ; et al. | 2009-07-09 |
| Stage apparatus App 20090092467 - Tanaka; Yasuzou ; et al. | 2009-04-09 |
| Carrying mechanism, a carrying device and a vacuum processing apparatus App 20080226430 - Minami; Hirofumi ; et al. | 2008-09-18 |
| Transport apparatus, control method for the same, and vacuum processing system App 20050286993 - Minami, Hirofumi ; et al. | 2005-12-29 |
| Transport apparatus, control method for the same, and vacuum processing system App 20050232744 - Minami, Hirofumi ; et al. | 2005-10-20 |
| Transport apparatus and vacuum processing system using the same App 20050095112 - Minami, Hirofumi ; et al. | 2005-05-05 |
| Transport apparatus and vacuum processing system using the same Grant 6,840,732 - Minami , et al. January 11, 2 | 2005-01-11 |
| Transport apparatus and vacuum processing system using the same App 20020048502 - Minami, Hirofumi ; et al. | 2002-04-25 |
| Apparatus for measuring weak static magnetic field using superconduction strips and a SQUID magnetometer Grant 5,184,072 - Yuyama , et al. February 2, 1 | 1993-02-02 |
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