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Patent applications and USPTO patent grants for Miller, Adam Q..The latest application filed is for "single body injector and deposition chamber".
Patent | Date |
---|---|
Single body injector and deposition chamber App 20010004881 - Miller, Adam Q. ;   et al. | 2001-06-28 |
Single body injector and deposition chamber Grant 6,200,389 - Miller , et al. March 13, 2 | 2001-03-13 |
Single body injector and method for delivering gases to a surface Grant 6,022,414 - Miller , et al. February 8, 2 | 2000-02-08 |
Method of manufacturing an injector for chemical vapor deposition processing Grant 5,935,647 - DeDontney , et al. August 10, 1 | 1999-08-10 |
Single body injector and method for delivering gases to a surface Grant 5,683,516 - DeDontney , et al. November 4, 1 | 1997-11-04 |
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