Mikhaylichenko; Katrina

Patent Applications and Registrations

Patent applications and USPTO patent grants for Mikhaylichenko; Katrina.The latest application filed is for "method and apparatus for cleaning a semiconductor substrate".

Company Profile

0.53.42

Mikhaylichenko; Katrina - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and Systems for Cleaning A Substrate App 20150040947 - Freer; Erik M. ; et al.	2015-02-12
Method and Apparatus for Cleaning A Semiconductor Substrate App 20150040941 - Freer; Erik M. ; et al.	2015-02-12
Multi-stage substrate cleaning method and apparatus Grant 8,757,177 - Kholodenko , et al. June 24, 2	2014-06-24
Material for cleaning a substrate Grant 8,716,210 - Freer , et al. May 6, 2	2014-05-06
Systems for Surface Treatment of Semiconductor Substrates using Sequential Chemical Applications App 20140116476 - Mikhaylichenko; Katrina ; et al.	2014-05-01
Apparatus for Cleaning a Semiconductor Substrate App 20140059789 - Freer; Erik M. ; et al.	2014-03-06
Method and apparatus for surface treatment of semiconductor substrates using sequential chemical applications Grant 8,652,266 - Mikhaylichenko , et al. February 18, 2	2014-02-18
Method of reducing pattern collapse in high aspect ratio nanostructures Grant 8,617,993 - Yasseri , et al. December 31, 2	2013-12-31
Method for removing contamination from a substrate and for making a cleaning solution Grant 8,608,859 - Freer , et al. December 17, 2	2013-12-17
Apparatus for cleaning contaminants from substrate Grant 8,590,550 - Korolik , et al. November 26, 2	2013-11-26
Methods for cleaning a semiconductor substrate Grant 8,591,662 - Freer , et al. November 26, 2	2013-11-26
Substrate Cleaning System Using Stabilized Fluid Solutions App 20130284217 - Freer; Erik M. ; et al.	2013-10-31
Method and apparatus for removing contamination from substrate Grant 8,555,903 - Freer , et al. October 15, 2	2013-10-15
Method and apparatus for cleaning a semiconductor substrate Grant 8,522,801 - Freer , et al. September 3, 2	2013-09-03
Apparatus and system for cleaning a substrate Grant 8,522,799 - Freer , et al. September 3, 2	2013-09-03
Method and apparatus for particle removal Grant 8,480,810 - Freer , et al. July 9, 2	2013-07-09
Substrate preparation using stabilized fluid solutions and methods for making stable fluid solutions Grant 8,475,599 - Freer , et al. July 2, 2	2013-07-02
Method and apparatus for pattern collapse free wet processing of semiconductor devices Grant 8,440,573 - Mikhaylichenko , et al. May 14, 2	2013-05-14
Multi-stage Substrate Cleaning Method And Apparatus App 20130068261 - Kholodenko; Arnold ; et al.	2013-03-21
Apparatus for Cleaning a Semiconductor Substrate App 20130048021 - Freer; Erik M. ; et al.	2013-02-28
Damage free, high-efficiency, particle removal cleaner comprising polyvinyl alcohol particles Grant 8,367,594 - Mikhaylichenko February 5, 2	2013-02-05
Method and apparatus for silicon oxide residue removal Grant 8,324,114 - Mikhaylichenko , et al. December 4, 2	2012-12-04
Method and apparatus for cleaning a semiconductor substrate Grant 8,316,866 - Freer , et al. November 27, 2	2012-11-27
Multi-stage substrate cleaning method and apparatus Grant 8,317,934 - Kholodenko , et al. November 27, 2	2012-11-27
Apparatus and Method for Reducing Substrate Pattern Collapse During Drying Operations App 20120260517 - Lenz; Eric ; et al.	2012-10-18
Two-phase substrate cleaning material Grant 8,242,067 - Korolik , et al. August 14, 2	2012-08-14
Cleaning compound and method and system for using the cleaning compound Grant 8,137,474 - Freer , et al. March 20, 2	2012-03-20
Proximity head heating method and apparatus Grant 8,102,014 - Mikhaylichenko , et al. January 24, 2	2012-01-24
Method And Apparatus For Silicon Oxide Residue Removal App 20110294299 - Mikhaylichenko; Katrina ; et al.	2011-12-01
Proximity head heating method and apparatus Grant 8,062,471 - Mikhaylichenko , et al. November 22, 2	2011-11-22
Substrate proximity drying using in-situ local heating of substrate Grant 8,011,116 - Mikhaylichenko , et al. September 6, 2	2011-09-06
Method For Reducing Pattern Collapse In High Aspect Ratio Nanostructures App 20110189858 - Yasseri; Amir A. ; et al.	2011-08-04
Method And Apparatus For Pattern Collapse Free Wet Processing Of Semiconductor Devices App 20110183522 - Mikhaylichenko; Katrina ; et al.	2011-07-28
System And Method Of Preventing Pattern Collapse Using Low Surface Tension Fluid App 20110139183 - Mikhaylichenko; Katrina ; et al.	2011-06-16
Apparatus for Contained Chemical Surface Treatment App 20110061687 - Mikhaylichenko; Katrina ; et al.	2011-03-17
Material For Cleaning A Substrate App 20110065621 - Freer; Erik M. ; et al.	2011-03-17
Methods for contained chemical surface treatment Grant 7,897,213 - Mikhaylichenko , et al. March 1, 2	2011-03-01
Proximity Head Heating Method and Apparatus App 20110008916 - Mikhaylichenko; Katrina ; et al.	2011-01-13
Method and material for cleaning a substrate Grant 7,862,662 - Freer , et al. January 4, 2	2011-01-04
Damage-Free High Efficiency Particle Removal Clean App 20100331226 - Mikhaylichenko; Katrina	2010-12-30
