Patent | Date |
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Method for Performing a Wet Treatment of a Substrate App 20180047560 - Mertens; Paul | 2018-02-15 |
System for delivering ultrasonic energy to a liquid and use for cleaning of solid parts Grant 9,673,373 - Brems , et al. June 6, 2 | 2017-06-06 |
Method and Apparatus for Cleaning a Semiconductor Substrate App 20170076936 - Mertens; Paul ;   et al. | 2017-03-16 |
Method and apparatus for cleaning semiconductor substrates Grant 9,378,989 - Mertens , et al. June 28, 2 | 2016-06-28 |
System for Delivering Ultrasonic Energy to a Liquid and Use for Cleaning of Solid Parts App 20140053864 - Brems; Steven ;   et al. | 2014-02-27 |
Substrate treating method and method of manufacturing semiconductor device using the same Grant 8,324,116 - Vos , et al. December 4, 2 | 2012-12-04 |
Method and Apparatus for Cleaning Semiconductor Substrates App 20120266912 - Mertens; Paul ;   et al. | 2012-10-25 |
Method and Apparatus for Controlling Optimal Operation of Acoustic Cleaning App 20120227775 - Brems; Steven ;   et al. | 2012-09-13 |
Method and apparatus for controlling optimal operation of acoustic cleaning Grant 8,197,604 - Brems , et al. June 12, 2 | 2012-06-12 |
Method and Apparatus for Cleaning a Semiconductor Substrate App 20110088719 - Mertens; Paul ;   et al. | 2011-04-21 |
Method and Apparatus for Controlling Optimal Operation of Acoustic Cleaning App 20110000504 - Brems; Steven ;   et al. | 2011-01-06 |
Substrate Treating Method And Method Of Manufacturing Semiconductor Device Using The Same App 20100317185 - Vos; Rita ;   et al. | 2010-12-16 |
Method for Reducing the Damage Induced by a Physical Force Assisted Cleaning App 20100224215 - Mertens; Paul ;   et al. | 2010-09-09 |
Method and Apparatus for Preventing Galvanic Corrosion in Semiconductor Processing App 20090223832 - Garaud; Sylvain ;   et al. | 2009-09-10 |
Semiconductor cleaning solution Grant 7,521,408 - Vos , et al. April 21, 2 | 2009-04-21 |
Method and apparatus for immersion lithography Grant 7,224,433 - Mertens , et al. May 29, 2 | 2007-05-29 |
Composition comprising an oxidizing and complexing compound Grant 7,160,482 - Vos , et al. January 9, 2 | 2007-01-09 |
Megasonic cleaner and dryer Grant 7,100,304 - Lauerhaas , et al. September 5, 2 | 2006-09-05 |
Semiconductor cleaning solution App 20060089280 - Vos; Rita ;   et al. | 2006-04-27 |
Method and apparatus for immersion lithography App 20060000381 - Mertens; Paul ;   et al. | 2006-01-05 |
Megasonic cleaner and dryer system Grant 6,928,751 - Hosack , et al. August 16, 2 | 2005-08-16 |
Method and apparatus for liquid-treating and drying a substrate Grant 6,910,487 - Mertens , et al. June 28, 2 | 2005-06-28 |
Multi-step method for metal deposition Grant 6,863,795 - Teerlinck , et al. March 8, 2 | 2005-03-08 |
Method and apparatus for localized liquid treatment of the surface of a substrate Grant 6,851,435 - Mertens , et al. February 8, 2 | 2005-02-08 |
Composition comprising an oxidizing and complexing compound App 20050009207 - Vos, Rita ;   et al. | 2005-01-13 |
Megasonic cleaner and dryer App 20040231188 - Lauerhaas, Jeffrey M. ;   et al. | 2004-11-25 |
Method and apparatus for removing a liquid from a surface Grant 6,821,349 - Mertens , et al. November 23, 2 | 2004-11-23 |
Megasonic cleaner and dryer App 20040221473 - Lauerhaas, Jeffrey M. ;   et al. | 2004-11-11 |
Megasonic cleaner and dryer Grant 6,754,980 - Lauerhaas , et al. June 29, 2 | 2004-06-29 |
Method and apparatus for liquid-treating and drying a substrate App 20040010933 - Mertens, Paul ;   et al. | 2004-01-22 |
Method of removing particles and a liquid from a surface of substrate Grant 6,676,765 - Mertens , et al. January 13, 2 | 2004-01-13 |
Method and apparatus for liquid-treating and drying a substrate Grant 6,632,751 - Mertens , et al. October 14, 2 | 2003-10-14 |
Apparatus and method for wet cleaning or etching a flat substrate App 20030145878 - Meuris, Marc ;   et al. | 2003-08-07 |
Method for removing organic contaminants from a semiconductor surface Grant 6,551,409 - DeGendt , et al. April 22, 2 | 2003-04-22 |
Megasonic cleaner and dryer App 20020185152 - Lauerhaas, Jeffrey M. ;   et al. | 2002-12-12 |
Megasonic cleaner and dryer system App 20020185154 - Hosack, Chad M. ;   et al. | 2002-12-12 |
Method and apparatus for removing a liquid from a surface of a rotating substrate Grant 6,491,764 - Mertens , et al. December 10, 2 | 2002-12-10 |
Multi-step method for metal deposition App 20020175080 - Teerlinck, Ivo ;   et al. | 2002-11-28 |
Semiconductor processing method for processing discrete pieces of substrate to form electronic devices Grant 6,472,294 - Meuris , et al. October 29, 2 | 2002-10-29 |
Method and apparatus for removing a liquid from a surface App 20020148483 - Mertens, Paul ;   et al. | 2002-10-17 |
Method and apparatus for removing a liquid from a surface of a rotating substrate App 20020130106 - Mertens, Paul ;   et al. | 2002-09-19 |
Method and apparatus for localized liquid treatment of the surface of a substrate App 20020125212 - Mertens, Paul ;   et al. | 2002-09-12 |
Method and apparatus for localized liquid treatment of the surface of a substrate Grant 6,398,975 - Mertens , et al. June 4, 2 | 2002-06-04 |
Method and apparatus for liquid-treating and drying a substrate App 20020016082 - Mertens, Paul ;   et al. | 2002-02-07 |
Method For Removing Organic Contaminants From A Semiconductor Surface App 20020011257 - DEGENDT, STEFAN ;   et al. | 2002-01-31 |
Method and apparatus for removing a liquid from a surface Grant 6,334,902 - Mertens , et al. January 1, 2 | 2002-01-01 |
Semiconductor processing method for processing discrete pieces of substrate to form electronic devices App 20010055857 - Meuris, Marc ;   et al. | 2001-12-27 |
Semiconductor processing system for processing discrete pieces of substrate to form electronic devices Grant 6,322,598 - Meuris , et al. November 27, 2 | 2001-11-27 |
Method And Apparatus For Removing A Liquid From A Surface Of A Rotating Substrate App 20010042559 - MERTENS, PAUL ;   et al. | 2001-11-22 |
Method of removing particles and a liquid from a surface of substrate App 20010022186 - Mertens, Paul ;   et al. | 2001-09-20 |
Method of removing particles and a liquid from a surface of substrate Grant 6,261,377 - Mertens , et al. July 17, 2 | 2001-07-17 |
Apparatus and method for wet cleaning or etching a flat substrate App 20010000575 - Meuris, Marc ;   et al. | 2001-05-03 |