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Patent applications and USPTO patent grants for Mignot; Yann A. M..The latest application filed is for "alternating hardmasks for tight-pitch line formation".
Patent | Date |
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Alternating hardmasks for tight-pitch line formation Grant 11,171,002 - Arnold , et al. November 9, 2 | 2021-11-09 |
Alternating Hardmasks For Tight-pitch Line Formation App 20210335619 - Burns; Sean D. ;   et al. | 2021-10-28 |
Alternating hardmasks for tight-pitch line formation Grant 11,031,248 - Burns , et al. June 8, 2 | 2021-06-08 |
Efficient metal-insulator-metal capacitor Grant 10,978,550 - Chung , et al. April 13, 2 | 2021-04-13 |
Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogs Grant 10,957,583 - Burns , et al. March 23, 2 | 2021-03-23 |
Efficient Metal-insulator-metal Capacitor App 20200273947 - Chung; Kisup ;   et al. | 2020-08-27 |
Alternating Hardmasks For Tight-pitch Line Formation App 20200266066 - Arnold; John C. ;   et al. | 2020-08-20 |
Efficient metal-insulator-metal capacitor Grant 10,651,266 - Chung , et al. | 2020-05-12 |
Via cleaning to reduce resistance Grant 10,586,732 - Mignot , et al. | 2020-03-10 |
Alternating hardmasks for tight-pitch line formation Grant 10,580,652 - Arnold , et al. | 2020-03-03 |
Via Cleaning To Reduce Resistance App 20200066577 - Mignot; Yann A.M. ;   et al. | 2020-02-27 |
Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogs Grant 10,546,774 - Burns , et al. Ja | 2020-01-28 |
Self-aligned Quadruple Patterning (saqp) For Routing Layouts Including Multi-track Jogs App 20190393082 - Burns; Sean D. ;   et al. | 2019-12-26 |
Alternating Hardmasks For Tight-pitch Line Formation App 20190333774 - Burns; Sean D. ;   et al. | 2019-10-31 |
Alternating hardmasks for tight-pitch line formation Grant 10,410,875 - Burns , et al. Sept | 2019-09-10 |
Self aligned conductive lines with relaxed overlay Grant 10,395,985 - Burns , et al. A | 2019-08-27 |
Hard masks for block patterning Grant 10,354,885 - De Silva , et al. July 16, 2 | 2019-07-16 |
Alternating hardmasks for tight-pitch line formation Grant 10,312,103 - Burns , et al. | 2019-06-04 |
Efficient metal-insulator-metal capacitor fabrication Grant 10,256,289 - Chung , et al. | 2019-04-09 |
Alternating Hardmasks For Tight-pitch Line Formation App 20180350600 - Arnold; John C. ;   et al. | 2018-12-06 |
Efficient Metal-insulator-metal Capacitor App 20180350896 - Chung; Kisup ;   et al. | 2018-12-06 |
Alternating hardmasks for tight-pitch line formation Grant 10,103,022 - Arnold , et al. October 16, 2 | 2018-10-16 |
Efficient metal-insulator-metal capacitor Grant 10,090,378 - Chung , et al. October 2, 2 | 2018-10-02 |
Hard masks for block patterning Grant 10,090,164 - De Silva , et al. October 2, 2 | 2018-10-02 |
Self aligned conductive lines with relaxed overlay Grant 10,083,864 - Burns , et al. September 25, 2 | 2018-09-25 |
Alternating Hardmasks For Tight-pitch Line Formation App 20180269060 - Arnold; John C. ;   et al. | 2018-09-20 |
Efficient Metal-insulator-metal Capacitor Fabrication App 20180269274 - Chung; Kisup ;   et al. | 2018-09-20 |
Efficient Metal-insulator-metal Capacitor App 20180269271 - Chung; Kisup ;   et al. | 2018-09-20 |
Alternating Hardmasks For Tight-pitch Line Formation App 20180247824 - Burns; Sean D. ;   et al. | 2018-08-30 |
