Patent | Date |
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System of using offset gage for CMP polishing pad alignment and adjustment Grant 7,527,544 - Rodriguez , et al. May 5, 2 | 2009-05-05 |
Method and System of Using Offset Gage for CMP Polishing Pad Alignment and Adjustment App 20080102738 - Rodriguez; Jose Omar ;   et al. | 2008-05-01 |
Method and system of using offset gage for CMP polishing pad alignment and adjustment Grant 7,338,569 - Rodriguez , et al. March 4, 2 | 2008-03-04 |
Method of manufacturing an integrated circuit to obtain uniform exposure in a photolithographic process App 20070072128 - Miceli; Frank ;   et al. | 2007-03-29 |
Method And Apparatus For Cleaning Slurry Depositions From A Water Carrier App 20070042686 - Rodriguez; Jose Omar ;   et al. | 2007-02-22 |
Method and apparatus for cleaning slurry depositions from a water carrier Grant 7,172,496 - Rodriguez , et al. February 6, 2 | 2007-02-06 |
Carrier employing snap-fitted membrane retainer App 20070010180 - Garcia; Andres B. ;   et al. | 2007-01-11 |
Method and system of using offset gage for CMP polishing pad alignment and adjustment App 20060068682 - Rodriguez; Jose Omar ;   et al. | 2006-03-30 |
Method of eliminating agglomerate particles in a polishing slurry Grant 6,750,145 - Crevasse , et al. June 15, 2 | 2004-06-15 |
System and method of determining a polishing endpoint by monitoring signal intensity Grant 6,730,603 - Crevasse , et al. May 4, 2 | 2004-05-04 |
Analog phone bank connector Grant 6,728,364 - Easter , et al. April 27, 2 | 2004-04-27 |
Polishing carrier head Grant 6,726,537 - Crevasse , et al. April 27, 2 | 2004-04-27 |
Polishing head for pressurized delivery of slurry Grant 6,648,734 - Chin , et al. November 18, 2 | 2003-11-18 |
Apparatus for detecting wetness of a semiconductor wafer cleaning brush Grant 6,615,433 - Crevasse , et al. September 9, 2 | 2003-09-09 |
System and method of determining a polishing endpoint by monitoring signal intensity App 20030082844 - Crevasse, Annette M. ;   et al. | 2003-05-01 |
Method of cleaning a semiconductor wafer with a cleaning brush assembly having a contractible and expandable arbor Grant 6,551,410 - Crevasse , et al. April 22, 2 | 2003-04-22 |
Curvilinear chemical mechanical planarization device and method Grant 6,537,135 - Easter , et al. March 25, 2 | 2003-03-25 |
Polishing head for pressurized delivery of slurry App 20030045220 - Chin, Fook Loong ;   et al. | 2003-03-06 |
Mouse and mouse template for a motion impaired user Grant 6,518,987 - Crevasse , et al. February 11, 2 | 2003-02-11 |
Semiconductor polishing pad alignment device for a polishing apparatus and method of use Grant 6,514,123 - Crevasse , et al. February 4, 2 | 2003-02-04 |
Carrier head for a chemical mechanical polishing apparatus App 20020151260 - Crevasse, Annette Margaret ;   et al. | 2002-10-17 |
Method Of Manufacturing A Polishing Pad Using A Beam App 20020144985 - Crevasse, Annette M. ;   et al. | 2002-10-10 |
Analog phone bank connector App 20020141567 - Easter, William Graham ;   et al. | 2002-10-03 |
Apparatus and method for detecting wetness of a semiconductor wafer cleaning brush App 20020139393 - Crevasse, Annette M. ;   et al. | 2002-10-03 |
Apparatus and method of determining an endpoint during a chemical-mechanical polishing process App 20020090889 - Crevasse, Annette M. ;   et al. | 2002-07-11 |
Contractible and expandable arbor for a semiconductor wafer cleaning brush assembly App 20020074016 - Crevasse, Annette M. ;   et al. | 2002-06-20 |
Method of eliminating agglomerate particles in a polishing slurry App 20020052115 - Crevasse, Annette M. ;   et al. | 2002-05-02 |
Electrochemical mechanical planarization apparatus and method Grant 6,368,190 - Easter , et al. April 9, 2 | 2002-04-09 |
Polishing apparatus with carrier ring and carrier head employing like polarities Grant 6,354,928 - Crevasse , et al. March 12, 2 | 2002-03-12 |
Method for removing microorganism contamination from a polishing slurry Grant 6,183,652 - Crevasse , et al. February 6, 2 | 2001-02-06 |