| Patent | Date |
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Substrate processing systems, apparatus, and methods with factory interface environmental controls
Grant 11,450,539 - Koshti , et al. September 20, 2 | 2022-09-20 |
Front-ducted Equipment Front End Modules, Side Storage Pods, And Methods Of Operating The Same
App 20220293444 - Reuter; Paul B. ; et al. | 2022-09-15 |
Front-ducted equipment front end modules, side storage pods, and methods of operating the same
Grant 11,373,891 - Reuter , et al. June 28, 2 | 2022-06-28 |
Semiconductor Processing Tool Platform Configuration With Reduced Footprint
App 20220199436 - Merry; Nir ; et al. | 2022-06-23 |
Integrated system and method
Grant 11,294,164 - April 5, 2 | 2022-04-05 |
Substrate processing systems, apparatus, and methods with factory interface environmental controls
Grant 11,282,724 - Koshti , et al. March 22, 2 | 2022-03-22 |
Mass Flow Control Based On Micro-electromechanical Devices
App 20220083081 - Merry; Nir ; et al. | 2022-03-17 |
Side Storage Pods, Equipment Front End Modules, And Methods For Operating Efems
App 20220084860 - Reuter; Paul B. ; et al. | 2022-03-17 |
Micro-electromechanical Device For Use In A Flow Control Apparatus
App 20220081282 - Merry; Nir ; et al. | 2022-03-17 |
Dual Actuating Tilting Slit Valve
App 20220059373 - Merry; Nir ; et al. | 2022-02-24 |
Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
Grant 11,244,846 - Hudgens , et al. February 8, 2 | 2022-02-08 |
High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods
Grant 11,244,844 - Reuter , et al. February 8, 2 | 2022-02-08 |
Batch Wafer Degas Chamber And Integration Into Factory Interface And Vacuum-based Mainframe
App 20210398824 - Hruzek; Dean C. ; et al. | 2021-12-23 |
Side storage pods, equipment front end modules, and methods for operating EFEMs
Grant 11,189,511 - Reuter , et al. November 30, 2 | 2021-11-30 |
Multi-finger Robot Apparatus, Electronic Device Manufacturing Apparatus, And Methods Adapted To Transport Multiple Substrates In Electronic Device Manufacturing
App 20210146554 - Hudgens; Jeffrey C. ; et al. | 2021-05-20 |
Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
Grant 10,943,805 - Hudgens , et al. March 9, 2 | 2021-03-09 |
Integrated System And Method
App 20210026123 - Krivts (Krayvitz); Igor ; et al. | 2021-01-28 |
Semiconductor device manufacturing platform with single and twinned processing chambers
Grant 10,847,391 - Merry , et al. November 24, 2 | 2020-11-24 |
Load lock door assemblies, load lock apparatus, electronic device processing systems, and methods
Grant 10,758,045 - Weiss , et al. Sep | 2020-09-01 |
Side Storage Pods, Equipment Front End Modules, And Methods For Operating Efems
App 20200135525 - Reuter; Paul B. ; et al. | 2020-04-30 |
Front-ducted Equipment Front End Modules, Side Storage Pods, And Methods Of Operating The Same
App 20200135523 - Reuter; Paul B. ; et al. | 2020-04-30 |
Side Storage Pods, Equipment Front End Modules, And Methods For Operating The Same
App 20200135520 - Reuter; Paul ; et al. | 2020-04-30 |
Side Storage Pods, Equipment Front End Modules, And Methods For Operating Equipment Front End Modules
App 20200135499 - Pannese; Patrick ; et al. | 2020-04-30 |
High Flow Velocity, Gas-purged, Side Storage Pod Apparatus, Assemblies, And Methods
App 20200135521 - Reuter; Paul B. ; et al. | 2020-04-30 |
Substrate Processing Systems, Apparatus, And Methods With Factory Interface Environmental Controls
App 20190362997 - Koshti; Sushant S. ; et al. | 2019-11-28 |
Substrate Manufacturing Apparatus And Methods With Factory Interface Chamber Heating
App 20190362989 - Reuter; Paul B. ; et al. | 2019-11-28 |
Multi-blade Robot Apparatus, Electronic Device Manufacturing Apparatus, And Methods Adapted To Transport Multiple Substrates In
App 20190355603 - Hudgens; Jeffrey C. ; et al. | 2019-11-21 |
Multi-blade Robot Apparatus, Electronic Device Manufacturing Apparatus, And Methods Adapted To Transport Multiple Substrates In
App 20190355605 - Hudgens; Jeffrey C. ; et al. | 2019-11-21 |
Load Lock Door Assemblies, Load Lock Apparatus, Electronic Device Processing Systems, And Methods
App 20190208907 - Weiss; Eran ; et al. | 2019-07-11 |