Alternating Hardmasks For Tight-pitch Line Formation App 20180247825 - Burns; Sean D. ;   et al. | 2018-08-30 |
Via and chamfer control for advanced interconnects Grant 10,062,605 - Mignot , et al. August 28, 2 | 2018-08-28 |
Self Aligned Conductive Lines With Relaxed Overlay App 20180233408 - Burns; Sean D. ;   et al. | 2018-08-16 |
Self-aligned Quadruple Patterning (saqp) For Routing Layouts Including Multi-track Jogs App 20180233403 - Burns; Sean D. ;   et al. | 2018-08-16 |
Avoiding gate metal via shorting to source or drain contacts Grant 10,043,744 - Chan , et al. August 7, 2 | 2018-08-07 |
Image transfer using EUV lithographic structure and double patterning process Grant 10,032,633 - Chen , et al. July 24, 2 | 2018-07-24 |
Image Transfer Using Euv Lithographic Structure And Double Patterning Process App 20180204723 - CHEN; HSUEH-CHUNG ;   et al. | 2018-07-19 |
Image Transfer Using Euv Lithographic Structure And Double Patterning Process App 20180204724 - CHEN; HSUEH-CHUNG ;   et al. | 2018-07-19 |
Hard Masks For Block Patterning App 20180197745 - De Silva; Ekmini A. ;   et al. | 2018-07-12 |
Hard Masks For Block Patterning App 20180197744 - De Silva; Ekmini A. ;   et al. | 2018-07-12 |
Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogs Grant 9,991,156 - Burns , et al. June 5, 2 | 2018-06-05 |
Aligning conductive vias with trenches Grant 9,972,533 - Burns , et al. May 15, 2 | 2018-05-15 |
Via And Chamfer Control For Advanced Interconnects App 20180096887 - Mignot; Yann A.M. ;   et al. | 2018-04-05 |
Self aligned conductive lines Grant 9,911,647 - Burns , et al. March 6, 2 | 2018-03-06 |
Avoiding Gate Metal Via Shorting To Source Or Drain Contacts App 20180061754 - Chan; Victor W.C. ;   et al. | 2018-03-01 |
Aligning Conductive Vias With Trenches App 20180025943 - Burns; Sean D. ;   et al. | 2018-01-25 |
Via Cleaning To Reduce Resistance App 20180005874 - Mignot; Yann A.M. ;   et al. | 2018-01-04 |
Self Aligned Conductive Lines With Relaxed Overlay App 20180005885 - Burns; Sean D. ;   et al. | 2018-01-04 |
Self aligned conductive lines Grant 9,852,946 - Burns , et al. December 26, 2 | 2017-12-26 |
Self Aligned Conductive Lines App 20170358487 - Burns; Sean D. ;   et al. | 2017-12-14 |
Self Aligned Conductive Lines App 20170358492 - Burns; Sean D. ;   et al. | 2017-12-14 |
Avoiding Gate Metal Via Shorting To Source Or Drain Contacts App 20170352621 - Chan; Victor W. C. ;   et al. | 2017-12-07 |
Self-aligned Quadruple Patterning (saqp) For Routing Layouts Including Multi-track Jogs App 20170352585 - Burns; Sean D. ;   et al. | 2017-12-07 |
Avoiding gate metal via shorting to source or drain contacts Grant 9,837,351 - Chan , et al. December 5, 2 | 2017-12-05 |
Self aligned conductive lines Grant 9,786,554 - Burns , et al. October 10, 2 | 2017-10-10 |
Method and structure for cut material selection Grant 9,779,944 - Burns , et al. October 3, 2 | 2017-10-03 |
Aligning conductive vias with trenches Grant 9,773,700 - Burns , et al. September 26, 2 | 2017-09-26 |
Via and chamfer control for advanced interconnects Grant 9,691,659 - Mignot , et al. June 27, 2 | 2017-06-27 |
Self aligned conductive lines with relaxed overlay Grant 9,607,886 - Burns , et al. March 28, 2 | 2017-03-28 |
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