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Patent applications and USPTO patent grants for MICO CERAMICS LTD..The latest application filed is for "electrostatic chuck heater and manufacturing method therefor".
Patent | Date |
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Electrostatic Chuck Heater And Manufacturing Method Therefor App 20220301916 - CHOI; Jin Young ;   et al. | 2022-09-22 |
Ceramic Susceptor App 20220238316 - LEE; Ju Sung ;   et al. | 2022-07-28 |
Ceramic heater having improved durability Grant 11,395,377 - Park , et al. July 19, 2 | 2022-07-19 |
Electro static chuck Grant 11,309,206 - Hwang , et al. April 19, 2 | 2022-04-19 |
Ceramic Heater App 20220046761 - YUN; Soo Won ;   et al. | 2022-02-10 |
Ceramic Heater For Independently Controlling Middle Region App 20220039212 - JUNG; Chul Ho | 2022-02-03 |
Method For Manufacturing Ceramic Heater App 20210387922 - CHAE; Je Ho ;   et al. | 2021-12-16 |
Substrate heating apparatus with enhanced temperature uniformity characteristic Grant 11,133,202 - Jung , et al. September 28, 2 | 2021-09-28 |
Electrostatic Chuck Heater And Manufacturing Method Therefor App 20210242062 - JUNG; Chul Ho ;   et al. | 2021-08-05 |
Electro Static Chuck App 20210210370 - HWANG; Jeonghun ;   et al. | 2021-07-08 |
Electrostatic Chuck App 20210143043 - HWANG; Jeonghun ;   et al. | 2021-05-13 |
Ceramic Heater Having Improved Durability App 20210100072 - PARK; Myoung Ha ;   et al. | 2021-04-01 |
Aluminum Nitride Sintered Body And Member For Semiconductor Manufacuting Apparatus Comprising Same App 20200303205 - CHAE; Je Ho ;   et al. | 2020-09-24 |
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