Merkel; Wolfgang

Patent Applications and Registrations

Patent applications and USPTO patent grants for Merkel; Wolfgang.The latest application filed is for "arrangement for an euv lithography apparatus".

Company Profile

6.6.6

Merkel; Wolfgang - Neu-Ulm DE
Merkel; Wolfgang - Schwabisch-Gmund DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Arrangement for an EUV lithography apparatus Grant 11,231,658 - Kierey , et al. January 25, 2	2022-01-25
Method for repairing reflective optical elements for EUV lithography Grant 11,099,484 - Meier , et al. August 24, 2	2021-08-24
Arrangement For An Euv Lithography Apparatus App 20200285142 - KIEREY; Holger ; et al.	2020-09-10
Optical element, in particular for a microlithographic projection exposure apparatus Grant 10,578,974 - Moser , et al.	2020-03-03
EUV Collector Grant 10,503,075 - Schuster , et al. Dec	2019-12-10
Method For Repairing Reflective Otpical Elements For Euv Lithography App 20190302628 - MEIER; Robert ; et al.	2019-10-03
Optical Element, In Particular For A Microlithographic Projection Exposure Apparatus App 20190302624 - Moser; Ralf ; et al.	2019-10-03
Euv Collector App 20190094699 - Schuster; Ingrid ; et al.	2019-03-28
Optical assembly, projection system, metrology system and EUV lithography apparatus Grant 10,146,048 - Brehm , et al. De	2018-12-04
Optical Assembly, Projection System, Metrology System And Euv Lithography Apparatus App 20170102539 - BREHM; Michael ; et al.	2017-04-13
Optical System For Generating A Light Beam For Treating A Substrate App 20120154895 - Muenz; Holger ; et al.	2012-06-21
Emergency distress signal system for motor vehicles Grant 4,369,426 - Merkel January 18, 1	1983-01-18

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