| Patent | Date |
|---|
Method of inspecting a surface of a substrate and apparatus for performing the same
Grant 9,772,296 - Kang , et al. September 26, 2 | 2017-09-26 |
Patterning method using metal mask and method of fabricating semiconductor device including the same patterning method
Grant 9,607,853 - Jeon , et al. March 28, 2 | 2017-03-28 |
Method Of Manufacturing Semiconductor Device
App 20160293444 - PARK; Jae-hong ; et al. | 2016-10-06 |
Semiconductor devices and methods of manufacturing the same
Grant 9,412,610 - Park , et al. August 9, 2 | 2016-08-09 |
Patterning Method Using Metal Mask And Method Of Fabricating Semiconductor Device Including The Same Patterning Method
App 20160013070 - JEON; Kyung-yub ; et al. | 2016-01-14 |
Method of fabricating semiconductor device using photo key
Grant 9,230,808 - Han , et al. January 5, 2 | 2016-01-05 |
Methods Of Removing A Hard Mask
App 20150380267 - HAN; Je-Woo ; et al. | 2015-12-31 |
Semiconductor Devices And Methods Of Manufacturing The Same
App 20150255301 - Park; Seung-Hoon ; et al. | 2015-09-10 |
Methods of forming semiconductor device using bowing control layer
Grant 9,093,500 - Park , et al. July 28, 2 | 2015-07-28 |
Plasma Shielding Members, Plasma Detecting Structures, And Plasma Reaction Apparatuses
App 20150114559 - HAN; Eun-Young ; et al. | 2015-04-30 |
Method Of Inspecting A Surface Of A Substrate And Apparatus For Performing The Same
App 20150116698 - KANG; Byung-Bok ; et al. | 2015-04-30 |
Methods Of Forming Semiconductor Device Using Bowing Control Layer
App 20150056805 - Park; Jae-Hong ; et al. | 2015-02-26 |
Method of fabricating semiconductor device
Grant 8,815,697 - Yoon , et al. August 26, 2 | 2014-08-26 |
Method of controlling semiconductor process distribution
Grant 8,805,567 - Lee , et al. August 12, 2 | 2014-08-12 |
Method Of Fabricating Semiconductor Device Using Photo Key
App 20140038383 - HAN; Je-woo ; et al. | 2014-02-06 |
Methods of manufacturing a semiconductor device and a semiconductor memory device thereby
Grant 8,557,661 - Yu , et al. October 15, 2 | 2013-10-15 |
Method of fabricating semiconductor device
App 20130005110 - Yoon; Jun-Ho ; et al. | 2013-01-03 |
Method Of Forming Fine Pattern And Method Of Manufacturing Semiconductor Device
App 20120329224 - Kong; Yoo-chul ; et al. | 2012-12-27 |
Methods Of Manufacturing A Semiconductor Device And A Semiconductor Memory Device Thereby
App 20120187471 - YU; Han-Geun ; et al. | 2012-07-26 |
Method Of Controlling Semiconductor Process Distribution
App 20120150330 - LEE; Ho-Ki ; et al. | 2012-06-14 |
Nonvolatile Memory Device And Method Of Fabricating The Same
App 20090008701 - KIM; Dong-Hyun ; et al. | 2009-01-08 |
Method of forming a fine pattern
App 20080076071 - Lim; Seok-Hyun ; et al. | 2008-03-27 |
Methods of determining an etching end point based on compensation for etching disturbances
Grant 7,307,703 - Kim , et al. December 11, 2 | 2007-12-11 |
Method of processing semiconductor substrate responsive to a state of chamber contamination
App 20070020780 - Baek; Kye-Hyun ; et al. | 2007-01-25 |
Semiconductor memory device having self-aligned contacts and method of fabricating the same
Grant 7,132,708 - Ahn , et al. November 7, 2 | 2006-11-07 |
Method of forming fine pitch photoresist patterns using double patterning technique
App 20060228895 - Chae; Yun-sook ; et al. | 2006-10-12 |
Pattern formation method
App 20050214694 - Hong, Jin ; et al. | 2005-09-29 |
Semiconductor memory device having self-aligned contacts and method of fabricating the same
App 20050167758 - Ahn, Tae-hyuk ; et al. | 2005-08-04 |
Methods of determining an etching end point based on compensation for etching distubances
App 20050134835 - Kim, Yong-Jin ; et al. | 2005-06-23 |
Semiconductor memory device having self-aligned contacts and method of fabricating the same
Grant 6,885,052 - Ahn , et al. April 26, 2 | 2005-04-26 |
Remote plasma enhanced cleaning apparatus
App 20040200244 - Hong, Jin ; et al. | 2004-10-14 |
Method of forming a self-aligned contact, and method of fabricating a semiconductor device having a self-aligned contact
Grant 6,777,341 - Shin , et al. August 17, 2 | 2004-08-17 |
Method of manufacturing a self-aligned contact from a conductive layer that is free of voids
App 20020090808 - Jeon, Jeong-sic ; et al. | 2002-07-11 |
Method of forming interlevel dielectric layer of semiconductor device
App 20020064936 - Park, Wan-Jae ; et al. | 2002-05-30 |
Method of forming a self-aligned contact, and method of fabricating a semiconductor device having a self-aligned contact
App 20020034877 - Shin, Kyoung-sub ; et al. | 2002-03-21 |
Method of manufacturing semiconductor memory device including various contact studs
Grant 6,350,642 - Lee , et al. February 26, 2 | 2002-02-26 |
Semiconductor memory device having self-aligned contacts and method of fabricating the same
App 20010054719 - Ahn, Tae-hyuk ; et al. | 2001-12-27 |
Method for forming a polysilicon node in a semiconductor device
Grant 6,333,219 - Park , et al. December 25, 2 | 2001-12-25 |
Semiconductor device having self-aligned contact and fabricating method therefor
App 20010045666 - Kim, Myeong-cheol ; et al. | 2001-11-29 |
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