Metzger; Lars

Patent Applications and Registrations

Patent applications and USPTO patent grants for Metzger; Lars.The latest application filed is for "micromechanical capacitive sensor element".

Company Profile

0.9.11

Metzger; Lars - Moessingen-Belsen DE
Metzger; Lars - Moessingen-Belson DE
Metzger; Lars - Mussinger DE
Metzger; Lars - Albstadt DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Micromechanical Capacitive Sensor Element App 20110108932 - Benzel; Hubert ; et al.	2011-05-12
Method for producing a component having a semiconductor substrate and component Grant 7,803,646 - Fischer , et al. September 28, 2	2010-09-28
Micromechanical component having a diaphragm Grant 7,495,302 - Fischer , et al. February 24, 2	2009-02-24
Device for capacitive pressure measurement and method for manufacturing a capacitive pressure measuring device Grant 7,321,156 - Fischer , et al. January 22, 2	2008-01-22
Method for the production of a micromechanical device, particularly a micromechanical oscillating mirror device Grant 7,261,825 - Metzger , et al. August 28, 2	2007-08-28
Micromechanical structural element having a diaphragm and method for producing such a structural element Grant 7,148,077 - Fuertsch , et al. December 12, 2	2006-12-12
Method For Producing A Component Having A Semiconductor Substrate And Component App 20060258037 - Fischer; Frank ; et al.	2006-11-16
Method for producing a micromechanical device and a micromechanical device App 20060226114 - Fischer; Frank ; et al.	2006-10-12
Micromechanical mass flow sensor and method for the production thereof Grant 7,060,197 - Fuertsch , et al. June 13, 2	2006-06-13
Method for the production of a micromechanical device, particularly a micromechanical oscillating mirror device App 20060096944 - Metzger; Lars ; et al.	2006-05-11
Micromechanical component having a diaphragm, and method for manufacturing such a component App 20050204821 - Fischer, Frank ; et al.	2005-09-22
Method of manufacturing a micromechanical component Grant 6,905,615 - Fischer , et al. June 14, 2	2005-06-14
Micromechanical structural element having a diaphragm and method for producing such a structural element App 20050098840 - Fuertsch, Matthias ; et al.	2005-05-12
Method for producing surface micromechanical structures, and sensor Grant 6,867,061 - Fischer , et al. March 15, 2	2005-03-15
Device for capacitive pressure measurement and method for manufacturing a capacitive pressure measuring device App 20050029607 - Fischer, Frank ; et al.	2005-02-10
Method for producing surface micromechanical structures, and sensor App 20040089903 - Fischer, Frank ; et al.	2004-05-13
Micromechanical mass flow sensor and method for the production thereof App 20040026365 - Fuertsch, Matthias ; et al.	2004-02-12
Micromechanical component including function components suspended movably above a substrate Grant 6,686,638 - Fischer , et al. February 3, 2	2004-02-03
Method of manufacturing a micromechanical component App 20020119589 - Fischer, Frank ; et al.	2002-08-29
Micromechanical component and method of manufacturing a micromechanical component App 20020096727 - Fischer, Frank ; et al.	2002-07-25

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