MIKHAYLICHENKO; Ekaterina
Patent Applications and Registrations
Patent applications and USPTO patent grants for MIKHAYLICHENKO; Ekaterina.The latest application filed is for "pad carrier for horizontal pre-clean module".
- MIKHAYLICHENKO; Ekaterina - San Jose CA
| Patent | Date |
|---|---|
| Pad Carrier For Horizontal Pre-clean Module App 20220199396 - GOLUBOVSKY; Edward ; et al. | 2022-06-23 |
| Substrate Handling In A Modular Polishing System With Single Substrate Cleaning Chambers App 20220143780 - BROWN; Brian J. ; et al. | 2022-05-12 |
| Non-contact clean module Grant 11,289,347 - Rangarajan , et al. March 29, 2 | 2022-03-29 |
| Non-contact Clean Module App 20220044946 - RANGARAJAN; Jagan ; et al. | 2022-02-10 |
| Non-contact clean module Grant 11,158,524 - Rangarajan , et al. October 26, 2 | 2021-10-26 |
| Thin plastic polishing article for CMP applications Grant 10,786,885 - Tolles , et al. September 29, 2 | 2020-09-29 |
| Spray bar design for uniform liquid flow distribution on a substrate Grant 10,751,738 - Rangarajan , et al. A | 2020-08-25 |
| Non-contact Clean Module App 20200043756 - RANGARAJAN; Jagan ; et al. | 2020-02-06 |
| Thin Plastic Polishing Article For Cmp Applications App 20180207770 - TOLLES; Robert D. ; et al. | 2018-07-26 |
| Spray Bar Design For Uniform Liquid Flow Distribution On A Substrate App 20180185857 - RANGARAJAN; Jagan ; et al. | 2018-07-05 |
| Systems and methods for rinsing and drying substrates Grant 9,984,867 - Mikhaylichenko , et al. May 29, 2 | 2018-05-29 |
| Substrate rinsing systems and methods Grant 9,859,135 - Frankel , et al. January 2, 2 | 2018-01-02 |
| Substrate Holder Assembly, Apparatus, And Methods App 20160201986 - Velazquez; Edwin ; et al. | 2016-07-14 |
| Substrate Rinsing Systems And Methods App 20160175857 - Frankel; Jonathan S. ; et al. | 2016-06-23 |
| Systems And Methods For Rinsing And Drying Substrates App 20160181086 - Mikhaylichenko; Ekaterina ; et al. | 2016-06-23 |
| Substrate Edge Residue Removal Systems, Apparatus, And Methods App 20160178279 - Velazquez; Edwin ; et al. | 2016-06-23 |
| Method And Apparatus For High Efficiency Post Cmp Clean Using Engineered Viscous Fluid App 20160083676 - MIKHAYLICHENKO; Ekaterina ; et al. | 2016-03-24 |
| Processes And Apparatus For Cleaning, Rinsing, And Drying Substrates App 20150090299 - Brown; Brian J. ; et al. | 2015-04-02 |
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