Min; Young-Min

Patent Applications and Registrations

Patent applications and USPTO patent grants for Min; Young-Min.The latest application filed is for "apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same".

Company Profile

0.7.8

Min; Young-Min - Seongnam-si KR
Min; Young-Min - Gyeonggi-do KR
Min; Young-Min - Suwon KR
Min; Young-Min - Kyunggi-do KR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same Grant 8,083,892 - Min , et al. December 27, 2	2011-12-27
Semiconductor etching apparatus Grant 7,764,483 - Kim , et al. July 27, 2	2010-07-27
Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same App 20090229758 - Min; Young-Min ; et al.	2009-09-17
Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same Grant 7,578,944 - Min , et al. August 25, 2	2009-08-25
Methods And Apparatus For Semiconductor Etching Including An Electro Static Chuck App 20080194113 - Kim; Jin-Man ; et al.	2008-08-14
Semiconductor etching apparatus App 20080066867 - Kim; Jin-Man ; et al.	2008-03-20
Method for generating gas plasma Grant 7,193,369 - Min , et al. March 20, 2	2007-03-20
Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same App 20060084269 - Min; Young-Min ; et al.	2006-04-20
Input/output valve switching apparatus of semiconductor manufacturing system Grant 6,824,617 - Yang , et al. November 30, 2	2004-11-30
RF matching unit Grant 6,816,029 - Choi , et al. November 9, 2	2004-11-09
Method and apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same App 20040092119 - Min, Young-Min ; et al.	2004-05-13
Method of and an apparatus for regulating the temperature of an electrostatic chuck Grant 6,684,652 - Kim , et al. February 3, 2	2004-02-03
Input/output valve switching apparatus of semiconductor manufacturing system App 20030010450 - Yang, Yun-Sik ; et al.	2003-01-16
Method of and an apparatus for regulating the temperature of an electrostatic chuck App 20020174667 - Kim, Jin-Man ; et al.	2002-11-28
RF matching unit App 20020023718 - Choi, Dae-Kyu ; et al.	2002-02-28

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