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Apparatus For The Deposition Of High Dielectric Constant Films App 20130333621 - RONSSE; Bobby M. ;   et al. | 2013-12-19 |
Apparatus for the deposition of high dielectric constant films Grant 8,496,780 - Ronsse , et al. July 30, 2 | 2013-07-30 |
Advanced FI blade for high temperature extraction Grant 8,382,180 - Kanawade , et al. February 26, 2 | 2013-02-26 |
Apparatuses for atomic layer deposition Grant 8,343,279 - Myo , et al. January 1, 2 | 2013-01-01 |
Methods for atomic layer deposition of hafnium-containing high-K dielectric materials Grant 8,282,992 - Myo , et al. October 9, 2 | 2012-10-09 |
Surface pre-treatment for enhancement of nucleation of high dielectric constant materials Grant 8,071,167 - Kher , et al. December 6, 2 | 2011-12-06 |
Surface Pre-treatment For Enhancement Of Nucleation Of High Dielectric Constant Materials App 20100239758 - Kher; Shreyas S. ;   et al. | 2010-09-23 |
Gas manifolds for use during epitaxial film formation Grant 7,674,337 - Ishikawa , et al. March 9, 2 | 2010-03-09 |
ALD metal oxide deposition process using direct oxidation Grant 7,569,500 - Metzner , et al. August 4, 2 | 2009-08-04 |
ALD metal oxide deposition process using direct oxidation Grant 7,569,501 - Metzner , et al. August 4, 2 | 2009-08-04 |
System and method for forming a gate dielectric Grant 7,531,468 - Metzner , et al. May 12, 2 | 2009-05-12 |
Advanced Fi Blade For High Temperature Extraction App 20090110520 - Kanawade; Dinesh ;   et al. | 2009-04-30 |
Modular Cvd Epi 300mm Reactor App 20080072820 - Burrows; Brian H. ;   et al. | 2008-03-27 |
System And Method For Forming A Gate Dielectric App 20080057737 - METZNER; CRAIG R. ;   et al. | 2008-03-06 |
Methods For Atomic Layer Deposition Of Hafnium-containing High-k Dielectric Materials App 20080044569 - Myo; Nyi Oo ;   et al. | 2008-02-21 |
System and method for forming a gate dielectric Grant 7,304,004 - Metzner , et al. December 4, 2 | 2007-12-04 |
Gas Manifolds For Use During Epitaxial Film Formation App 20070259112 - Ishikawa; David ;   et al. | 2007-11-08 |
Ald Metal Oxide Deposition Process Using Direct Oxidation App 20070059948 - Metzner; Craig R. ;   et al. | 2007-03-15 |
Surface Pre-treatment For Enhancement Of Nucleation Of High Dielectric Constant Materials App 20060264067 - Kher; Shreyas S. ;   et al. | 2006-11-23 |
Ald Metal Oxide Deposition Process Using Direct Oxidation App 20060223339 - Metzner; Craig R. ;   et al. | 2006-10-05 |
Apparatus for the deposition of high dielectric constant films App 20060196421 - Ronsse; Bobby M. ;   et al. | 2006-09-07 |
ALD metal oxide deposition process using direct oxidation Grant 7,067,439 - Metzner , et al. June 27, 2 | 2006-06-27 |
Apparatuses and methods for atomic layer deposition of hafnium-containing high-k dielectric materials App 20050271812 - Myo, Nyi Oo ;   et al. | 2005-12-08 |
System and method for forming a gate dielectric Grant 6,858,547 - Metzner , et al. February 22, 2 | 2005-02-22 |
System and method for forming a gate dielectric App 20050009371 - Metzner, Craig R. ;   et al. | 2005-01-13 |
Surface pre-treatment for enhancement of nucleation of high dielectric constant materials App 20030232501 - Kher, Shreyas S. ;   et al. | 2003-12-18 |
ALD metal oxide deposition process using direct oxidation App 20030232511 - Metzner, Craig R. ;   et al. | 2003-12-18 |
System and method for forming a gate dielectric App 20030232506 - Metzner, Craig R. ;   et al. | 2003-12-18 |
Apparatus for the deposition of high dielectric constant films App 20030101938 - Ronsse, Bobby M. ;   et al. | 2003-06-05 |
Deposition reactor having vaporizing, mixing and cleaning capabilities App 20020192370 - Metzner, Craig R. ;   et al. | 2002-12-19 |
Deposition reactor having vaporizing, mixing and cleaning capabilities Grant 6,454,860 - Metzner , et al. September 24, 2 | 2002-09-24 |
Deposition Reactor Having Vaporizing, Mixing And Cleaning Capabilities App 20010035127 - METZNER, CRAIG R. ;   et al. | 2001-11-01 |