Load lock door assembly, load lock apparatus, electronic device processing systems, and methods
Grant 10,278,501 - Weiss , et al. | 2019-05-07 |
Fast and continuous eddy-current metrology of a conductive film
Grant 10,234,261 - Budiarto , et al. | 2019-03-19 |
Substrate carrier door assemblies, substrate carriers, and methods including magnetic door seal
Grant 10,196,845 - Mazzocco , et al. Fe | 2019-02-05 |
Substrate processing systems, apparatus, and methods with factory interface environmental controls
Grant 10,192,765 - Koshti , et al. Ja | 2019-01-29 |
Semiconductor Device Manufacturing Platform With Single And Twinned Processing Chambers
App 20190013216 - Merry; Nir ; et al. | 2019-01-10 |
Substrate Processing Systems, Apparatus, And Methods With Factory Interface Environmental Controls
App 20180366355 - Koshti; Sushant S. ; et al. | 2018-12-20 |
Damage isolation by shaped beam delivery in laser scribing process
Grant 10,112,259 - Holden , et al. October 30, 2 | 2018-10-30 |
Heated substrate support with temperature profile control
Grant 9,698,074 - Merry , et al. July 4, 2 | 2017-07-04 |
Rapid thermal processing chamber with micro-positioning system
Grant 9,564,349 - Sorabji , et al. February 7, 2 | 2017-02-07 |
Process chamber apparatus, systems, and methods for controlling a gas flow pattern
Grant 9,530,623 - Merry , et al. December 27, 2 | 2016-12-27 |
Process equipment architecture
Grant 9,508,576 - Newman , et al. November 29, 2 | 2016-11-29 |
Modification of magnetic properties of films using ion and neutral beam implantation
Grant 9,508,375 - Foad , et al. November 29, 2 | 2016-11-29 |
Substrate Carrier Door Assemblies, Substrate Carriers, And Methods Including Magnetic Door Seal
App 20160340947 - Mazzocco; John J. ; et al. | 2016-11-24 |
Process chamber gas flow apparatus, systems, and methods
Grant 9,429,248 - Merry , et al. August 30, 2 | 2016-08-30 |
Rapid thermal processing chamber with micro-positioning system
Grant 9,390,950 - Sorabji , et al. July 12, 2 | 2016-07-12 |
Vibration-controlled substrate handling robots, systems, and methods
Grant 9,296,105 - Merry , et al. March 29, 2 | 2016-03-29 |
Load Lock Door Assembly, Load Lock Apparatus, Electronic Device Processing Systems, And Methods
App 20150311102 - Weiss; Eran ; et al. | 2015-10-29 |
Linked vacuum processing tools and methods of using the same
Grant 9,147,592 - Englhardt , et al. September 29, 2 | 2015-09-29 |
Damage Isolation By Shaped Beam Delivery In Laser Scribing Process
App 20150217401 - HOLDEN; James M. ; et al. | 2015-08-06 |
Process Chamber Apparatus, Systems, And Methods For Controlling A Gas Flow Pattern
App 20150145413 - Merry; Nir ; et al. | 2015-05-28 |
Damage isolation by shaped beam delivery in laser scribing process
Grant 9,029,242 - Holden , et al. May 12, 2 | 2015-05-12 |
Heated Substrate Support With Temperature Profile Control
App 20150076135 - MERRY; NIR ; et al. | 2015-03-19 |
Rapid Thermal Processing Chamber with Micro-Positioning System
App 20150050118 - Sorabji; Khurshed ; et al. | 2015-02-19 |
Fast And Continuous Eddy-current Metrology Of A Conductive Film
App 20140367266 - Budiarto; Edward J. ; et al. | 2014-12-18 |
Rapid thermal processing chamber with micro-positioning system
Grant 8,900,889 - Sorabji , et al. December 2, 2 | 2014-12-02 |
Vertical wafer buffering system
Grant 8,894,344 - Merry , et al. November 25, 2 | 2014-11-25 |
Methods and apparatus for processing substrates using model-based control
Grant 8,880,210 - Porthouse , et al. November 4, 2 | 2014-11-04 |
Semiconductor Device Manufacturing Platform With Single And Twinned Processing Chambers
App 20140262035 - Merry; Nir ; et al. | 2014-09-18 |
Vibration-controlled Substrate Handling Robots, Systems, And Methods
App 20140156070 - Merry; Nir ; et al. | 2014-06-05 |
Process Chamber Gas Flow Apparatus, Systems, And Methods
App 20140150878 - Merry; Nir ; et al. | 2014-06-05 |
Use of infrared camera for real-time temperature monitoring and control
Grant 8,724,976 - Merry , et al. May 13, 2 | 2014-05-13 |
Linked Vacuum Processing Tools And Methods Of Using The Same
App 20140044503 - Englhardt; Eric A. ; et al. | 2014-02-13 |
Substrate processing chamber with off-center gas delivery funnel
Grant 8,425,977 - Merry , et al. April 23, 2 | 2013-04-23 |
