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Euv Radiation Source, Insert For An Euv Radiation Source And Insert For An Insert For An Euv Radiation Source App 20210382395 - Pilch; Iris ;   et al. | 2021-12-09 |
Optical device and method of in situ treating an EUV optical component to enhance a reduced reflectivity Grant 9,897,724 - Zink , et al. February 20, 2 | 2018-02-20 |
Foil trap and light source device using such foil trap Grant 9,599,812 - Metzmacher , et al. March 21, 2 | 2017-03-21 |
Method of manufacturing mirror shells of a nested shells grazing incidence mirror Grant 9,421,647 - Metzmacher , et al. August 23, 2 | 2016-08-23 |
Foil Trap And Light Source Device Using Such Foil Trap App 20160195714 - METZMACHER; Christof ;   et al. | 2016-07-07 |
Optical Device And Method Of In Situ Treating An Euv Optical Component To Enhance A Reduced Reflectivity App 20150338560 - ZINK; PETER ;   et al. | 2015-11-26 |
Optical device and method of in situ treating an EUV optical component to enhance a reduced reflectivity Grant 9,110,390 - Zink , et al. August 18, 2 | 2015-08-18 |
Extreme UV radiation generating device comprising a contamination captor Grant 8,891,058 - Metzmacher , et al. November 18, 2 | 2014-11-18 |
Method Of Manufacturing Mirror Shells Of A Nested Shells Grazing Incidence Mirror App 20140173875 - METZMACHER; CHRISTOF ;   et al. | 2014-06-26 |
Electrode system, in particular for gas discharge light sources Grant 8,749,178 - Metzmacher , et al. June 10, 2 | 2014-06-10 |
Foil trap device with improved heat resistance Grant 8,721,778 - Metzmacher , et al. May 13, 2 | 2014-05-13 |
Bulk Acoustic Wave Resonator With Means For Suppression Of Pass-band Ripple In Bulk Acoustic Wave Filters App 20140097914 - Lobl; Hans-Peter ;   et al. | 2014-04-10 |
Extreme UV radiation reflecting element comprising a sputter-resistant material Grant 8,693,090 - Metzmacher April 8, 2 | 2014-04-08 |
Extreme UV radiation generating device comprising a corrosion-resistant material Grant 8,519,367 - Metzmacher , et al. August 27, 2 | 2013-08-27 |
Foil Trap Device With Improved Heat Resistance App 20120216681 - Metzmacher; Christof ;   et al. | 2012-08-30 |
Electrode System, In Particular For Gas Discharge Light Sources App 20120212158 - Metzmacher; Christof ;   et al. | 2012-08-23 |
Method of cleaning and after treatment of optical surfaces in an irradiation unit Grant 8,097,092 - Derra , et al. January 17, 2 | 2012-01-17 |
Method of cleaning optical surfaces of an irradiation unit in a two-step process Grant 8,076,655 - Derra , et al. December 13, 2 | 2011-12-13 |
Method of cleaning a surface region covered with contaminant or undesirable material Grant 8,049,188 - Metzmacher , et al. November 1, 2 | 2011-11-01 |
Extreme Uv Radiation Generating Device Comprising A Contamination Captor App 20110181848 - Metzmacher; Christof ;   et al. | 2011-07-28 |
Extreme Uv Radiation Generating Device Comprising A Corrosion-resistant Material App 20110101251 - Metzmacher; Christof ;   et al. | 2011-05-05 |
Extreme Uv Radiation Reflecting Element Comprising A Sputter-resistant Material App 20110096428 - Metzmacher; Christof | 2011-04-28 |
Optical Device And Method Of In Situ Treating An Euv Optical Component To Enhance A Reduced Reflectivity App 20100238422 - Zink; Peter ;   et al. | 2010-09-23 |
High Voltage Electrical Connection Line App 20100194313 - Vaudrevange; Dominik Marcel ;   et al. | 2010-08-05 |
Method Of Cleaning And After Treatment Of Optical Surfaces In An Irradiation Unit App 20100051064 - Derra; Guenther Hans ;   et al. | 2010-03-04 |
Method Of Cleaning Optical Surfaces Of An Irradiation Unit In A Two-step Process App 20100051827 - Derra; Guenther Hans ;   et al. | 2010-03-04 |
Thin Film Acoustic Reflector Stack App 20100001814 - Lobl; Hans-Peter ;   et al. | 2010-01-07 |
Method Of Cleaning A Surface Region Covered With Contaminant Or Undesirable Material App 20090309045 - Metzmacher; Christof ;   et al. | 2009-12-17 |
Resonator structure and method of producing it Grant 7,466,213 - Lobl , et al. December 16, 2 | 2008-12-16 |
Resonator Structure and Method of Producing It App 20080129414 - Lobl; Hans-Peter ;   et al. | 2008-06-05 |
Filter system comprising a bulk acoustic wave resonator Grant 7,119,637 - Loebl , et al. October 10, 2 | 2006-10-10 |
Bulk acoustic wave resonator with means for suppression of pass-band ripple in bulk acoustic wave filters App 20060043507 - Lobl; Hans ;   et al. | 2006-03-02 |
Filter system with bulk wave resonator having a reflection layer composition that varies with the layer thickness Grant 6,975,182 - Loebl , et al. December 13, 2 | 2005-12-13 |
Bulk wave resonator and bulk wave filter App 20050199972 - Lobl, Hans Peter ;   et al. | 2005-09-15 |
Filter system comprising a bulk acoustic wave resonator App 20050030127 - Loebl, Hans Peter ;   et al. | 2005-02-10 |
Filter system with bulk wave resonator App 20040189423 - Loebl, Hans Peter ;   et al. | 2004-09-30 |