Mehrotra; Akhil
Patent Applications and Registrations
Patent applications and USPTO patent grants for Mehrotra; Akhil.The latest application filed is for "methods of etching metal-containing layers".
- Mehrotra; Akhil - Sunnyvale CA
- MEHROTRA; Akhil - Santa Clara CA
| Patent | Date |
|---|---|
| Methods of etching metal-containing layers Grant 11,417,537 - Mehrotra , et al. August 16, 2 | 2022-08-16 |
| Methods for etching a hardmask layer Grant 11,127,599 - Jiang , et al. September 21, 2 | 2021-09-21 |
| Methods Of Etching Metal-containing Layers App 20210193481 - MEHROTRA; Akhil ; et al. | 2021-06-24 |
| Methods of etching metal-containing layers Grant 10,957,558 - Mehrotra , et al. March 23, 2 | 2021-03-23 |
| Method of etching hardmasks containing high hardness materials Grant 10,867,795 - Fung , et al. December 15, 2 | 2020-12-15 |
| Methods Of Etching Metal-containing Layers App 20200227276 - MEHROTRA; Akhil ; et al. | 2020-07-16 |
| Delayed Pulsing For Plasma Processing Of Wafers App 20200135458 - MEHROTRA; AKHIL ; et al. | 2020-04-30 |
| Methods of etching metal-containing layers Grant 10,636,675 - Mehrotra , et al. | 2020-04-28 |
| Methods for high temperature etching a material layer using protection coating Grant 10,497,578 - Zhou , et al. De | 2019-12-03 |
| Methods For Etching A Hardmask Layer App 20190221441 - JIANG; Shan ; et al. | 2019-07-18 |
| Methods Of Etching Metal-containing Layers App 20190096695 - MEHROTRA; Akhil ; et al. | 2019-03-28 |
| Methods Of Etching Hardmasks Containing High Hardness Materials App 20180337047 - FUNG; Nancy ; et al. | 2018-11-22 |
| Methods For High Temperature Etching A Material Layer Using Protection Coating App 20180025914 - ZHOU; Hailong ; et al. | 2018-01-25 |
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