Substrate Proximity Drying Using In-situ Local Heating Of Substrate App 20100313443 - Mikhaylichenko; Katrina ; et al.	2010-12-16
Apparatus for Cleaning Contaminants from Substrate App 20100313918 - Korolik; Mikhail ; et al.	2010-12-16
Two-Phase Substrate Cleaning Material App 20100317556 - Korolik; Mikhail ; et al.	2010-12-16
Multi-Stage Substrate Cleaning Method and Apparatus App 20100288311 - Kholodenko; Arnold ; et al.	2010-11-18
Substrate proximity drying using in-situ local heating of substrate and substrate carrier point of contact, and methods, apparatus, and systems for implementing the same Grant 7,806,126 - Mikhaylichenko , et al. October 5, 2	2010-10-05
Method and system for using a two-phases substrate cleaning compound Grant 7,799,141 - Korolik , et al. September 21, 2	2010-09-21
Method for Removing Contamination from a Substrate and for Making a Cleaning Solution App 20100206340 - Freer; Erik M. ; et al.	2010-08-19
System and method for a combined contact and non-contact wafer cleaning module Grant 7,743,449 - Mikhaylichenko , et al. June 29, 2	2010-06-29
Method for removing contamination from a substrate and for making a cleaning solution Grant 7,737,097 - Freer , et al. June 15, 2	2010-06-15
Cleaning Compound and Method and System for Using the Cleaning Compound App 20100139694 - Freer; Erik M. ; et al.	2010-06-10
Cleaning compound and method and system for using the cleaning compound Grant 7,696,141 - Freer , et al. April 13, 2	2010-04-13
Method and Apparatus for Removing Contamination from Substrate App 20100059088 - Freer; Erik M. ; et al.	2010-03-11
Method And Apparatus For Surface Treatment Of Semiconductor Substrates Using Sequential Chemical Applications App 20100018553 - Mikhaylichenko; Katrina ; et al.	2010-01-28
Method and apparatus for removing contamination from substrate Grant 7,648,584 - Freer , et al. January 19, 2	2010-01-19
Apparatus And System For Cleaning A Substrate App 20090308413 - Freer; Erik M. ; et al.	2009-12-17
Method And Material For Cleaning A Substrate App 20090308410 - Freer; Erik M. ; et al.	2009-12-17
System and method for contained chemical surface treatment App 20090114249 - Mikhaylichenko; Katrina ; et al.	2009-05-07
Chemical resistant semiconductor processing chamber bodies App 20080038448 - Kholodenko; Arnold ; et al.	2008-02-14
Method and apparatus for particle removal App 20070151583 - Freer; Erik M. ; et al.	2007-07-05
Substrate preparation using stabilized fluid solutions and methods for making stable fluid solutions App 20070155640 - Freer; Erik M. ; et al.	2007-07-05
Method And Apparatus For Cleaning A Semiconductor Substrate App 20070084483 - Freer; ErikM ; et al.	2007-04-19
Method And Apparatus For Cleaning A Semiconductor Substrate App 20070084485 - Freer; Erik M. ; et al.	2007-04-19
Method and system for using a two-phases substrate cleaning compound App 20070087950 - Korolik; Mikhail ; et al.	2007-04-19
Method and apparatus for removing contamination from substrate App 20070079848 - Freer; Erik M. ; et al.	2007-04-12
Chemically assisted mechanical cleaning of MRAM structures Grant 7,067,016 - Mikhaylichenko , et al. June 27, 2	2006-06-27
Non-contact discrete removal of substrate surface contaminants/coatings, and method, apparatus, and system for implementing the same App 20060131268 - Mikhaylichenko; Katrina ; et al.	2006-06-22
Method for removing contamination from a substrate and for making a cleaning solution App 20060128590 - Freer; Erik M. ; et al.	2006-06-15
Cleaning compound and method and system for using the cleaning compound App 20060128600 - Freer; Erik M. ; et al.	2006-06-15
System and method for a combined contact and non-contact wafer cleaning module App 20060096048 - Mikhaylichenko; Katrina ; et al.	2006-05-11
Brush scrubbing-high frequency resonating substrate processing system Grant 7,032,269 - Mikhaylichenko , et al. April 25, 2	2006-04-25
System and method for a combined contact and non-contact wafer cleaning module Grant 7,007,333 - Mikhaylichenko , et al. March 7, 2	2006-03-07
Brush scrubbing-high frequency resonating substrate processing system App 20060016029 - Mikhaylichenko; Katrina ; et al.	2006-01-26
Proximity head heating method and apparatus App 20050221621 - Mikhaylichenko, Katrina ; et al.	2005-10-06
Brush scrubbing-high frequency resonating wafer processing system and methods for making and implementing the same Grant 6,951,042 - Mikhaylichenko , et al. October 4, 2	2005-10-04
Method for post-etch and strip residue removal on coral films Grant 6,949,411 - Mikhaylichenko , et al. September 27, 2	2005-09-27
Substrate processing using a fluid re-circulation system in a wafer scrubbing system Grant 6,851,436 - Ravkin , et al. February 8, 2	2005-02-08
Drying a substrate using a combination of substrate processing technologies Grant 6,770,151 - Ravkin , et al. August 3, 2	2004-08-03
Substrate cleaning brush preparation sequence, method, and system Grant 6,733,596 - Mikhaylichenko , et al. May 11, 2	2004-05-11
System and apparatus for evaluating the effectiveness of wafer drying operations Grant 6,611,326 - Yakovlev , et al. August 26, 2	2003-08-26

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