Mikami; Toru

Patent Applications and Registrations

Patent applications and USPTO patent grants for Mikami; Toru.The latest application filed is for "measurement apparatus and measurement method".

Company Profile

0.9.11

Mikami; Toru - Yokkaichi JP
MIKAMI; Toru - Yokkaichi-shi JP
Mikami; Toru - Fujisawa JP
Mikami; Toru - Kanagawa JP
Mikami; Toru - Yokohama-shi JP
Mikami; Toru - Tokorozawa JP
Mikami, Toru - Fujisawa-shi JP
Mikami, Toru - Tokorozawa-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Measurement apparatus and measurement method Grant 9,612,108 - Mikami April 4, 2	2017-04-04
Measurement Apparatus And Measurement Method App 20160139034 - MIKAMI; Toru	2016-05-19
Film Thickness Monitoring Method, Film Thickness Monitoring Device, And Semiconductor Manufacturing Apparatus App 20140238605 - MIKAMI; Toru	2014-08-28
Film Thickness Monitoring Method, Film Thickness Monitoring Device, And Semiconductor Manufacturing Apparatus App 20140224425 - MIKAMI; Toru	2014-08-14
Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus Grant 7,903,264 - Hayasaki , et al. March 8, 2	2011-03-08
Method for monitoring film thickness, a system for monitoring film thickness, a method for manufacturing a semiconductor device, and a program product for controlling film thickness monitoring system Grant 7,573,582 - Mikami August 11, 2	2009-08-11
Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus Grant 7,483,155 - Hayasaki , et al. January 27, 2	2009-01-27
Structure Inspection Method, Pattern Formation Method, Process Condition Determination Method And Resist Pattern Evaluation Apparatus App 20090002722 - HAYASAKI; KEI ; et al.	2009-01-01
Method for monitoring film thickness, a system for monitoring film thickness, a method for manufacturing a semiconductor device, and a program product for controlling film thickness monitoring system App 20080151271 - Mikami; Toru	2008-06-26
Method for monitoring film thickness, a system for monitoring film thickness, a method for manufacturing a semiconductor device, and a program product for controlling film thickness monitoring system Grant 7,348,192 - Mikami March 25, 2	2008-03-25
Dimension measurement method, method of manufacturing semiconductor device, dimension measurement apparatus and measurement mark Grant 7,289,232 - Mikami , et al. October 30, 2	2007-10-30
Optical disk device Grant 7,164,628 - Mikami January 16, 2	2007-01-16
Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus App 20050168758 - Hayasaki, Kei ; et al.	2005-08-04
Dimension measurement method, method of manufacturing semiconductor device, dimension measurement apparatus and measurement mark App 20050151980 - Mikami, Toru ; et al.	2005-07-14
Method for monitoring film thickness, a system for monitoring film thickness, a method for manufacturing a semiconductor device, and a program product for controlling film thickness monitoring system App 20050095730 - Mikami, Toru	2005-05-05
Film thickness measuring method and step measuring method Grant 6,825,938 - Mikami , et al. November 30, 2	2004-11-30
Mark position detecting system and method for detecting mark position Grant 6,563,594 - Mikami May 13, 2	2003-05-13
Optical disk device App 20030067849 - Mikami, Toru	2003-04-10
Film thickness measuring method and step measuring method App 20020163652 - Mikami, Toru ; et al.	2002-11-07
Mark position detecting system and method for detecting mark position App 20010026368 - Mikami, Toru	2001-10-04

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