Patent | Date |
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Methods of removing particles from over semiconductor substrates Grant 11,139,159 - Greeley , et al. October 5, 2 | 2021-10-05 |
Methods of Removing Particles from Over Semiconductor Substrates App 20190047025 - Greeley; Joseph Neil ;   et al. | 2019-02-14 |
Methods of removing particles from over semiconductor substrates Grant 10,137,481 - Greeley , et al. November 27, 2 | 2018-11-27 |
Methods of forming patterns with a mask formed utilizing a brush layer Grant 9,418,848 - Brown , et al. August 16, 2 | 2016-08-16 |
Methods of Forming Patterns App 20160027638 - Brown; William R. ;   et al. | 2016-01-28 |
Lens heating compensation in photolithography Grant 9,235,134 - He , et al. January 12, 2 | 2016-01-12 |
Unsymmetrical ligand sources, reduced symmetry metal-containing compounds, and systems and methods including same Grant 9,234,273 - Millward , et al. January 12, 2 | 2016-01-12 |
Methods of forming patterns by using a brush layer and masks Grant 9,184,058 - Brown , et al. November 10, 2 | 2015-11-10 |
Methods of patterning substrates Grant 9,177,794 - Millward November 3, 2 | 2015-11-03 |
Methods of utilizing block copolymer to form patterns Grant 9,096,730 - Millward , et al. August 4, 2 | 2015-08-04 |
Methods of Forming Patterns App 20150179467 - Brown; William R. ;   et al. | 2015-06-25 |
Methods of Removing Particles from Over Semiconductor Substrates App 20150128992 - Greeley; Joseph Neil ;   et al. | 2015-05-14 |
Methods using block co-polymer self-assembly for sub-lithographic patterning Grant 8,974,678 - Millward March 10, 2 | 2015-03-10 |
Methods of removing particles from over semiconductor substrates Grant 8,940,102 - Greeley , et al. January 27, 2 | 2015-01-27 |
Reticles, And Methods Of Mitigating Asymmetric Lens Heating In Photolithography App 20150015860 - Light; Scott L. ;   et al. | 2015-01-15 |
Methods of Utilizing Block Copolymer to Form Patterns App 20140349486 - Sills; Scott E. ;   et al. | 2014-11-27 |
Reticle with composite polarizer and method of simultaneous optimization of imaging of a set of different patterns Grant 8,883,372 - Light , et al. November 11, 2 | 2014-11-11 |
Block copolymer-comprising compositions and methods of purifying PS-b-PXVP Grant 8,853,311 - Millward , et al. October 7, 2 | 2014-10-07 |
Reticles, and methods of mitigating asymmetric lens heating in photolithography Grant 8,845,908 - Light , et al. September 30, 2 | 2014-09-30 |
Methods of utilizing block copolymer to form patterns Grant 8,834,956 - Sills , et al. September 16, 2 | 2014-09-16 |
Lithography Wave-front Control System And Method App 20140247476 - He; Yuan ;   et al. | 2014-09-04 |
Semiconductor constructions and methods of forming patterns Grant 8,815,497 - Millward , et al. August 26, 2 | 2014-08-26 |
Methods of Utilizing Block Copolymer to Form Patterns App 20140205752 - Millward; Dan ;   et al. | 2014-07-24 |
Lithography wave-front control system and method Grant 8,736,814 - He , et al. May 27, 2 | 2014-05-27 |
Methods of processing substrates Grant 8,728,721 - Light , et al. May 20, 2 | 2014-05-20 |
Methods of utilizing block copolymer to form patterns Grant 8,696,918 - Millward , et al. April 15, 2 | 2014-04-15 |
Illumination design for lens heating mitigation Grant 8,625,078 - Zhou , et al. January 7, 2 | 2014-01-07 |
Reticle With Composite Polarizer And Method Of Simultaneous Optimization Of Imaging Of A Set Of Different Patterns App 20130323628 - LIGHT; SCOTT ;   et al. | 2013-12-05 |
Semiconductor Constructions And Methods Of Forming Patterns App 20130302981 - Millward; Dan ;   et al. | 2013-11-14 |
Methods Using Block Co-Polymer Self-Assembly for Sub-Lithographic Patterning App 20130270226 - Millward; Dan | 2013-10-17 |
Methods Of Patterning Substrates App 20130183827 - Millward; Dan | 2013-07-18 |
Semiconductor constructions and methods of forming patterns Grant 8,486,611 - Millward , et al. July 16, 2 | 2013-07-16 |
Methods of forming patterns Grant 8,394,579 - Sills , et al. March 12, 2 | 2013-03-12 |
Methods Of Processing Substrates App 20130040245 - Light; Scott L. ;   et al. | 2013-02-14 |
Beta-diketiminate ligand sources and metal-containing compounds thereof, and systems and methods including same Grant 8,357,784 - Millward , et al. January 22, 2 | 2013-01-22 |
Block Copolymer-Comprising Compositions and Methods of Purifying PS-b-PXVP App 20130005903 - Millward; Dan ;   et al. | 2013-01-03 |
Lithography Wave-front Control System And Method App 20120314196 - He; Yuan ;   et al. | 2012-12-13 |
Block copolymer-comprising compositions and methods of purifying PS-b-PXVP Grant 8,314,206 - Millward , et al. November 20, 2 | 2012-11-20 |
Methods Of Removing Particles From Over Semiconductor Substrates App 20120266913 - Greeley; Neil Joseph ;   et al. | 2012-10-25 |
