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Inspection tool, inspection method and computer program product
Grant 11,442,368 - Quintanilha , et al. September 13, 2 | 2022-09-13 |
Methods and apparatus for obtaining diagnostic information relating to an industrial process
Grant 11,385,550 - Ypma , et al. July 12, 2 | 2022-07-12 |
Deep learning for semantic segmentation of pattern
Grant 11,379,970 - Koopman , et al. July 5, 2 | 2022-07-05 |
Method And Apparatus For Predicting Substrate Image
App 20220187713 - MIDDLEBROOKS; Scott Anderson ; et al. | 2022-06-16 |
Method And Apparatus For Analyzing Medical Image Data In A Latent Space Representation
App 20220076829 - MIDDLEBROOKS; Scott Anderson ; et al. | 2022-03-10 |
Method And Apparatus For Image Analysis
App 20220026811 - MIDDLEBROOKS; Scott Anderson ; et al. | 2022-01-27 |
Method Of Measuring Variation, Inspection System, Computer Program, And Computer System
App 20220011680 - KIERS; Antoine Gaston Marie ; et al. | 2022-01-13 |
Yield Estimation And Control
App 20210405545 - Middlebrooks; Scott Anderson ; et al. | 2021-12-30 |
Deep Learning For Semantic Segmentation Of Pattern
App 20210374936 - KOOPMAN; Adrianus Cornelis Matheus ; et al. | 2021-12-02 |
Method and apparatus for image analysis
Grant 11,143,970 - Middlebrooks , et al. October 12, 2 | 2021-10-12 |
Method of measuring variation, inspection system, computer program, and computer system
Grant 11,131,936 - Kiers , et al. September 28, 2 | 2021-09-28 |
Method For Decreasing Uncertainty In Machine Learning Model Predictions
App 20210286270 - MIDDLEBROOKS; Scott Anderson ; et al. | 2021-09-16 |
Yield estimation and control
Grant 11,119,414 - Middlebrooks , et al. September 14, 2 | 2021-09-14 |
Inspection Tool, Inspection Method And Computer Program Product
App 20210232052 - QUINTANILHA; Richard ; et al. | 2021-07-29 |
Method and apparatus for image analysis
Grant 11,067,901 - Middlebrooks , et al. July 20, 2 | 2021-07-20 |
Hidden Defect Detection And Epe Estimation Based On The Extracted 3d Information From E-beam Images
App 20210174491 - PISARENCO; Maxim ; et al. | 2021-06-10 |
Source separation from metrology data
Grant 11,016,397 - Middlebrooks , et al. May 25, 2 | 2021-05-25 |
Object identification and comparison
Grant 10,890,540 - Koopman , et al. January 12, 2 | 2021-01-12 |
Displacement based overlay or alignment
Grant 10,852,646 - Jochemsen , et al. December 1, 2 | 2020-12-01 |
Method And Apparatus For Image Analysis
App 20200356009 - MIDDLEBROOKS; Scott Anderson ; et al. | 2020-11-12 |
Systems And Methods For Predicting Layer Deformation
App 20200320238 - BATISTAKIS; Chrysostomos ; et al. | 2020-10-08 |
Methods & Apparatus For Obtaining Diagnostic Information Relating To An Industrial Process
App 20200264520 - YPMA; Alexander ; et al. | 2020-08-20 |
Yield Estimation And Control
App 20200257208 - A1 | 2020-08-13 |
Method and apparatus for image analysis
Grant 10,732,513 - Middlebrooks , et al. | 2020-08-04 |
Metrology method and apparatus, lithographic system and device manufacturing method
Grant 10,725,386 - Middlebrooks , et al. | 2020-07-28 |
Method and apparatus for classifying a data point in imaging data
Grant 10,706,534 - Middlebrooks , et al. | 2020-07-07 |
Source Separation From Metrology Data
App 20200192229 - MIDDLEBROOKS; Scott Anderson ; et al. | 2020-06-18 |
Methods and apparatus for obtaining diagnostic information relating to an industrial process
Grant 10,642,162 - Ypma , et al. | 2020-05-05 |
Yield estimation and control
Grant 10,627,723 - Middlebrooks , et al. | 2020-04-21 |
