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Meloni; Mark A. Patent Filings

Meloni; Mark A.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Meloni; Mark A..The latest application filed is for "fiberoptically-coupled measurement system with reduced sensitivity to angularly-driven variation of signals upon reflection from a wafer".

Company Profile
4.10.6
  • Meloni; Mark A. - Carrollton TX
  • Meloni; Mark A. - Longmont CO
  • Meloni; Mark A. - Flower Mound TX
  • Meloni; Mark A. - Lewisville TX
  • Meloni; Mark A. - Louisville TX
  • Meloni, Mark A. - Flower Mount TX
  • Meloni; Mark A. - Tempe AZ
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Microwave plasma source
Grant 10,923,324 - Meloni February 16, 2
2021-02-16
Fiberoptically-coupled measurement system with reduced sensitivity to angularly-driven variation of signals upon reflection from a wafer
Grant 10,794,763 - Meloni , et al. October 6, 2
2020-10-06
Fiberoptically-coupled Measurement System With Reduced Sensitivity To Angularly-driven Variation Of Signals Upon Reflection From A Wafer
App 20200264044 - Meloni; Mark A. ;   et al.
2020-08-20
Microwave plasma source
Grant 10,679,832 - Meloni
2020-06-09
Microwave Plasma Source
App 20190157045 - Meloni; Mark A.
2019-05-23
Microwave Plasma Source
App 20190013187 - Meloni; Mark A.
2019-01-10
Self referencing heterodyne reflectometer and method for implementing
Grant 7,589,843 - Aiyer , et al. September 15, 2
2009-09-15
Heterodyne reflectometer for film thickness monitoring and method for implementing
Grant 7,339,682 - Aiyer , et al. March 4, 2
2008-03-04
Heterodyne reflectomer for film thickness monitoring and method for implementing
App 20060192973 - Aiyer; Arun Ananth ;   et al.
2006-08-31
Optical closed-loop control system for a CMP apparatus and method of manufacture thereof
Grant 6,991,514 - Meloni , et al. January 31, 2
2006-01-31
Multiprobe detection system for chemical-mechanical planarization tool
Grant 6,960,115 - Weldon , et al. November 1, 2
2005-11-01
Multiprobe detection system for chemical-mechanical planarization tool
Grant 6,805,613 - Weldon , et al. October 19, 2
2004-10-19
Multiprobe detection system for chemical-mechanical planarization tool
App 20040038624 - Weldon, Matthew ;   et al.
2004-02-26
Polishing pad window for a chemical mechanical polishing tool
Grant 6,685,537 - Fruitman , et al. February 3, 2
2004-02-03
Method and apparatus for optical multi-angle endpoint detection during chemical mechanical planarization
App 20020191197 - Bibby, Thomas F.A. JR. ;   et al.
2002-12-19
Ultrasonic methods and apparatus for the in-situ detection of workpiece loss
Grant 6,264,532 - Meloni July 24, 2
2001-07-24

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