Min; Heewon
Patent Applications and Registrations
Patent applications and USPTO patent grants for Min; Heewon.The latest application filed is for "lift apparatus and substrate processing apparatus including the same".
- Min; Heewon - Daejeon KR
| Patent | Date |
|---|---|
| Electrostatic chuck and substrate processing apparatus including the same Grant 11,404,252 - Kim , et al. August 2, 2 | 2022-08-02 |
| Lift Apparatus And Substrate Processing Apparatus Including The Same App 20210159112 - Kim; Byeongsang ; et al. | 2021-05-27 |
| Electrostatic Chuck And Substrate Processing Apparatus Including The Same App 20210111007 - KIM; Byeongsang ; et al. | 2021-04-15 |
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