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Lithographic apparatus and method Grant 7,522,263 - Van Mierlo , et al. April 21, 2 | 2009-04-21 |
Device manufacturing method, device manufactured thereby and a mask for use in the method Grant 7,492,443 - Van Der Werf , et al. February 17, 2 | 2009-02-17 |
Lithographic apparatus and patterning device transport Grant 7,248,340 - Ham , et al. July 24, 2 | 2007-07-24 |
Lithographic apparatus and method App 20070146658 - Van Mierlo; Hubert Adriaan ;   et al. | 2007-06-28 |
Lithographic apparatus and method App 20070146657 - Mierlo; Hubert Adriaan Van ;   et al. | 2007-06-28 |
Lithographic apparatus and patterning device transport Grant 7,151,589 - Ham , et al. December 19, 2 | 2006-12-19 |
Lithographic projection apparatus, device manufacturing method and device manufactured thereby Grant 7,115,886 - Van Schaik , et al. October 3, 2 | 2006-10-03 |
Lithographic apparatus, device manufacturing method and device manufactured thereby Grant 7,095,479 - Stevens , et al. August 22, 2 | 2006-08-22 |
Lithographic apparatus and patterning device transport App 20050286041 - Ham, Erik Leonardus ;   et al. | 2005-12-29 |
Lithographic apparatus and patterning device transport App 20050286029 - Ham, Erik Leonardus ;   et al. | 2005-12-29 |
Device manufacturing method, device manufactured thereby and a mask for use in the method App 20050146703 - Der Werf, Jan Evert Van ;   et al. | 2005-07-07 |
Lithographic projection apparatus, device manufacturing method and device manufactured thereby App 20050112508 - Van Schaik, Willem ;   et al. | 2005-05-26 |
Device manufacturing method, device manufactured thereby and a mask for use in the method Grant 6,879,374 - Van Der Werf , et al. April 12, 2 | 2005-04-12 |
Lithographic apparatus, device manufacturing method and device manufactured thereby App 20050057734 - Johannes Stevens, Lucas Henricus ;   et al. | 2005-03-17 |
Lithographic projection apparatus, device manufacturing method and device manufactured thereby Grant 6,828,569 - Van Schaik , et al. December 7, 2 | 2004-12-07 |
Method and device for measuring contamination of a surface of a component of a lithographic apparatus App 20040227102 - Kurt, Ralph ;   et al. | 2004-11-18 |
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby Grant 6,781,673 - Moors , et al. August 24, 2 | 2004-08-24 |
Semiconducting devices and method of making thereof Grant 6,750,474 - Meiling , et al. June 15, 2 | 2004-06-15 |
Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objects Grant 6,724,460 - Van Schaik , et al. April 20, 2 | 2004-04-20 |
Semiconducting devices and method of making thereof Grant 6,686,230 - Meiling , et al. February 3, 2 | 2004-02-03 |
Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objects App 20030095240 - Van Schaik, Willem ;   et al. | 2003-05-22 |
Lithographic projection apparatus, device manufacturing method and device manufactured thereby App 20030096193 - Van Schaik, Willem ;   et al. | 2003-05-22 |
Device manufacturing method, device manufactured thereby and a mask for use in the method App 20030003383 - Van Der Werf, Jan Evert ;   et al. | 2003-01-02 |
Semiconducting Devices And Method Of Making Thereof App 20020132411 - MEILING, HANS ;   et al. | 2002-09-19 |
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby App 20020109828 - Moors, Johannes Hubertus Josephina ;   et al. | 2002-08-15 |
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby App 20020096647 - Moors, Johannes Hubertus Josephina ;   et al. | 2002-07-25 |
Semiconducting devices and method of making thereof App 20010052596 - Meiling, Hans ;   et al. | 2001-12-20 |
Apparatus and method for igniting plasma in a process module Grant 5,789,867 - Westendorp , et al. August 4, 1 | 1998-08-04 |
Apparatus and method for igniting plasma in a process module Grant 5,565,036 - Westendorp , et al. October 15, 1 | 1996-10-15 |