Patent | Date |
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Method and apparatus for optically measuring periodic structures using orthogonal azimuthal sample orientation App 20100177324 - Walsh; Phillip | 2010-07-15 |
Method and apparatus for using multiple relative reflectance measurements to determine properties of a sample using vacuum ultra violet wavelengths App 20100171959 - Walsh; Phillip | 2010-07-08 |
Spectrometer with collimated input light Grant 7,684,037 - Harrison , et al. March 23, 2 | 2010-03-23 |
Broad band referencing reflectometer App 20100051822 - Harrison; Dale A. | 2010-03-04 |
Contamination monitoring and control techniques for use with an optical metrology instrument Grant 7,663,747 - Harrison , et al. February 16, 2 | 2010-02-16 |
Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement Grant 7,663,097 - Walsh , et al. February 16, 2 | 2010-02-16 |
Contamination monitoring and control techniques for use with an optical metrology instrument Grant 7,622,310 - Harrison , et al. November 24, 2 | 2009-11-24 |
Spectrometer with moveable detector element Grant 7,579,601 - Harrison , et al. August 25, 2 | 2009-08-25 |
Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement Grant 7,511,265 - Walsh , et al. March 31, 2 | 2009-03-31 |
Prism spectrometer Grant 7,485,869 - Harrison , et al. February 3, 2 | 2009-02-03 |
Broad band referencing reflectometer App 20090002711 - Harrison; Dale A. | 2009-01-01 |
Vacuum ultra-violet reflectometer with stray light correction Grant 7,446,876 - Harrison November 4, 2 | 2008-11-04 |
Method and apparatus for performing highly accurate thin film measurements Grant 7,399,975 - Harrison July 15, 2 | 2008-07-15 |
Vacuum ultraviolet referencing reflectometer Grant 7,394,551 - Harrison July 1, 2 | 2008-07-01 |
Broad band referencing reflectometer Grant 7,391,030 - Harrison June 24, 2 | 2008-06-24 |
Contamination monitoring and control techniques for use with an optical metrology instrument Grant 7,342,235 - Harrison , et al. March 11, 2 | 2008-03-11 |
Broad band referencing reflectometer App 20080042071 - Harrison; Dale A. | 2008-02-21 |
Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement Grant 7,282,703 - Walsh , et al. October 16, 2 | 2007-10-16 |
Vacuum ultraviolet reflectometer having collimated beam Grant 7,271,394 - Harrison September 18, 2 | 2007-09-18 |
Vacuum ultraviolet reflectometer integrated with processing system Grant 7,189,973 - Harrison March 13, 2 | 2007-03-13 |
Broad band referencing reflectometer App 20070030488 - Harrison; Dale A. | 2007-02-08 |
Broad band referencing reflectometer Grant 7,126,131 - Harrison October 24, 2 | 2006-10-24 |
Vacuum ultraviolet reflectometer integrated with processing system App 20060208198 - Harrison; Dale A. | 2006-09-21 |
Vacuum ultraviolet reflectometer having collimated beam App 20060192958 - Harrison; Dale A. | 2006-08-31 |
Vacuum ultraviolet reflectometer system and method Grant 7,067,818 - Harrison June 27, 2 | 2006-06-27 |
Semiconductor processing techniques utilizing vacuum ultraviolet reflectometer Grant 7,026,626 - Harrison April 11, 2 | 2006-04-11 |