Method and apparatus for image analysis
Grant 10,607,334 - Middlebrooks , et al. | 2020-03-31 |
Object Identification And Comparison
App 20200072761 - KOOPMAN; Adrianus Cornelis Matheus ; et al. | 2020-03-05 |
Methods and apparatus for obtaining diagnostic information, methods and apparatus for controlling an industrial process
Grant 10,539,882 - Ypma , et al. Ja | 2020-01-21 |
Method And Apparatus For Image Analysis
App 20190391498 - MIDDLEBROOKS; Scott Anderson ; et al. | 2019-12-26 |
Method Of Measuring Variation, Inspection System, Computer Program, And Computer System
App 20190391500 - KIERS; Antoine Gaston Marie ; et al. | 2019-12-26 |
Metrology Apparatus and Method for Determining a Characteristic of One or More Structures on a Substrate
App 20190378012 - Tripodi; Lorenzo ; et al. | 2019-12-12 |
Method And Apparatus For Image Analysis
App 20190310554 - MIDDLEBROOKS; Scott Anderson ; et al. | 2019-10-10 |
Method and apparatus for image analysis
Grant 10,437,157 - Middlebrooks , et al. O | 2019-10-08 |
Methods And Apparatus For Obtaining Diagnostic Information Relating To An Industrial Process
App 20190278188 - YPMA; Alexander ; et al. | 2019-09-12 |
Metrology Method and Apparatus, Lithographic System and Device Manufacturing Method
App 20190278190 - MIDDLEBROOKS; Scott Anderson ; et al. | 2019-09-12 |
Metrology method and apparatus, lithographic system and device manufacturing method
Grant 10,331,041 - Middlebrooks , et al. | 2019-06-25 |
Methods & Apparatus For Obtaining Diagnostic Information, Methods & Apparatus For Controlling An Industrial Process
App 20190187569 - YPMA; Alexander ; et al. | 2019-06-20 |
Inspection method and apparatus, and corresponding lithographic apparatus
Grant 10,295,913 - Middlebrooks , et al. | 2019-05-21 |
Displacement Based Overlay Or Alignment
App 20190146358 - JOCHEMSEN; Marinus ; et al. | 2019-05-16 |
Methods and apparatus for obtaining diagnostic information relating to an industrial process
Grant 10,274,834 - Ypma , et al. | 2019-04-30 |
Method and apparatus for adaptive computer-aided diagnosis
Grant 10,265,040 - Middlebrooks , et al. | 2019-04-23 |
Metrology Method and Apparatus, Lithographic System and Device Manufacturing Method
App 20190049860 - MIDDLEBROOKS; Scott Anderson ; et al. | 2019-02-14 |
Method and apparatus for classifying a data point in imaging data
App 20190035075 - Middlebrooks; Scott Anderson ; et al. | 2019-01-31 |
Method and apparatus for planning computer-aided diagnosis
Grant 10,130,323 - Middlebrooks , et al. November 20, 2 | 2018-11-20 |
Metrology method and apparatus, lithographic system and device manufacturing method
Grant 10,126,662 - Middlebrooks , et al. November 13, 2 | 2018-11-13 |
Methods And Apparatus For Obtaining Diagnostic Information Relating To An Industrial Process
App 20180253015 - Ypma; Alexander ; et al. | 2018-09-06 |
Metrology Method and Apparatus, Lithographic System and Device Manufacturing Method
App 20180196357 - Middlebrooks; Scott Anderson ; et al. | 2018-07-12 |
Methods and apparatus for obtaining diagnostic information relating to an industrial process
Grant 9,946,165 - Ypma , et al. April 17, 2 | 2018-04-17 |
Metrology method and apparatus, lithographic system and device manufacturing method
Grant 9,910,366 - Middlebrooks , et al. March 6, 2 | 2018-03-06 |
Method And Apparatus For Image Analysis
App 20170345138 - MIDDLEBROOKS; Scott Anderson ; et al. | 2017-11-30 |
Method And Apparatus For Image Analysis
App 20170336713 - MIDDLEBROOKS; Scott Anderson ; et al. | 2017-11-23 |