Illumination Design For Lens Heating Mitigation App 20120257177 - ZHOU; JIANMING ;   et al. | 2012-10-11 |
Methods of forming patterns, and methods of forming integrated circuits Grant 8,273,647 - Millward , et al. September 25, 2 | 2012-09-25 |
Zwitterionic block copolymers and methods Grant 8,236,899 - Millward , et al. August 7, 2 | 2012-08-07 |
Methods of removing particles from over semiconductor substrates Grant 8,226,772 - Greeley , et al. July 24, 2 | 2012-07-24 |
Methods of utilizing block copolymer to form patterns Grant 8,173,034 - Millward , et al. May 8, 2 | 2012-05-08 |
Methods Of Forming Patterns App 20120077127 - Sills; Scott ;   et al. | 2012-03-29 |
Reticles, And Methods Of Mitigating Asymmetric Lens Heating In Photolithography App 20120052416 - Light; Scott L. ;   et al. | 2012-03-01 |
Methods Of Forming Patterns, And Methods Of Forming Integrated Circuits App 20120045891 - Millward; Dan ;   et al. | 2012-02-23 |
Lens Heating Compensation In Photolithography App 20120038895 - He; Yuan ;   et al. | 2012-02-16 |
Semiconductor Constructions And Methods Of Forming Patterns App 20120015486 - Millward; Dan ;   et al. | 2012-01-19 |
Methods of utilizing block copolymer to form patterns Grant 8,088,551 - Sills , et al. January 3, 2 | 2012-01-03 |
Methods of forming dispersions of nanoparticles, and methods of forming flash memory cells Grant 8,084,345 - Millward December 27, 2 | 2011-12-27 |
Beta-Diketiminate Ligand Sources and Metal-Containing Compounds Thereof, and Systems and Methods Including Same App 20110301383 - Millward; Dan ;   et al. | 2011-12-08 |
Methods of forming patterns, and methods of forming integrated circuits Grant 8,071,467 - Millward , et al. December 6, 2 | 2011-12-06 |
Methods Of Utilizing Block Copolymer To Form Patterns App 20110272381 - Millward; Dan ;   et al. | 2011-11-10 |
Methods Of Forming Patterns, And Methods Of Forming Integrated Circuits App 20110250745 - Millward; Dan ;   et al. | 2011-10-13 |
Zwitterionic block copolymers and methods Grant 8,022,147 - Millward , et al. September 20, 2 | 2011-09-20 |
.beta.-diketiminate ligand sources and metal-containing compounds thereof, and systems and methods including same Grant 8,017,184 - Millward , et al. September 13, 2 | 2011-09-13 |
Unsymmetrical Ligand Sources, Reduced Symmetry Metal-Containing Compounds, and Systems and Methods Including Same App 20110071316 - Millward; Dan ;   et al. | 2011-03-24 |
Unsymmetrical ligand sources, reduced symmetry metal-containing compounds, and systems and methods including same Grant 7,858,523 - Millward , et al. December 28, 2 | 2010-12-28 |
Methods Of Utlizing Block Copolymer To Form Patterns App 20100323096 - Sills; Scott ;   et al. | 2010-12-23 |
Methods of Forming Dispersions of Nanoparticles, and Methods of Forming Flash Memory Cells App 20100323510 - Millward; Dan | 2010-12-23 |
Methods of forming dispersions of nanoparticles, and methods of forming flash memory cells Grant 7,785,998 - Millward August 31, 2 | 2010-08-31 |
Methods of Removing Particles From Over Semiconductor Substrates App 20100170531 - Greeley; Neil Joseph ;   et al. | 2010-07-08 |
Block Copolymer-Comprising Compositions and Methods of Purifying PS-b-PXVP App 20100137496 - Millward; Dan ;   et al. | 2010-06-03 |
Methods Of Utilizing Block Copolymer To Form Patterns App 20100124826 - Millward; Dan ;   et al. | 2010-05-20 |
Methods Of Utilizing Block Copolymer To Form Patterns App 20100092873 - Sills; Scott ;   et al. | 2010-04-15 |
Unsymmetrical Ligand Sources, Reduced Symmetry Metal-containing Compounds, And Systems And Methods Including Same App 20090275199 - Millward; Dan ;   et al. | 2009-11-05 |
Methods Of Forming Dispersions Of Nanoparticles, And Methods Of Forming Flash Memory Cells App 20090215255 - Millward; Dan | 2009-08-27 |
Unsymmetrical ligand sources, reduced symmetry metal-containing compounds, and systems and methods including same Grant 7,572,731 - Millward , et al. August 11, 2 | 2009-08-11 |
Beta-diketiminate Ligand Sources And Metal-containing Compounds Thereof, And Systems And Methods Including Same App 20090075488 - Millward; Dan ;   et al. | 2009-03-19 |
Beta-diketiminate ligand sources and metal-containing compounds thereof, and systems and methods including same Grant 7,439,338 - Millward , et al. October 21, 2 | 2008-10-21 |
Unsymmetrical ligand sources, reduced symmetry metal-containing compounds, and systems and methods including same App 20080214001 - Millward; Dan ;   et al. | 2008-09-04 |
Beta-diketiminate ligand sources and metal-containing compounds thereof, and systems and methods including same App 20060292303 - Millward; Dan ;   et al. | 2006-12-28 |
Unsymmetrical ligand sources, reduced symmetry metal-containing compounds, and systems and methods including same App 20060292873 - Millward; Dan ;   et al. | 2006-12-28 |