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Patent applications and USPTO patent grants for Micromaterials LLC.The latest application filed is for "apparatus and methods for depositing molten metal onto a foil substrate".
Patent | Date |
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Apparatus And Methods For Depositing Molten Metal Onto A Foil Substrate App 20220298616 - FREY; Bernard ;   et al. | 2022-09-22 |
Apparatus And Methods For Depositing Molten Metal Onto A Foil Substrate App 20220298617 - FREY; Bernard ;   et al. | 2022-09-22 |
Self-aligned contact and contact over active gate structures Grant 11,437,273 - Shusterman , et al. September 6, 2 | 2022-09-06 |
Fully self-aligned via Grant 11,437,274 - Freed , et al. September 6, 2 | 2022-09-06 |
Apparatus and methods for depositing molten metal onto a foil substrate Grant 11,384,419 - Frey , et al. July 12, 2 | 2022-07-12 |
DRAM Capacitor Module App 20220013624 - Mitra; Uday ;   et al. | 2022-01-13 |
DRAM capacitor module Grant 11,164,938 - Mitra , et al. November 2, 2 | 2021-11-02 |
Methods For Controllable Metal And Barrier-Liner Recess App 20210305091 - Ren; He ;   et al. | 2021-09-30 |
Method for depositing and reflow of a high quality etch resistant gapfill dielectric film Grant 11,114,333 - Nemani , et al. September 7, 2 | 2021-09-07 |
Methods for controllable metal and barrier-liner recess Grant 11,062,942 - Ren , et al. July 13, 2 | 2021-07-13 |
Metal contact landing structure Grant 11,049,695 - Kang , et al. June 29, 2 | 2021-06-29 |
Selective removal process to create high aspect ratio fully self-aligned via Grant 11,037,825 - Mullick , et al. June 15, 2 | 2021-06-15 |
Fully Self-Aligned Via App 20210090952 - Freed; Regina ;   et al. | 2021-03-25 |
Apparatus And Methods For Depositing Molten Metal Onto A Foil Substrate App 20210062318 - FREY; Bernard ;   et al. | 2021-03-04 |
Method for creating a fully self-aligned via Grant 10,892,187 - Freed , et al. January 12, 2 | 2021-01-12 |
Methods for removing metal oxides Grant 10,892,183 - Mullick , et al. January 12, 2 | 2021-01-12 |
Selective Removal Process To Create High Aspect Ratio Fully Self-Aligned Via App 20200388535 - Mullick; Amrita B. ;   et al. | 2020-12-10 |
Gas Delivery System For High Pressure Processing Chamber App 20200350183 - LIANG; Qiwei ;   et al. | 2020-11-05 |
DRAM Capacitor Module App 20200312953 - Mitra; Uday ;   et al. | 2020-10-01 |
Selective removal process to create high aspect ratio fully self-aligned via Grant 10,790,191 - Mullick , et al. September 29, 2 | 2020-09-29 |
Self-aligned Contact And Contact Over Active Gate Structures App 20200279773 - Shusterman; Yuriy ;   et al. | 2020-09-03 |
Gas delivery system for high pressure processing chamber Grant 10,720,341 - Liang , et al. | 2020-07-21 |
Method for creating a fully self-aligned via Grant 10,699,953 - Mullick , et al. | 2020-06-30 |
Use of selective aluminum oxide etch Grant 10,692,728 - Zhou , et al. | 2020-06-23 |
Metal Contact Landing Structure App 20200168440 - Kang; Sung Kwan ;   et al. | 2020-05-28 |
Fully Self-aligned Via App 20200098633 - Zhang; Ying ;   et al. | 2020-03-26 |
Methods of producing self-aligned vias Grant 10,600,688 - Zhang , et al. | 2020-03-24 |
Selectively etched self-aligned via processes Grant 10,593,594 - Lin , et al. | 2020-03-17 |
