| Patent | Date |
|---|
System for Supplying a Regulatable Inflow Fitting, and a Method for Filling the System
App 20180259984 - KEMKOWSKI; Thomas ; et al. | 2018-09-13 |
Optical system for semiconductor lithography
Grant 9,383,544 - Melzer , et al. July 5, 2 | 2016-07-05 |
Method and system for indirect determination of local irradiance in an optical system
Grant 8,454,230 - Melzer , et al. June 4, 2 | 2013-06-04 |
Optical System For Semiconductor Lithography
App 20120327385 - Melzer; Frank ; et al. | 2012-12-27 |
Optical system for semiconductor lithography
Grant 8,269,947 - Melzer , et al. September 18, 2 | 2012-09-18 |
Focusing-device for the radiation from a light source
Grant 7,871,171 - Antoni , et al. January 18, 2 | 2011-01-18 |
Optical apparatus comprising an optical component and an adjustment device and method for influencing a polarization state of the optical component
Grant 7,580,207 - Melzer August 25, 2 | 2009-08-25 |
Optical System For Semiconductor Lithography
App 20090207396 - Melzer; Frank ; et al. | 2009-08-20 |
Optical System For Semiconductor Lithography
App 20090135395 - Melzer; Frank ; et al. | 2009-05-28 |
Apparatus for the manipulation and/or adjustment of an optical element
App 20090002670 - Melzer; Frank ; et al. | 2009-01-01 |
Focusing-device for the radiation from a light source
App 20080297755 - Antoni; Martin ; et al. | 2008-12-04 |
Collector configured of mirror shells
Grant 7,460,212 - Singer , et al. December 2, 2 | 2008-12-02 |
Focusing-device for the radiation from a light source
Grant 7,410,265 - Antoni , et al. August 12, 2 | 2008-08-12 |
Facet mirror having a number of mirror facets
Grant 7,354,168 - Holderer , et al. April 8, 2 | 2008-04-08 |
Collector with fastening devices for fastening mirror shells
App 20080042079 - Singer; Wolfgang ; et al. | 2008-02-21 |
Collector with fastening devices for fastening mirror shells
Grant 7,321,126 - Singer , et al. January 22, 2 | 2008-01-22 |
Collector configured of mirror shells
App 20080013680 - Singer; Wolfgang ; et al. | 2008-01-17 |
Collector having unused region for illumination systems using a wavelength .ltoreq.193 nm
Grant 7,244,954 - Singer , et al. July 17, 2 | 2007-07-17 |
Lighting system, particularly for use in extreme ultraviolet (EUV) lithography
Grant 7,196,841 - Melzer , et al. March 27, 2 | 2007-03-27 |
Facet mirrors and a method for producing mirror facets
App 20070019310 - Seifert; Andreas ; et al. | 2007-01-25 |
Collector with fastening devices for fastening mirror shells
App 20060291062 - Singer; Wolfgang ; et al. | 2006-12-28 |
Optical Apparatus Comprising An Optical Component And An Adjustment Device And Method For Influencing A Polarization State Of The Optical Component
App 20060279856 - Melzer; Frank | 2006-12-14 |
Method and system for indirect determination of local irradiance in an optical system
App 20060222044 - Melzer; Frank ; et al. | 2006-10-05 |
Collector with fastening devices for fastening mirror shells
Grant 7,091,505 - Singer , et al. August 15, 2 | 2006-08-15 |
Facet mirror having a number of mirror facets
Grant 7,090,362 - Holderer , et al. August 15, 2 | 2006-08-15 |
Collector having unused region for illumination systems using a wavelength <193 nm
App 20060097202 - Singer; Wolfgang ; et al. | 2006-05-11 |
Method of connecting a multiplicity of optical elements to a basic body
Grant 7,034,998 - Melzer , et al. April 25, 2 | 2006-04-25 |
Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm
Grant 7,015,489 - Singer , et al. March 21, 2 | 2006-03-21 |
Lighting system, particularly for use in extreme ultraviolet (euv) lithography
App 20050174650 - Melzer, Frank ; et al. | 2005-08-11 |
System for damping oscillations
Grant 6,897,599 - Sorg , et al. May 24, 2 | 2005-05-24 |
Facet mirror having a number of mirror facets
App 20050030653 - Holderer, Hubert ; et al. | 2005-02-10 |
Facet mirror having a number of mirror facets
App 20050030656 - Holderer, Hubert ; et al. | 2005-02-10 |
Optical element deformation system
Grant 6,844,994 - Melzer , et al. January 18, 2 | 2005-01-18 |
Illumination system with a plurality of individual gratings
Grant 6,836,530 - Singer , et al. December 28, 2 | 2004-12-28 |
Collector with fastening devices for fastening mirror shells
App 20040227103 - Singer, Wolfgang ; et al. | 2004-11-18 |
Focusing-device for the radiation from a light source
App 20040130809 - Antoni, Martin ; et al. | 2004-07-08 |
Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm
App 20040065817 - Singer, Wolfgang ; et al. | 2004-04-08 |
Pump driven by an electromotor and method for producing a pump of this type
App 20040062664 - Weigold, Thomas ; et al. | 2004-04-01 |
Oscillation damping system
Grant 6,700,715 - Sorg , et al. March 2, 2 | 2004-03-02 |
Focusing-device for the radiation from a light source
Grant 6,655,808 - Antoni , et al. December 2, 2 | 2003-12-02 |
Precision positioning apparatus for positioning a component especially an optical component
Grant 6,603,615 - Melzer , et al. August 5, 2 | 2003-08-05 |
Illumination system with a plurality of individual gratings
App 20030099040 - Singer, Wolfgang ; et al. | 2003-05-29 |
Focusing-device for the radiation from a light source
App 20020113954 - Antoni, Martin ; et al. | 2002-08-22 |
System for damping oscillations
App 20020109437 - Sorg, Franz ; et al. | 2002-08-15 |
Oscillation damping system
App 20020075574 - Sorg, Franz ; et al. | 2002-06-20 |
Optical element deformation system
App 20020048096 - Melzer, Frank ; et al. | 2002-04-25 |
Method of connecting a multiplicity of optical elements to a basic body
App 20020021507 - Melzer, Frank ; et al. | 2002-02-21 |
Precision positioning apparatus for positioning a component especially an optical component
App 20020021504 - Bayer, Martin ; et al. | 2002-02-21 |
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