| Patent | Date |
|---|
Gas feeding device for controlled vaporization of an organometallic compound used in deposition film formation
Grant 5,755,885 - Mikoshiba , et al. May 26, 1 | 1998-05-26 |
Process for forming deposited film
Grant 5,753,320 - Mikoshiba , et al. May 19, 1 | 1998-05-19 |
Vapor depositing method
Grant 5,705,224 - Murota , et al. January 6, 1 | 1998-01-06 |
Gas feeding device for controlled vaporization of an organometallic compound used in deposition film formation
Grant 5,476,547 - Mikoshiba , et al. December 19, 1 | 1995-12-19 |
Deposited film formation method utilizing selective deposition by use of alkyl aluminum hydride
Grant 5,393,699 - Mikoshiba , et al. February 28, 1 | 1995-02-28 |
Scanning tunneling potentio-spectroscopic microscope and a data detecting method
Grant 5,378,983 - Yagi , et al. January 3, 1 | 1995-01-03 |
Process for forming deposited film by use of alkyl aluminum hydride
Grant 5,328,873 - Mikoshiba , et al. July 12, 1 | 1994-07-12 |
Process for forming deposited film by use of alkyl aluminum hydride and process for preparing semiconductor device
Grant 5,316,972 - Mikoshiba , et al. May 31, 1 | 1994-05-31 |
Spread spectrum receiving device
Grant 5,272,721 - Mikoshiba , et al. December 21, 1 | 1993-12-21 |
Semiconductor element
Grant 5,262,673 - Mikoshiba , et al. November 16, 1 | 1993-11-16 |
Integrated circuit
Grant 5,245,207 - Mikoshiba , et al. September 14, 1 | 1993-09-14 |
Process for forming metal deposited film containing aluminum as main component by use of alkyl hydride
Grant 5,196,372 - Mikoshiba , et al. March 23, 1 | 1993-03-23 |
Scanning tunneling potentio-spectroscopic microscope and a data detecting method
Grant 5,185,572 - Yagi , et al. February 9, 1 | 1993-02-09 |
Deposited film formation method utilizing selective deposition by use of alkyl aluminum hydride
Grant 5,180,687 - Mikoshiba , et al. January 19, 1 | 1993-01-19 |
Process for forming deposited film by use of alkyl aluminum hydride
Grant 5,179,042 - Mikoshiba , et al. January 12, 1 | 1993-01-12 |
Spread spectrum communication device
Grant 5,099,495 - Mikoshiba , et al. March 24, 1 | 1992-03-24 |
Plasma CVD of aluminum films
Grant 5,091,210 - Mikoshiba , et al. February 25, 1 | 1992-02-25 |
Thin film forming apparatus
Grant 4,989,541 - Mikoshiba , et al. February 5, 1 | 1991-02-05 |
Spread-spectrum communication apparatus
Grant 4,926,440 - Mikoshiba , et al. May 15, 1 | 1990-05-15 |
Scanning type tunnel microscope
Grant 4,877,957 - Okada , et al. October 31, 1 | 1989-10-31 |
Multi-layer acoustic surface wave device having minimal delay time temperature coefficient
Grant 4,516,049 - Mikoshiba , et al. May 7, 1 | 1985-05-07 |
Surface acoustic wave device using an elastic substrate and an aluminum nitride piezoelectric film
Grant 4,511,816 - Mikoshiba , et al. April 16, 1 | 1985-04-16 |
Frequency selector apparatus
Grant 4,288,765 - Mikoshiba , et al. September 8, 1 | 1981-09-08 |
Elastic surface wave device
Grant 4,233,530 - Mikoshiba , et al. November 11, 1 | 1980-11-11 |
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