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System, method and program for designing a utility facility and method for manufacturing a product by the utility facility
Grant 7,844,433 - Masuda , et al. November 30, 2 | 2010-11-30 |
Plating apparatus
Grant 7,632,382 - Saito , et al. December 15, 2 | 2009-12-15 |
Film coating unit and film coating method
Grant 7,497,908 - Mizuno , et al. March 3, 2 | 2009-03-03 |
Coating Film Forming Apparatus and Coating Film Forming Method
App 20070251449 - Mizuno; Tsuyoshi ; et al. | 2007-11-01 |
System, method and program for designing a utility facility and method for manufacturing a product by the utility facility
App 20070061049 - Masuda; Toshikatsu ; et al. | 2007-03-15 |
Semiconductor device manufacturing method, semiconductor device manufacturing apparatus, semiconductor device manufacturing system, and cleaning method for semiconductor device manufacturing apparatus
Grant 7,145,667 - Yamamoto , et al. December 5, 2 | 2006-12-05 |
Cleaning method for a semiconductor device manufacturing apparatus
Grant 6,989,281 - Yamamoto , et al. January 24, 2 | 2006-01-24 |
Semiconductor manufacturing line availability evaluating system and design system
Grant 6,983,191 - Mikata January 3, 2 | 2006-01-03 |
Plating apparatus
App 20050250324 - Saito, Koji ; et al. | 2005-11-10 |
Apparatus for predicting life of rotary machine and equipment using the same
Grant 6,944,572 - Ushiku , et al. September 13, 2 | 2005-09-13 |
Reliable semiconductor device and method of manufacturing the same
Grant 6,929,991 - Mikata , et al. August 16, 2 | 2005-08-16 |
Semiconductor manufacturing line availability evaluating system and design system
App 20050107904 - Mikata, Yuuichi | 2005-05-19 |
Cleaning method for a semiconductor device manufacturing apparatus
App 20050059203 - Yamamoto, Akihito ; et al. | 2005-03-17 |
Method of manufacturing a semiconductor device
Grant 6,867,054 - Mikata March 15, 2 | 2005-03-15 |
Method for predicting life of rotary machine and determining repair timing of rotary machine
Grant 6,865,513 - Ushiku , et al. March 8, 2 | 2005-03-08 |
Film coating unit and film coating method
App 20040265493 - Mizuno, Tsuyoshi ; et al. | 2004-12-30 |
Reliable semiconductor device and method of manufacturing the same
App 20040155271 - Mikata, Yuuichi ; et al. | 2004-08-12 |
Mask and method for producing thereof and a semiconductor device using the same
App 20040155204 - Kumano, Hiroshi ; et al. | 2004-08-12 |
System for determining dry cleaning timing, method for determining dry cleaning timing, dry cleaning method, and method for manufacturing semiconductor device
Grant 6,772,045 - Katsui , et al. August 3, 2 | 2004-08-03 |
Apparatus for predicting life of rotary machine and equipment using the same
App 20040143418 - Ushiku, Yukihiro ; et al. | 2004-07-22 |
Reliable semiconductor device and method of manufacturing the same
Grant 6,713,824 - Mikata , et al. March 30, 2 | 2004-03-30 |
System for determining dry cleaning timing, method for determining dry cleaning timing, dry cleaning method, and method for manufacturing semiconductor device
App 20030139835 - Katsui, Shuji ; et al. | 2003-07-24 |
Semiconductor device manufacturing method, semiconductor device manufacturing apparatus, semiconductor device manufacturing system, and cleaning method for semiconductor device manufacturing apparatus
App 20030045960 - Yamamoto, Akihito ; et al. | 2003-03-06 |
Apparatus for predicting life of rotary machine, equipment using the same, method for predicting life and determining repair timing of the same
App 20030009311 - Ushiku, Yukihiro ; et al. | 2003-01-09 |
Method of manufacturing a semiconductor device
App 20020142497 - Mikata, Yuuichi | 2002-10-03 |
Semiconductor device applied to composite insulative film manufacturing method thereof
Grant 6,171,977 - Kasai , et al. January 9, 2 | 2001-01-09 |
Method and apparatus for manufacturing a semiconductor device
Grant 5,766,785 - Mikata , et al. June 16, 1 | 1998-06-16 |
Method and apparatus for evacuating vacuum system
Grant 5,746,581 - Okumura , et al. May 5, 1 | 1998-05-05 |
Apparatus for forming a thin film
Grant 5,702,531 - Mikata December 30, 1 | 1997-12-30 |
Method of making doped semiconductor film having uniform impurity concentration on semiconductor substrate and apparatus for making the same
Grant 5,702,529 - Mikata , et al. December 30, 1 | 1997-12-30 |
Method of cleaning reaction tube and exhaustion piping system in heat processing apparatus
Grant 5,637,153 - Niino , et al. June 10, 1 | 1997-06-10 |
Semiconductor device and its fabricating method
Grant 5,582,640 - Okada , et al. December 10, 1 | 1996-12-10 |
Method of cleaning reaction tube
Grant 5,380,370 - Niino , et al. * January 10, 1 | 1995-01-10 |
Method of making a through hole in multi-layer insulating films
Grant 5,378,652 - Samata , et al. January 3, 1 | 1995-01-03 |
Heat treatment apparatus
Grant 5,370,371 - Miyagi , et al. December 6, 1 | 1994-12-06 |
Vertical boat used for heat treatment of semiconductor wafer and vertical heat treatment apparatus
Grant 5,316,472 - Niino , et al. May 31, 1 | 1994-05-31 |
Semiconductor device silicon via fill formed in multiple dielectric layers
Grant 5,291,058 - Samata , et al. March 1, 1 | 1994-03-01 |
Method of manufacturing semiconductor device
Grant 5,238,859 - Kamijo , et al. August 24, 1 | 1993-08-24 |
Method of manufacturing silicon nitride film
Grant 5,234,869 - Mikata , et al. August 10, 1 | 1993-08-10 |
Vertical field effect transistor with an extended polysilicon channel region
Grant 5,181,088 - Mikata , et al. January 19, 1 | 1993-01-19 |
Method of manufacturing a semiconductor memory device having a floating gate electrode composed of 2-10 silicon grains
Grant 5,149,666 - Mikata , et al. September 22, 1 | 1992-09-22 |
Method of manufacturing semiconductor device
Grant 5,032,535 - Kamijo , et al. July 16, 1 | 1991-07-16 |
Semiconductor memory device and method of manufacturing the same
Grant 5,031,010 - Mikata , et al. July 9, 1 | 1991-07-09 |
Method for manufacturing a semiconductor device and suppressing the generation of bulk microdefects near the substrate surface layer
Grant 4,931,405 - Kamijo , et al. June 5, 1 | 1990-06-05 |
Refractory silicide conductor containing iron
Grant 4,721,991 - Ohtaki , et al. January 26, 1 | 1988-01-26 |
Method of manufacturing SiO.sub.2 -Si interface for floating gate semiconductor device
Grant 4,597,159 - Usami , et al. July 1, 1 | 1986-07-01 |
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