Mickan; Uwe

Patent Applications and Registrations

Patent applications and USPTO patent grants for Mickan; Uwe.The latest application filed is for "lithographic apparatus and device manufacturing method".

Company Profile

1.21.25

Mickan; Uwe - Veldhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Lithographic Apparatus And Device Manufacturing Method App 20190086819 - LOOPSTRA; Erik Roelof ; et al.	2019-03-21
Lithographic apparatus and device manufacturing method Grant 10,146,142 - Loopstra , et al. De	2018-12-04
Lithographic Apparatus And Device Manufacturing Method App 20170160650 - LOOPSTRA; Erik Roelof ; et al.	2017-06-08
Lithographic apparatus and device manufacturing method Grant 9,606,448 - Loopstra , et al. March 28, 2	2017-03-28
Lithographic apparatus and device manufacturing method Grant 9,442,388 - Loopstra , et al. September 13, 2	2016-09-13
Lithographic Apparatus And Device Manufacturing Method App 20140347642 - LOOPSTRA; Erik Roelof ; et al.	2014-11-27
Lithographic Apparatus And Device Manufacturing Method App 20140071420 - Loopstra; Erik Roelof ; et al.	2014-03-13
Actuator system, lithographic apparatus, method of controlling the position of a component and device manufacturing method Grant 8,634,062 - De Vries , et al. January 21, 2	2014-01-21
Illumination System, Lithographic Apparatus And Illumination Method App 20120262690 - De Boeij; Wilhelmus Petrus ; et al.	2012-10-18
Lithographic apparatus and device manufacturing method Grant 8,208,123 - Loopstra , et al. June 26, 2	2012-06-26
Lithographic Method And Apparatus App 20110310369 - MICKAN; Uwe ; et al.	2011-12-22
Method of generating a photolithography patterning device, computer program, patterning device, method of determining the position of a target image on or proximate a substrate, measurement device, and lithographic apparatus Grant 7,960,074 - Mickan , et al. June 14, 2	2011-06-14
Method and exposure apparatus for performing a tilted focus and a device manufactured accordingly Grant 7,834,975 - Burghoorn , et al. November 16, 2	2010-11-16
Optical apparatus Grant 7,817,246 - Mickan , et al. October 19, 2	2010-10-19
Actuator System, Lithographic Apparatus, Method of Controlling the Position of a Component and Device Manufacturing Method App 20100149506 - DE VRIES; Gosse Charles ; et al.	2010-06-17
Lithographic apparatus and patterning device Grant 7,713,665 - Mickan , et al. May 11, 2	2010-05-11
Exposure apparatus, a tilting device method for performing a tilted focus test, and a device manufactured accordingly Grant 7,518,706 - Hauschild , et al. April 14, 2	2009-04-14
System for electrically connecting a mask to earth, a mask Grant 7,514,186 - Meijer , et al. April 7, 2	2009-04-07
Device manufacturing method and apparatus with applied electric field Grant 7,463,336 - Mickan , et al. December 9, 2	2008-12-09
Lithographic system, method for adapting transmission characteristics of an optical pathway within a lithographic system, semiconductor device, method of manufacturing a reflective element for use in a lithographic system, and reflective element manufactured thereby Grant 7,369,216 - Moors , et al. May 6, 2	2008-05-06
Optical apparatus App 20070296943 - Mickan; Uwe ; et al.	2007-12-27
Lithographic apparatus and patterning device App 20070231709 - Mickan; Uwe ; et al.	2007-10-04
Lithographic apparatus and device manufacturing method Grant 7,177,010 - Van Der Laan , et al. February 13, 2	2007-02-13
System for electrically connecting a mask to earth, a mask App 20060292457 - Meijer; Hendricus Johannes Maria ; et al.	2006-12-28
Method and exposure apparatus for performing a tilted focus and a device manufactured accordingly App 20060279718 - Den Boef; Arie Jeffrey ; et al.	2006-12-14
Lithographic apparatus, device manufacturing method and variable attenuator Grant 7,145,640 - Voorma , et al. December 5, 2	2006-12-05
Lithographic apparatus with autofocus system Grant 7,136,149 - Mickan , et al. November 14, 2	2006-11-14
Method of generating a photolithography patterning device, computer program, patterning device, method of determining the position of a target image on or proximate a substrate, measurement device, and lithographic apparatus App 20060194123 - Mickan; Uwe ; et al.	2006-08-31
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,098,994 - Moors , et al. August 29, 2	2006-08-29
Calibration apparatus and method of calibrating a radiation sensor in a lithographic apparatus Grant 7,092,072 - Moors , et al. August 15, 2	2006-08-15
Exposure apparatus, a tilting device method for performing a tilted focus test, and a device manufactured accordingly App 20060141375 - Hauschild; Jan ; et al.	2006-06-29
Lithographic apparatus with autofocus system App 20060132743 - Mickan; Uwe ; et al.	2006-06-22
Device manufacturing method and computer program Grant 7,042,550 - Lowisch , et al. May 9, 2	2006-05-09
Lithographic apparatus and device manufacturing method App 20060092397 - Laan; Hans Van Der ; et al.	2006-05-04
Lithographic system, method for adapting transmission characteristics of an optical pathway within a lithographic system, semiconductor device, method of manufacturing a reflective element for use in a lithographic system, and reflective element manufactured thereby App 20060082751 - Moors; Johannes Hubertus Josephina ; et al.	2006-04-20
Calibration apparatus and method of calibrating a radiation sensor in a lithographic apparatus App 20060001856 - Moors; Johannes Hubertus Josephina ; et al.	2006-01-05
Lithographic apparatus and device manufacturing method Grant 6,980,281 - Moors , et al. December 27, 2	2005-12-27
Device manufacturing method App 20050231704 - Mickan, Uwe ; et al.	2005-10-20
Lithographic apparatus, device manufacturing method and variable attenuator App 20050206869 - Voorma, Harm-Jan ; et al.	2005-09-22
Lithographic apparatus and device manufacturing method App 20050162629 - Moors, Johannes Hubertus Josephina ; et al.	2005-07-28
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20050157284 - Moors, Johannes Hubertus Josephina ; et al.	2005-07-21
Method for exposing a substrate, patterning device, and lithographic apparatus App 20050134820 - Mulder, Heine Melle ; et al.	2005-06-23
Lithographic apparatus and device manufacturing method App 20050094119 - Loopstra, Erik Roelof ; et al.	2005-05-05
Device manufacturing method and computer program App 20040137677 - Lowisch, Martin ; et al.	2004-07-15

uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.

While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.

All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.