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Patent applications and USPTO patent grants for Mehta; Sohan S..The latest application filed is for "litho-litho-etch double patterning method".
Patent | Date |
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Lithographic patterning to form fine pitch features Grant 10,504,774 - Singh , et al. Dec | 2019-12-10 |
Litho-litho-etch double patterning method Grant 10,353,288 - Sharma , et al. July 16, 2 | 2019-07-16 |
Litho-litho-etch Double Patterning Method App 20190163054 - Sharma; Vineet ;   et al. | 2019-05-30 |
Extreme Ultraviolet Lithography (euvl) Reflective Mask App 20180299765 - Singh; SherJang ;   et al. | 2018-10-18 |
Lithographic Patterning To Form Fine Pitch Features App 20180025936 - Singh; Sunil K. ;   et al. | 2018-01-25 |
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