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Patent applications and USPTO patent grants for MicroSi, Inc..The latest application filed is for "resist compositions comprising a phenolic resin, an acid forming onium salt and a tert-butyl ester or tert-butyl carbonate which is acid-cleavable".
Patent | Date |
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Resist compositions comprising a phenolic resin, an acid forming onium salt and a tert-butyl ester or tert-butyl carbonate which is acid-cleavable Grant 5,310,619 - Crivello , et al. May 10, 1 | 1994-05-10 |
Spin castable mixtures useful for making deep-UV contrast enhancement layers Grant 5,196,295 - Davis March 23, 1 | 1993-03-23 |
Composite useful in photolithography Grant 5,108,874 - Griffing , et al. April 28, 1 | 1992-04-28 |
Contrast enhancement layer compositions, alkylnitrones, and use Grant 5,106,723 - West , et al. April 21, 1 | 1992-04-21 |
Contrast enhancement layer compositions, alkylnitrones, and use Grant 5,002,993 - West , et al. March 26, 1 | 1991-03-26 |
Pre-exposure method for increased sensitivity in high contrast resist development of positive working diazo ketone photoresist Grant 4,931,380 - Owens , et al. June 5, 1 | 1990-06-05 |
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