Michelsson; Detlef

Patent Applications and Registrations

Patent applications and USPTO patent grants for Michelsson; Detlef.The latest application filed is for "periodic semiconductor device misregistration metrology system and method".

Company Profile

1.12.17

Michelsson; Detlef - Loehnberg DE
Michelsson; Detlef - Wetzlar-Naunheim DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Periodic semiconductor device misregistration metrology system and method Grant 11,182,892 - Michelsson , et al. November 23, 2	2021-11-23
Periodic Semiconductor Device Misregistration Metrology System and Method App 20210082099 - Michelsson; Detlef ; et al.	2021-03-18
Method for inspection and detection of defects on surfaces of disc-shaped objects and computer system with a software product for carrying out the method Grant 8,705,837 - Michelsson , et al. April 22, 2	2014-04-22
Method and apparatus for processing the image data of the surface of a wafer recorded by at least one camera Grant 8,264,534 - Michelsson September 11, 2	2012-09-11
Method for Inspection and Detection of Defects on Surfaces of Disc-Shaped Objects and Computer System with a Software Product for Carrying out the Method App 20120163698 - Michelsson; Detlef	2012-06-28
Method for the optical inspection and visualization of optical measuring values obtained from disk-like objects Grant 8,200,003 - Michelsson June 12, 2	2012-06-12
Method for inspecting a surface of a wafer with regions of different detection sensitivity Grant 8,200,004 - Michelsson , et al. June 12, 2	2012-06-12
Method for determining the position of the edge bead removal line of a disk-like object Grant 7,973,931 - Michelsson , et al. July 5, 2	2011-07-05
Detecting defects by three-way die-to-die comparison with false majority determination Grant 7,657,077 - Michelsson , et al. February 2, 2	2010-02-02
Method for inspecting a surface of a wafer with regions of different detection sensitivity App 20090161942 - Michelsson; Detlef ; et al.	2009-06-25
Method and apparatus for processing the image of the surface of a wafer recorded by at least one camera App 20090153657 - Michelsson; Detlef	2009-06-18
Method for determining the position of the edge bead removal line of a disk-like object App 20090130784 - Michelsson; Detlef ; et al.	2009-05-21
Method for the optical inspection and visualization of optical measuring values obtained from disk-like objects App 20090052766 - Michelsson; Detlef	2009-02-26
Method of detecting incomplete edge bead removal from a disk-like object Grant 7,477,370 - Michelsson , et al. January 13, 2	2009-01-13
Method For Detecting Defects On The Back Side Of A Semiconductor Wafer App 20080249728 - Michelsson; Detlef ; et al.	2008-10-09
Method, device and software for the optical inspection of a semi-conductor substrate Grant 7,417,719 - Michelsson August 26, 2	2008-08-26
Method of optically inspecting and visualizing optical measuring values obtained from disk-like objects App 20080062415 - Michelsson; Detlef	2008-03-13
Method for inspection of a wafer Grant 7,292,328 - Kreh , et al. November 6, 2	2007-11-06
Method of detecting incomplete edge bead removal from a disk-like object App 20070076194 - Michelsson; Detlef ; et al.	2007-04-05
Method and apparatus for scanning a semiconductor wafer Grant 7,193,699 - Michelsson March 20, 2	2007-03-20
Method for evaluating reproduced images of wafers App 20060240580 - Michelsson; Detlef	2006-10-26
Method for detecting defects in images App 20060204109 - Michelsson; Detlef ; et al.	2006-09-14
Method, device and software for the optical inspection of a semi-conductor substrate App 20060176476 - Michelsson; Detlef	2006-08-10
Method for inspecting a wafer App 20060103838 - Richter; Joerg ; et al.	2006-05-18
Method for inspection of a wafer App 20050134839 - Kreh, Albert ; et al.	2005-06-23
Method for defect segmentation in features on semiconductor substrates App 20050008217 - Luu, Thin Van ; et al.	2005-01-13
Method and apparatus for scanning a semiconductor wafer App 20050002022 - Michelsson, Detlef	2005-01-06
Method and apparatus for examining semiconductor wafers in a context of die/SAW design App 20040165764 - Michelsson, Detlef	2004-08-26

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