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Patent applications and USPTO patent grants for Miller; Gabriel Lorimer.The latest application filed is for "friction sensor for polishing system".
Patent | Date |
---|---|
Friction sensor for polishing system Grant 8,758,086 - Miller , et al. June 24, 2 | 2014-06-24 |
Friction Sensor For Polishing System App 20130167614 - Miller; Gabriel Lorimer ;   et al. | 2013-07-04 |
Friction sensor for polishing system Grant 8,342,906 - Miller , et al. January 1, 2 | 2013-01-01 |
Method and apparatus for measuring a thickness of a layer of a wafer Grant 7,777,483 - Lei , et al. August 17, 2 | 2010-08-17 |
Friction Sensor For Polishing System App 20090253351 - Miller; Gabriel Lorimer ;   et al. | 2009-10-08 |
Polishing endpoint detection system and method using friction sensor Grant 7,513,818 - Miller , et al. April 7, 2 | 2009-04-07 |
Method And Apparatus For Measuring Object Thickness App 20080186022 - Lei; Lawrence C. ;   et al. | 2008-08-07 |
Method and apparatus for measuring object thickness App 20070063698 - Lei; Lawrence C. ;   et al. | 2007-03-22 |
Method and apparatus for dynamically measuring the thickness of an object Grant 7,112,961 - Lei , et al. September 26, 2 | 2006-09-26 |
Polishing endpoint detection system and method using friction sensor App 20050136800 - Miller, Gabriel Lorimer ;   et al. | 2005-06-23 |
Method and apparatus for measuring object thickness App 20040140797 - Lei, Lawrence C. ;   et al. | 2004-07-22 |
Method for the noncontacting measurement of the electrical conductivity of a lamella Grant 4,000,458 - Miller , et al. December 28, 1 | 1976-12-28 |
Semiconductor Diode Thermometry Grant 3,812,717 - Miller , et al. May 28, 1 | 1974-05-28 |
Liquid Contacts For Use In Semiconductor Doping Profile Analysis Grant 3,803,489 - Miller April 9, 1 | 1974-04-09 |
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