Mieher; Walter Dean

Patent Applications and Registrations

Patent applications and USPTO patent grants for Mieher; Walter Dean.The latest application filed is for "system and method for focus determination using focus-sensitive overlay targets".

Company Profile

0.15.13

Mieher; Walter Dean - Los Gatos CA
Mieher; Walter Dean - Santa Clara CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
System and method for focus determination using focus-sensitive overlay targets Grant 10,401,740 - Mieher Sep	2019-09-03
Signal response metrology for scatterometry based overlay measurements Grant 10,352,876 - Shchegrov , et al. July 16, 2	2019-07-16
System and Method for Focus Determination Using Focus-Sensitive Overlay Targets App 20160334716 - Mieher; Walter Dean	2016-11-17
Signal Response Metrology For Scatterometry Based Overlay Measurements App 20150323316 - Shchegrov; Andrei V. ; et al.	2015-11-12
Determination of training set size for a machine learning system Grant 8,452,718 - Jin , et al. May 28, 2	2013-05-28
Overlay marks, methods of overlay mark design and methods of overlay measurements Grant 8,330,281 - Ghinovker , et al. December 11, 2	2012-12-11
Determination Of Training Set Size For A Machine Learning System App 20110307424 - Jin; Wen ; et al.	2011-12-15
Azimuth angle measurement Grant 8,040,511 - Krishnan , et al. October 18, 2	2011-10-18
Overlay Marks, Methods Of Overlay Mark Design And Methods Of Overlay Measurements App 20090291513 - Ghinovker; Mark ; et al.	2009-11-26
Overlay Marks, Methods Of Overlay Mark Design And Methods Of Overlay Measurements App 20080023855 - Ghinovker; Mark ; et al.	2008-01-31
Overlay marks, methods of overlay mark design and methods of overlay measurements Grant 7,317,824 - Ghinovker , et al. January 8, 2	2008-01-08
Overlay marks, methods of overlay mark design and methods of overlay measurements Grant 7,274,814 - Ghinovker , et al. September 25, 2	2007-09-25
Focus masking structures, focus patterns and measurements thereof App 20070108368 - Mieher; Walter Dean ; et al.	2007-05-17
Overlay marks, methods of overlay mark design and methods of overlay measurements Grant 7,181,057 - Adel , et al. February 20, 2	2007-02-20
Overlay marks, methods of overlay mark design and methods of overlay measurements Grant 7,177,457 - Adel , et al. February 13, 2	2007-02-13
Focus masking structures, focus patterns and measurements thereof Grant 7,175,945 - Mieher , et al. February 13, 2	2007-02-13
Overlay marks, methods of overlay mark design and methods of overlay measurements App 20060204073 - Ghinovker; Mark ; et al.	2006-09-14
Overlay marks, methods of overlay mark design and methods of overlay measurements App 20060177120 - Ghinovker; Mark ; et al.	2006-08-10
Overlay marks, methods of overlay mark design and methods of overlay measurements Grant 7,068,833 - Ghinovker , et al. June 27, 2	2006-06-27
Overlay marks, methods of overlay mark design and methods of overlay measurements Grant 6,985,618 - Adel , et al. January 10, 2	2006-01-10
Focus masking structures, focus patterns and measurements thereof App 20050208391 - Mieher, Walter Dean ; et al.	2005-09-22
Focus masking structures, focus patterns and measurements thereof Grant 6,884,552 - Mieher , et al. April 26, 2	2005-04-26
Focus masking structures, focus patterns and measurements thereof App 20030095267 - Mieher, Walter Dean ; et al.	2003-05-22
Overlay marks, methods of overlay mark design and methods of overlay measurements App 20030021465 - Adel, Michael ; et al.	2003-01-30
Overlay marks, methods of overlay mark design and methods of overlay measurements App 20030021466 - Adel, Michael ; et al.	2003-01-30
Overlay marks, methods of overlay mark design and methods of overlay measurements App 20030021467 - Adel, Michael ; et al.	2003-01-30
Overlay alignment measurement mark Grant 6,486,954 - Mieher , et al. November 26, 2	2002-11-26

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