Methods of producing self-aligned grown via Grant 10,573,555 - Zhang , et al. Feb | 2020-02-25 |
Methods of producing fully self-aligned vias and contacts Grant 10,553,485 - Zhang , et al. Fe | 2020-02-04 |
High pressure wafer processing systems and related methods Grant 10,529,603 - Liang , et al. J | 2020-01-07 |
Fully self-aligned via Grant 10,522,404 - Zhang , et al. Dec | 2019-12-31 |
Methods of producing self-aligned vias Grant 10,510,602 - Zhang , et al. Dec | 2019-12-17 |
Mask scheme for cut pattern flow with enlarged EPE window Grant 10,510,540 - Zhang , et al. Dec | 2019-12-17 |
Method For Creating A Fully Self-Aligned Via App 20190378756 - Mullick; Amrita B. ;   et al. | 2019-12-12 |
Method For Increasing The Verticality Of Pillars App 20190355621 - Marcadal; Christophe ;   et al. | 2019-11-21 |
Method For Creating A Fully Self-Aligned Via App 20190355620 - Freed; Regina ;   et al. | 2019-11-21 |
Fully Self-Aligned Via App 20190348323 - Zhang; Ying ;   et al. | 2019-11-14 |
Selective Removal Process To Create High Aspect Ratio Fully Self-Aligned Via App 20190348322 - Mullick; Amrita B. ;   et al. | 2019-11-14 |
Fully self-aligned via Grant 10,424,507 - Zhang , et al. Sept | 2019-09-24 |
Fully self-aligned via Grant 10,410,921 - Zhang , et al. Sept | 2019-09-10 |
Methods for Removing Metal Oxides App 20190273019 - Mullick; Amrita B. ;   et al. | 2019-09-05 |
Method For Depositing And Reflow Of A High Quality Etch Resistant Gapfill Dielectric Film App 20190259625 - NEMANI; Srinivas D. ;   et al. | 2019-08-22 |
High Pressure Wafer Processing Systems And Related Methods App 20190198367 - LIANG; Qiwei ;   et al. | 2019-06-27 |
Methods For Controllable Metal And Barrier-Liner Recess App 20190198389 - Ren; He ;   et al. | 2019-06-27 |
Selectively Etched Self-Aligned Via Processes App 20190189510 - Lin; Yung-Chen ;   et al. | 2019-06-20 |
Fully Self-Aligned Via App 20190189512 - Zhang; Ying ;   et al. | 2019-06-20 |
Gas Delivery System For High Pressure Processing Chamber App 20190148178 - LIANG; Qiwei ;   et al. | 2019-05-16 |
Gas Delivery System For High Pressure Processing Chamber App 20190119769 - KHAN; Adib ;   et al. | 2019-04-25 |
Use of Selective Aluminum Oxide Etch App 20190096666 - Zhou; Qingjun ;   et al. | 2019-03-28 |
Methods Of Producing Self-Aligned Vias App 20190074219 - Zhang; Ying ;   et al. | 2019-03-07 |
High pressure wafer processing systems and related methods Grant 10,224,224 - Liang , et al. | 2019-03-05 |
Methods Of Producing Self-aligned Grown Via App 20190067103 - Zhang; Ying ;   et al. | 2019-02-28 |
Methods Of Producing Self-Aligned Vias App 20190067102 - Zhang; Ying ;   et al. | 2019-02-28 |
Mask Scheme For Cut Pattern Flow With Enlarged EPE Window App 20190019676 - Zhang; Ying ;   et al. | 2019-01-17 |
Gas Delivery System For High Pressure Processing Chamber App 20190017131 - Khan; Adib M. ;   et al. | 2019-01-17 |
Gas delivery system for high pressure processing chamber Grant 10,179,941 - Khan , et al. Ja | 2019-01-15 |
Methods Of Producing Fully Self-Aligned Vias And Contacts App 20180374750 - Zhang; Ying ;   et al. | 2018-12-27 |
Fully Self-Aligned Via App 20180286749 - Zhang; Ying ;   et al. | 2018-10-04 |
High Pressure Wafer Processing Systems And Related Methods App 20180258533 - Liang; Qiwei ;   et al. | 2018-09-13 |
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