Substrate processing chamber with off-center gas delivery funnel
Grant 8,419,855 - Merry , et al. April 16, 2 | 2013-04-16 |
Rapid Thermal Processing Chamber With Micro-positioning System
App 20130043632 - Sorabji; Khurshed ; et al. | 2013-02-21 |
Rapid Thermal Processing Chamber With Micro-positioning System
App 20130043235 - Sorabji; Khurshed ; et al. | 2013-02-21 |
Methods And Apparatus For Processing Substrates Using Model-based Control
App 20130018500 - PORTHOUSE; KEITH BRIAN ; et al. | 2013-01-17 |
Damage Isolation By Shaped Beam Delivery In Laser Scribing Process
App 20120322240 - HOLDEN; James M. ; et al. | 2012-12-20 |
Multiple substrate transfer robot
Grant 8,317,449 - Newman , et al. November 27, 2 | 2012-11-27 |
Rotating Substrate Support And Methods Of Use
App 20120291709 - Smith; Jacob ; et al. | 2012-11-22 |
Rapid thermal processing chamber with micro-positioning system
Grant 8,314,371 - Sorabji , et al. November 20, 2 | 2012-11-20 |
Process Equipment Architecture
App 20120235339 - Newman; Jacob ; et al. | 2012-09-20 |
Substrate Processing Apparatus Using A Batch Processing Chamber
App 20120210937 - THAKUR; RANDHIR ; et al. | 2012-08-23 |
Use Of Infrared Camera For Real-time Temperature Monitoring And Control
App 20120183915 - Merry; Nir ; et al. | 2012-07-19 |
Use of infrared camera for real-time temperature monitoring and control
Grant 8,150,242 - Merry , et al. April 3, 2 | 2012-04-03 |
Temperature uniformity measurements during rapid thermal processing
Grant 8,104,951 - Aderhold , et al. January 31, 2 | 2012-01-31 |
Substrate Processing Chamber With Off-center Gas Delivery Funnel
App 20110277689 - Merry; Nir ; et al. | 2011-11-17 |
Batch Processing Platform For Ald And Cvd
App 20110041764 - Webb; Aaron ; et al. | 2011-02-24 |
Batch processing platform for ALD and CVD
Grant 7,833,351 - Webb , et al. November 16, 2 | 2010-11-16 |
Substrate Cool Down Control
App 20100265988 - NEWMAN; JACOB ; et al. | 2010-10-21 |
Modification Of Magnetic Properties Of Films Using Ion And Neutral Beam Implantation
App 20100261040 - Foad; Majeed A. ; et al. | 2010-10-14 |
Rotating Substrate Support And Methods Of Use
App 20100224130 - Smith; Jacob ; et al. | 2010-09-09 |
Substrate Processing Apparatus Using A Batch Processing Chamber
App 20100173495 - Thakur; Randhir ; et al. | 2010-07-08 |
Batch deposition tool and compressed boat
Grant 7,748,542 - Yudovsky , et al. July 6, 2 | 2010-07-06 |
Rapid Thermal Processing Chamber With Micro-Positioning System
App 20100133257 - Sorabji; Khurshed ; et al. | 2010-06-03 |
Process Equipment Architecture
App 20100116205 - Newman; Jacob ; et al. | 2010-05-13 |
Use Of Infrared Camera For Real-time Temperature Monitoring And Control
App 20100111511 - Merry; Nir ; et al. | 2010-05-06 |
Substrate Processing Chamber With Off-center Gas Delivery Funnel
App 20100080904 - Merry; Nir ; et al. | 2010-04-01 |
Vertical Wafer Buffering System
App 20100047049 - MERRY; NIR ; et al. | 2010-02-25 |
Thermal Batch Reactor with Removable Susceptors
App 20090004405 - Merry; Nir ; et al. | 2009-01-01 |
Microbatch Deposition Chamber With Radiant Heating
App 20080220150 - Merry; Nir ; et al. | 2008-09-11 |
Multiple Substrate Transfer Robot
App 20080219824 - NEWMAN; JACOB ; et al. | 2008-09-11 |
Temperature Uniformity Measurements During Rapid Thermal Processing
App 20080025368 - ADERHOLD; WOLFGANG ; et al. | 2008-01-31 |
Batch Processing Platform For ALD and CVD
App 20070295274 - Webb; Aaron ; et al. | 2007-12-27 |
Batch deposition tool and compressed boat
App 20070059128 - Yudovsky; Joseph ; et al. | 2007-03-15 |
Rotating substrate support and methods of use
App 20060281310 - Smith; Jacob ; et al. | 2006-12-14 |
Substrate processing apparatus using a batch processing chamber
App 20060156979 - Thakur; Randhir ; et al. | 2006-07-20 |
Fault-tolerant HVAC system
Grant 5,801,940 - Russ , et al. September 1, 1 | 1998-09-01 |
Thermally insulating surgical probe
Grant 5,720,743 - Bischof , et al. February 24, 1 | 1998-02-24 |
Fault-tolerant HVAC system
Grant 5,706,190 - Russ , et al. January 6, 1 | 1998-01-06 |
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Control methods and apparatus for gas-fired combustors
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