Lithographic system, lithographic method and device manufacturing method
Grant 9,632,430 - Mos , et al. April 25, 2 | 2017-04-25 |
Method and apparatus for adaptive Computer-Aided Diagnosis
App 20170018075 - Middlebrooks; Scott Anderson ; et al. | 2017-01-19 |
Method and apparatus for planning Computer-Aided Diagnosis
App 20170018076 - Middlebrooks; Scott Anderson ; et al. | 2017-01-19 |
Yield Estimation And Control
App 20160313651 - MIDDLEBROOKS; Scott Anderson ; et al. | 2016-10-27 |
Inspection methods, inspection apparatuses, and lithographic apparatuses
Grant 9,470,986 - Fuchs , et al. October 18, 2 | 2016-10-18 |
Methods And Apparatus For Obtaining Diagnostic Information Relating To An Industrial Process
App 20160246185 - Ypma; Alexander ; et al. | 2016-08-25 |
Metrology Method and Apparatus, Lithographic System and Device Manufacturing Method
App 20160161864 - MIDDLEBROOKS; Scott Anderson ; et al. | 2016-06-09 |
Lithographic apparatus and device manufacturing method
Grant 8,947,630 - Padiy , et al. February 3, 2 | 2015-02-03 |
Method and apparatus for estimating model parameters of and controlling a lithographic apparatus by measuring a substrate property and using a polynomial model
Grant 8,947,642 - Middlebrooks February 3, 2 | 2015-02-03 |
Inspection Methods, Inspection Apparatuses, and Lithographic Apparatuses
App 20140176955 - FUCHS; Andreas ; et al. | 2014-06-26 |
Inspection method and apparatus, and corresponding lithographic apparatus
Grant 8,749,786 - Fuchs , et al. June 10, 2 | 2014-06-10 |
Inspection apparatus for lithography
Grant 8,724,087 - Van De Kerkhof , et al. May 13, 2 | 2014-05-13 |
Alignment system, lithographic system and method
Grant 8,706,442 - Mos , et al. April 22, 2 | 2014-04-22 |
Optimization method and a lithographic cell
Grant 8,612,045 - Mos , et al. December 17, 2 | 2013-12-17 |
Method for selecting sample positions on a substrate, method for providing a representation of a model of properties of a substrate, method of providing a representation of the variation of properties of a substrate across the substrate and device manufacturing method
Grant 8,504,333 - Mos , et al. August 6, 2 | 2013-08-06 |
Inspection Method and Apparatus, and Corresponding Lithographic Apparatus
App 20130135600 - MIDDLEBROOKS; Scott Anderson ; et al. | 2013-05-30 |
Lithographic System, Lithographic Method And Device Manufacturing Method
App 20110299050 - Mos; Everhardus Cornelis ; et al. | 2011-12-08 |
Lithographic Apparatus and Device Manufacturing Method
App 20110205511 - Padiy; Alexander Viktorovych ; et al. | 2011-08-25 |
Method and Apparatus for Estimating Model Parameters of and Controlling a Lithographic Apparatus
App 20110199596 - MIDDLEBROOKS; Scott Anderson | 2011-08-18 |
Alignment System, Lithographic System and Method
App 20110196646 - Mos; Everhardus ; et al. | 2011-08-11 |
Inspection Apparatus for Lithography
App 20110141444 - Van De Kerkhof; Marcus Adrianus ; et al. | 2011-06-16 |
Inspection Method and Apparatus, and Corresponding Lithographic Apparatus
App 20110134419 - FUCHS; Andreas ; et al. | 2011-06-09 |
Method for Selecting Sample Positions on a Substrate, Method for Providing a Representation of a Model of Properties of a Substrate, Method of Providing a Representation of the Variation of Properties of a Substrate Across the Substrate and Device Manufacturing Method
App 20110010000 - Mos; Everhardus Cornelis ; et al. | 2011-01-13 |
Optimization Method and a Lithographic Cell
App 20100161099 - Mos; Everhardus Cornelis ; et al. | 2010-06-24 |
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