| Patent | Date |
|---|
Apparatus for use in forming an adaptive layer and a method of using the same
Grant 10,553,501 - Cherala , et al. Fe | 2020-02-04 |
Apparatus For Use In Forming An Adaptive Layer And A Method Of Using The Same
App 20190304850 - CHERALA; Anshuman ; et al. | 2019-10-03 |
Step and Repeat Imprint Lithography Process
App 20110221095 - Sreenivasan; Sidlgata V. ; et al. | 2011-09-15 |
Template Having a Varying Thickness to Facilitate Expelling a Gas Positioned Between a Substrate and the Template
App 20110171340 - Resnick; Douglas J. ; et al. | 2011-07-14 |
Template Having a Varying Thickness to Facilitate Expelling a Gas Positioned Between a Substrate and the Template
App 20100291257 - Resnick; Douglas J. ; et al. | 2010-11-18 |
Step and Repeat Imprint Lithography Processes
App 20100201042 - Sreenivasan; Sidlgata V. ; et al. | 2010-08-12 |
Step and repeat imprint lithography processes
Grant 7,727,453 - Sreenivasan , et al. June 1, 2 | 2010-06-01 |
Template Having a Silicon Nitride, Silicon Carbide or Silicon Oxynitride Film
App 20100040718 - Resnick; Douglas J. ; et al. | 2010-02-18 |
Method for expelling gas positioned between a substrate and a mold
Grant 7,641,840 - Choi , et al. January 5, 2 | 2010-01-05 |
Method of separating a mold from a solidified layer disposed on a substrate
Grant 7,635,445 - Choi , et al. December 22, 2 | 2009-12-22 |
Template Having a Silicon Nitride, Silicon Carbide or Silicon Oxynitride Film
App 20090004319 - Resnick; Douglas J. ; et al. | 2009-01-01 |
Method of varying dimensions of a substrate during nano-scale manufacturing
Grant 7,420,654 - Cherala , et al. September 2, 2 | 2008-09-02 |
Template Having a Varying Thickness to Facilitate Expelling a Gas Positioned Between a Substrate and the Template
App 20080160129 - Resnick; Douglas J. ; et al. | 2008-07-03 |
Formation of discontinuous films during an imprint lithography process
Grant 7,338,275 - Choi , et al. March 4, 2 | 2008-03-04 |
System for varying dimensions of a substrate during nanoscale manufacturing
Grant 7,298,456 - Cherala , et al. November 20, 2 | 2007-11-20 |
Method For Expelling Gas Positioned Between A Substrate And A Mold
App 20070228589 - Choi; Byung-Jin ; et al. | 2007-10-04 |
Imprint lithography substrate processing tool for modulating shapes of substrates
Grant 7,224,443 - Choi , et al. May 29, 2 | 2007-05-29 |
Apparatus to vary dimensions of a substrate during nano-scale manufacturing
Grant 7,170,589 - Cherala , et al. January 30, 2 | 2007-01-30 |
Systems for magnification and distortion correction for imprint lithography processes
Grant 7,150,622 - Choi , et al. December 19, 2 | 2006-12-19 |
Chucking system for modulating shapes of substrates
App 20060176466 - Choi; Byung J. ; et al. | 2006-08-10 |
Method of separating a mold from a solidified layer disposed on a substrate
App 20060172549 - Choi; Byung-Jin ; et al. | 2006-08-03 |
Step and repeat imprint lithography processes
Grant 7,077,992 - Sreenivasan , et al. July 18, 2 | 2006-07-18 |
Step and repeat imprint lithography systems
App 20060077374 - Sreenivasan; Sidlgata V. ; et al. | 2006-04-13 |
Step and repeat imprint lithography processes
App 20060076717 - Sreenivasan; Sidlgata V. ; et al. | 2006-04-13 |
Chucking system for modulating shapes of substrates
Grant 7,019,819 - Choi , et al. March 28, 2 | 2006-03-28 |
Formation of discontinuous films during an imprint lithography process
App 20060062867 - Choi; Byung Jin ; et al. | 2006-03-23 |
Apparatus to vary dimensions of a substrate during nano-scale manufacturing
App 20060001857 - Cherala; Anshuman ; et al. | 2006-01-05 |
System for varying dimensions of a substrate during nanoscale manufacturing
App 20060001194 - Cherala; Anshuman ; et al. | 2006-01-05 |
Chucking system for modulating shapes of substrates
Grant 6,982,783 - Choi , et al. January 3, 2 | 2006-01-03 |
Method for modulating shapes of substrates
Grant 6,980,282 - Choi , et al. December 27, 2 | 2005-12-27 |
Method of varying dimensions of a substrate during nano-scale manufacturing
App 20050269745 - Cherala, Anshuman ; et al. | 2005-12-08 |
System for magnification and distortion correction during nano-scale manufacturing
App 20050270516 - Cherala, Anshuman ; et al. | 2005-12-08 |
Assembly and method for transferring imprint lithography templates
Grant 6,951,173 - Meissl , et al. October 4, 2 | 2005-10-04 |
Assembly And Method For Transferring Imprint Lithography Templates
App 20050214398 - Meissl, Mario J. ; et al. | 2005-09-29 |
Formation of discontinuous films during an imprint lithography process
Grant 6,932,934 - Choi , et al. August 23, 2 | 2005-08-23 |
Step and repeat imprint lithography systems
Grant 6,900,881 - Sreenivasan , et al. May 31, 2 | 2005-05-31 |
Systems for magnification and distortion correction for imprint lithography processes
App 20050006343 - Choi, Byung Jin ; et al. | 2005-01-13 |
Chucking system for modulating shapes of substrates
App 20040223131 - Choi, Byung J. ; et al. | 2004-11-11 |
Method, system and holder for transferring templates during imprint lithography processes
Grant 6,805,054 - Meissl , et al. October 19, 2 | 2004-10-19 |
Chucking system for modulating shapes of substrates
App 20040090611 - Choi, Byung J. ; et al. | 2004-05-13 |
Formation of discontinuous films during an imprint lithography process
App 20040007799 - Choi, Byung Jin ; et al. | 2004-01-15 |
Step and repeat imprint lithography systems
App 20040008334 - Sreenivasan, Sidlgata V. ; et al. | 2004-01-15 |
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