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Imprint method, imprint apparatus, and template
Grant 10,782,621 - Shimizu , et al. Sept | 2020-09-22 |
Imprint Method, Imprint Apparatus, And Template
App 20190302614 - SHIMIZU; Mitsuko ; et al. | 2019-10-03 |
Stencil mask, stencil mask manufacturing method, and imprinting method
Grant 10,022,748 - Suzuki , et al. July 17, 2 | 2018-07-17 |
Pattern transfer mold and pattern formation method
Grant 9,957,630 - Li , et al. May 1, 2 | 2018-05-01 |
Imprint Method, Imprint Apparatus, And Template
App 20170235239 - SHIMIZU; Mitsuko ; et al. | 2017-08-17 |
Stencil Mask, Stencil Mask Manufacturing Method, And Imprinting Method
App 20160076132 - SUZUKI; Masato ; et al. | 2016-03-17 |
Pattern Transfer Mold And Pattern Formation Method
App 20150021191 - LI; Yongfang ; et al. | 2015-01-22 |
Method for manufacturing photo mask, method for manufacturing semiconductor device, and program
Grant 8,883,373 - Mimotogi , et al. November 11, 2 | 2014-11-11 |
Method For Manufacturing Photo Mask, Method For Manufacturing Semiconductor Device, And Program
App 20130130157 - Mimotogi; Akiko ; et al. | 2013-05-23 |
Original plate evaluation method, computer readable storage medium, and original plate manufacturing method
Grant 8,438,527 - Nakamura , et al. May 7, 2 | 2013-05-07 |
Pattern Forming Apparatus
App 20130080991 - Inanami; Ryoichi ; et al. | 2013-03-28 |
Original Plate Evaluation Method, Computer Readable Storage Medium, And Original Plate Manufacturing Method
App 20130055172 - Nakamura; Satomi ; et al. | 2013-02-28 |
Method Of Manufacturing Organic Thin Film Solar Cell
App 20120214272 - Azuma; Tsukasa ; et al. | 2012-08-23 |
Simulation method and simulation program
Grant 8,230,369 - Mimotogi , et al. July 24, 2 | 2012-07-24 |
Imprinting Method, Semiconductor Integrated Circuit Manufacturing Method And Drop Recipe Creating Method
App 20120072003 - MATSUOKA; Yasuo ; et al. | 2012-03-22 |
Nanoimprint Template And Pattern Transcription Apparatus
App 20120068372 - Mimotogi; Akiko ; et al. | 2012-03-22 |
Mask pattern correcting method
Grant 8,122,385 - Fukuhara , et al. February 21, 2 | 2012-02-21 |
Method of evaluating optical beam source of exposure device, method of designing illumination shape of exposure device, and software for optimizing illumination shape of exposure device
Grant 8,081,294 - Mimotogi December 20, 2 | 2011-12-20 |
Lithography simulation method, computer program product, and pattern forming method
Grant 7,985,517 - Tanaka , et al. July 26, 2 | 2011-07-26 |
Manufacturing Method Of Phase Shift Mask, Creating Method Of Mask Data Of Phase Shift Mask, And Manufacturing Method Of Semiconductor Device
App 20100304279 - MIMOTOGI; Akiko ; et al. | 2010-12-02 |
Pattern Forming Method
App 20100261121 - TAKAHASHI; Masanori ; et al. | 2010-10-14 |
Lithography Simulation Method, Computer Program Product, And Pattern Forming Method
App 20090305172 - Tanaka; Satoshi ; et al. | 2009-12-10 |
Simulation Method And Simulation Program
App 20090217233 - Mimotogi; Akiko ; et al. | 2009-08-27 |
Mask Pattern Correcting Method
App 20080301621 - FUKUHARA; Kazuya ; et al. | 2008-12-04 |
Device manufacturing method
Grant 7,459,264 - Kawamura , et al. December 2, 2 | 2008-12-02 |
Method Of Evaluating Optical Beam Source Of Exposure Device, Method Of Designing Illumination Shape Of Exposure Device, And Software For Optimizing Illumination Shape Of Exposure Device
App 20080252872 - MIMOTOGI; Akiko | 2008-10-16 |
Device manufacturing method
App 20060008747 - Kawamura; Daisuke ; et al. | 2006-01-12 |
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