Millan; Isaac

Patent Applications and Registrations

Patent applications and USPTO patent grants for Millan; Isaac.The latest application filed is for "thermal control system and method".

Company Profile

0.14.3

Millan; Isaac - Anaheim CA US
Millan; Isaac - Anahein CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Plasma reactor with a multiple zone thermal control feed forward control apparatus Grant 8,980,044 - Brillhart , et al. March 17, 2	2015-03-17
Method of cooling a wafer support at a uniform temperature in a capacitively coupled plasma reactor Grant 8,801,893 - Brillhart , et al. August 12, 2	2014-08-12
Method of processing a workpiece in a plasma reactor using multiple zone feed forward thermal control Grant 8,546,267 - Brillhart , et al. October 1, 2	2013-10-01
Capacitively coupled plasma reactor having very agile wafer temperature control Grant 8,337,660 - Buchberger, Jr. , et al. December 25, 2	2012-12-25
Method of processing a workpiece in a plasma reactor using feed forward thermal control Grant 8,329,586 - Buchberger, Jr. , et al. December 11, 2	2012-12-11
Plasma reactor with wafer backside thermal loop, two-phase internal pedestal thermal loop and a control processor governing both loops Grant 8,221,580 - Buchberger, Jr. , et al. July 17, 2	2012-07-17
Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changes Grant 8,092,639 - Buchberger, Jr. , et al. January 10, 2	2012-01-10
Method of operating a capacitively coupled plasma reactor with dual temperature control loops Grant 7,988,872 - Brillhart , et al. August 2, 2	2011-08-02
Thermal control system and method Grant 7,765,820 - Cowans , et al. August 3, 2	2010-08-03
Thermal control system and method App 20080319587 - Cowans; Kenneth W. ; et al.	2008-12-25
Thermal control system and method Grant 7,415,835 - Cowans , et al. August 26, 2	2008-08-26
Thermal control system and method App 20070169491 - Cowans; Kenneth W. ; et al.	2007-07-26
Thermal control system and method Grant 7,178,353 - Cowans , et al. February 20, 2	2007-02-20
Thermal control system and method App 20050183432 - Cowans, Kenneth W. ; et al.	2005-08-25

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