Patent | Date |
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Method for manufacturing multilayer film-deposited substrate and multilayer film-deposited substrate Grant 10,775,692 - Ishikawa , et al. Sept | 2020-09-15 |
Method For Manufacturing Multilayer Film-deposited Substrate And Multilayer Film-deposited Substrate App 20180059530 - Ishikawa; Yunosuke ;   et al. | 2018-03-01 |
Reflective mask blank for EUV lithography and process for its production, as well as substrate with reflective layer for such mask blank and process for its production Grant 9,720,316 - Mikami August 1, 2 | 2017-08-01 |
Reflective mask blank for EUV lithography, or reflective layer-coated substrate for EUV lithography, and process for its production Grant 9,448,469 - Mikami September 20, 2 | 2016-09-20 |
Reflective mask blank for EUV lithography and process for its production Grant 9,423,684 - Maeshige , et al. August 23, 2 | 2016-08-23 |
Reflective Mask Blank For Euv Lithography And Process For Its Production, As Well As Substrate With Reflective Layer For Such Mask Blank And Process For Its Production App 20160109792 - MIKAMI; Masaki | 2016-04-21 |
Reflective mask blank for EUV lithography, and process for its production Grant 9,207,529 - Kinoshita , et al. December 8, 2 | 2015-12-08 |
Reflective Mask Blank For Euv Lithography, Or Reflective Layer-coated Substrate For Euv Lithography, And Process For Its Production App 20150160548 - Mikami; Masaki | 2015-06-11 |
Reflective mask blank for EUV lithography and process for its production, as well as substrate with reflective layer for such mask blank and process for its production Grant 9,052,601 - Mikami June 9, 2 | 2015-06-09 |
Reflective layer-equipped substrate for EUV lithography, reflective mask blank for EUV lithography, reflective mask for EUV lithography, and process for production of the reflective layer-equipped substrate Grant 8,993,201 - Mikami , et al. March 31, 2 | 2015-03-31 |
Optical member for EUV lithography Grant 8,986,910 - Mikami March 24, 2 | 2015-03-24 |
Optical member for EUV lithography, and process for production of reflective layer-equipped substrate Grant 8,927,179 - Mikami January 6, 2 | 2015-01-06 |
Substrate with reflective layer for EUV lithography and reflective mask blank for EUV lithography Grant 8,828,626 - Mikami , et al. September 9, 2 | 2014-09-09 |
Reflective Mask Blank For Euv Lithography And Process For Its Production App 20140212794 - MAESHIGE; Kazunobu ;   et al. | 2014-07-31 |
Reflective Mask Blank For Euv Lithography, And Process For Its Production App 20140186752 - KINOSHITA; Takeru ;   et al. | 2014-07-03 |
Reflective Mask Blank For Euv Lithography And Process For Its Production, As Well As Substrate With Reflective Layer For Such Mask Blank And Process For Its Production App 20140017601 - MIKAMI; Masaki | 2014-01-16 |
Multilayer mirror for EUV lithography and process for its production Grant 8,580,465 - Mikami , et al. November 12, 2 | 2013-11-12 |
Substrate With Reflective Layer For Euv Lithography And Reflective Mask Blank For Euv Lithography App 20130115547 - Mikami; Masaki ;   et al. | 2013-05-09 |
Reflective Layer-equipped Substrate For Euv Lithography, Reflective Mask Blank For Euv Lithography, Reflective Mask For Euv Lithography, And Process For Production Of The Reflective Layer-equipped Substrate App 20120231378 - Mikami; Masaki ;   et al. | 2012-09-13 |
Optical Member For Euv Lithography App 20120225375 - MIKAMI; Masaki | 2012-09-06 |
Optical Member For Euv Lithography, And Process For Production Of Reflective Layer-equipped Substrate App 20120219890 - MIKAMI; Masaki | 2012-08-30 |
Multilayer Mirror For Euv Lithography And Process For Its Production App 20120196208 - MIKAMI; Masaki ;   et al. | 2012-08-02 |
Reflective mask blank for EUV lithography Grant 8,088,538 - Hayashi , et al. January 3, 2 | 2012-01-03 |
Reflective mask blank for EUV lithography Grant 7,906,259 - Hayashi , et al. March 15, 2 | 2011-03-15 |
Reflective mask blank for EUV lithography and substrate with functional film for the same Grant 7,833,682 - Hayashi , et al. November 16, 2 | 2010-11-16 |
Reflective mask blank for EUV lithography and substrate with a conductive film for the mask blank Grant 7,736,821 - Hayashi , et al. June 15, 2 | 2010-06-15 |
Reflective Mask Blank For Euv Lithography App 20100035165 - HAYASHI; KAZUYUKI ;   et al. | 2010-02-11 |
Reflective Mask Blank For Euv Lithography App 20090011341 - Hayashi; Kazuyuki ;   et al. | 2009-01-08 |
Reflective Mask Blank For Euv Lithography And Substrate With Functional Film For The Same App 20080318140 - Hayashi; Kazuyuki ;   et al. | 2008-12-25 |
Reflective Mask Blank For Euv Lithography And Substrate With A Conductive Film For The Mask Blank App 20070160874 - Hayashi; Kazuyuki ;   et al. | 2007-07-12 |
Notification information display apparatus notification information display system and recording medium Grant 6,678,866 - Sugimoto , et al. January 13, 2 | 2004-01-13 |
Magnetic recording medium and production method thereof and magenetic recording device App 20020146594 - Takahashi, Migaku ;   et al. | 2002-10-10 |