Mengel; Markus

Patent Applications and Registrations

Patent applications and USPTO patent grants for Mengel; Markus.The latest application filed is for "system for measuring the image quality of an optical imaging system".

Company Profile

0.20.19

Mengel; Markus - Heidenheim DE

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Patent Activity

Patent	Date
Method and apparatus for compensating at least one defect of an optical system Grant 9,798,249 - Dmitriev , et al. October 24, 2	2017-10-24
System for measuring the image quality of an optical imaging system Grant 9,429,495 - Mengel , et al. August 30, 2	2016-08-30
Arrangement for and method of characterising the polarization properties of an optical system Grant 9,274,440 - Hempelmann , et al. March 1, 2	2016-03-01
Controllable transmission and phase compensation of transparent material Grant 9,034,539 - Oshemkov , et al. May 19, 2	2015-05-19
Method And Apparatus For Compensating At Least One Defect Of An Optical System App 20140347646 - Dmitriev; Vladimir ; et al.	2014-11-27
System For Measuring The Image Quality Of An Optical Imaging System App 20140347654 - Mengel; Markus ; et al.	2014-11-27
System for measuring the image quality of an optical imaging system Grant 8,823,948 - Mengel , et al. September 2, 2	2014-09-02
Method and apparatus for modifying a substrate surface of a photolithographic mask Grant 8,735,030 - Oshemkov , et al. May 27, 2	2014-05-27
Microlithographic projection exposure apparatus Grant 8,675,178 - Mengel March 18, 2	2014-03-18
System For Measuring The Image Quality Of An Optical Imaging System App 20130293869 - Mengel; Markus ; et al.	2013-11-07
Controllable Transmission And Phase Compensation Of Transparent Material App 20130209926 - Oshemkov; Sergey ; et al.	2013-08-15
System for measuring the image quality of an optical imaging system Grant 8,488,127 - Mengel , et al. July 16, 2	2013-07-16
Arrangement For And Method Of Characterising The Polarisation Properties Of An Optical System App 20130021592 - HEMPELMANN; Uwe ; et al.	2013-01-24
Method And Apparatus For Modifying A Substrate Surface Of A Photolithographic Mask App 20110255065 - Oshemkov; Sergey ; et al.	2011-10-20
Method for approximating an influence of an optical system on the state of polarization of optical radiation Grant 7,924,436 - Mengel , et al. April 12, 2	2011-04-12
Optical System For A Microlithographic Projection Exposure Apparatus And Microlithographic Exposure Method App 20110063597 - Mengel; Markus	2011-03-17
System For Measuring The Image Quality Of An Optical Imaging System App 20100315651 - Mengel; Markus ; et al.	2010-12-16
System for measuring the image quality of an optical imaging system Grant 7,796,274 - Mengel , et al. September 14, 2	2010-09-14
System for measuring the image quality of an optical imaging system Grant 7,760,366 - Mengel , et al. July 20, 2	2010-07-20
Microlithographic Projection Exposure Apparatus App 20090040498 - Mengel; Markus	2009-02-12
Method for improving the imaging properties of a projection objective for a microlithographic projection exposure apparatus Grant 7,456,933 - Wegmann , et al. November 25, 2	2008-11-25
System for Measuring the Image Quality of an Optical Imaging System App 20080252876 - Mengel; Markus ; et al.	2008-10-16
Apparatus For Polarization-specific Examination, Optical Imaging System, And Calibration Method App 20080252888 - WEGMANN; Ulrich ; et al.	2008-10-16
System For Measuring The Image Quality Of An Optical Imaging System App 20080180688 - Mengel; Markus ; et al.	2008-07-31
Method And Apparatus For Determining The Influencing Of The State Of Polarization By An Optical System, And An Analyser App 20080037905 - Wegmann; Ulrich ; et al.	2008-02-14
Method and apparatus for spatially resolved polarimetry Grant 7,289,223 - Mengel October 30, 2	2007-10-30
Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser Grant 7,286,245 - Wegmann , et al. October 23, 2	2007-10-23
Apparatus for polarization-specific examination, optical imaging system, and calibration method Grant 7,277,182 - Wegmann , et al. October 2, 2	2007-10-02
Method for approximating an influence of an optical system on the state of polarization of optical radiation App 20070182969 - Mengel; Markus ; et al.	2007-08-09
Device for polarization-specific examination, an optical imaging system and a calibration method App 20050146789 - Wegmann, Ulrich ; et al.	2005-07-07
Method and apparatus for spatially resolved polarimetry App 20040262500 - Mengel, Markus	2004-12-30
Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser App 20040114150 - Wegmann, Ulrich ; et al.	2004-06-17

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