Patent | Date |
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Double-membrane MEMS component and production method for a double-membrane MEMS component Grant 11,161,735 - Strasser , et al. November 2, 2 | 2021-11-02 |
Method for sealing an access opening to a cavity and MEMS component comprising a sealing element Grant 10,913,656 - Metzger-Brueckl , et al. February 9, 2 | 2021-02-09 |
Method Of Manufacturing A Template Wafer App 20210013090 - Lehnert; Wolfgang ;   et al. | 2021-01-14 |
Wafer composite and method for producing a semiconductor component Grant 10,784,145 - Berger , et al. Sept | 2020-09-22 |
Double-membrane MEMS Component and Production Method for a Double-membrane MEMS Component App 20200239302 - Strasser; Johann ;   et al. | 2020-07-30 |
MEMS component and production method for a MEMS component Grant 10,676,346 - Walther , et al. | 2020-06-09 |
Double-membrane MEMS component and production method for a double-membrane MEMS component Grant 10,669,151 - Strasser , et al. | 2020-06-02 |
Wafer composite and method for producing semiconductor components Grant 10,651,072 - Berger , et al. | 2020-05-12 |
MEMS microphone Grant 10,589,990 - Dehe , et al. | 2020-03-17 |
Carrier, Laminate And Method Of Manufacturing Semiconductor Devices App 20200068709 - SCHULZE; Hans-Joachim ;   et al. | 2020-02-27 |
Microelectromechanical microphone Grant 10,575,101 - Walther , et al. Feb | 2020-02-25 |
Microelectromechanical microphone Grant 10,560,771 - Dehe , et al. Feb | 2020-02-11 |
Wafer Composite and Method for Producing a Semiconductor Component App 20190244853 - Berger; Rudolf ;   et al. | 2019-08-08 |
Wafer Composite and Method for Producing Semiconductor Components App 20190244850 - Berger; Rudolf ;   et al. | 2019-08-08 |
Method For Sealing An Access Opening To A Cavity And Mems Component Comprising A Sealing Element App 20190112182 - Metzger-Brueckl; Gerhard ;   et al. | 2019-04-18 |
Mems Component And Production Method For A Mems Component App 20190092624 - Walther; Arnaud ;   et al. | 2019-03-28 |
MEMS Microphone App 20190084827 - Dehe; Alfons ;   et al. | 2019-03-21 |
Double-membrane Mems Component And Production Method For A Double-membrane Mems Component App 20190071305 - Strasser; Johann ;   et al. | 2019-03-07 |
Microelectromechanical Microphone App 20190058936 - Dehe; Alfons ;   et al. | 2019-02-21 |
MEMS device and MEMS vacuum microphone Grant 10,189,699 - Walther , et al. Ja | 2019-01-29 |
Microelectromechanical Microphone App 20180234774 - Walther; Arnaud ;   et al. | 2018-08-16 |
MEMS Device and MEMS Vacuum Microphone App 20180099867 - Walther; Arnaud ;   et al. | 2018-04-12 |
Method Of Manufacturing A Template Wafer App 20180047619 - Lehnert; Wolfgang ;   et al. | 2018-02-15 |
MEMS device and MEMS vacuum microphone Grant 9,828,237 - Walther , et al. November 28, 2 | 2017-11-28 |
MEMS Device and MEMS Vacuum Microphone App 20170260040 - Walther; Arnaud ;   et al. | 2017-09-14 |
Method of forming a self-aligned stack gate structure for use in a non-volatile memory array Grant 9,570,581 - Toren , et al. February 14, 2 | 2017-02-14 |
Method of Forming A Self-Aligned Stack Gate Structure For Use In A Non-volatile Memory Array App 20160225878 - Toren; Willem-Jan ;   et al. | 2016-08-04 |
Self-aligned stack gate structure for use in a non-volatile memory array and a method of forming such structure Grant 9,330,922 - Toren , et al. May 3, 2 | 2016-05-03 |
Self-Aligned Stack Gate Structure For Use In A Non-volatile Memory Array And A Method Of Forming Such Structure App 20130234223 - Toren; Willem-Jan ;   et al. | 2013-09-12 |