Migita; Yasushi
Patent Applications and Registrations
Patent applications and USPTO patent grants for Migita; Yasushi.The latest application filed is for "wafer heating apparatus, electrostatic chuck, and method for manufacturing wafer heating apparatus".
- Migita; Yasushi - Kirishima N/A JP
- Migita; Yasushi - Kirishima-shi JP
- Migita; Yasushi - Kyoto-shi JP
- Migita; Yasushi - Kagoshima JP
- Migita; Yasushi - Kokubu JP
- Migita, Yasushi - Kokubu-shi JP
| Patent | Date |
|---|---|
| Wafer support member, method for manufacturing the same and electrostatic chuck using the same Grant 8,503,155 - Migita August 6, 2 | 2013-08-06 |
| Wafer Heating Apparatus, Electrostatic Chuck, and Method for Manufacturing Wafer Heating Apparatus App 20110229837 - Migita; Yasushi | 2011-09-22 |
| Wafer Support Member, Method for Manufacturing the Same and Electrostatic Chuck Using the Same App 20110058303 - Migita; Yasushi | 2011-03-10 |
| Susceptor Grant 7,651,571 - Migita January 26, 2 | 2010-01-26 |
| Electrostatic chuck and wafer holding member and wafer treatment method Grant 7,646,580 - Nakamura , et al. January 12, 2 | 2010-01-12 |
| Susceptor App 20070144442 - Migita; Yasushi | 2007-06-28 |
| Electrostatic chuck and wafer holding member and wafer treatment method App 20060209490 - Nakamura; Tsunehiko ; et al. | 2006-09-21 |
| Electrostatic chuck for holding wafer Grant 7,068,489 - Migita June 27, 2 | 2006-06-27 |
| Wafer supporting member App 20050215073 - Nakamura, Tsunehiko ; et al. | 2005-09-29 |
| Electrostatic chuck Grant 6,643,115 - Sakaue , et al. November 4, 2 | 2003-11-04 |
| Electrostatic chuck for holding wafer App 20030161088 - Migita, Yasushi | 2003-08-28 |
| Electrostatic chuck App 20020176219 - Sakaue, Katsushi ; et al. | 2002-11-28 |
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