Patent | Date |
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Method of forming fully silicided NMOS and PMOS semiconductor devices having independent polysilicon gate thicknesses, and related device Grant 8,574,980 - Mehrad , et al. November 5, 2 | 2013-11-05 |
Gate dielectric first replacement gate processes and integrated circuits therefrom Grant 8,372,703 - Kirkpatrick , et al. February 12, 2 | 2013-02-12 |
Method to attain low defectivity fully silicided gates Grant 8,273,645 - Visokay , et al. September 25, 2 | 2012-09-25 |
Process method to fully salicide (FUSI) both N-poly and P-poly on a CMOS flow Grant 7,960,280 - Mehrad , et al. June 14, 2 | 2011-06-14 |
Selective wet etch process for CMOS ICs having embedded strain inducing regions and integrated circuits therefrom Grant 7,943,456 - Yu , et al. May 17, 2 | 2011-05-17 |
Method To Attain Low Defectivity Fully Silicided Gates App 20110097884 - VISOKAY; Mark Robert ;   et al. | 2011-04-28 |
Reducing gate CD bias in CMOS processing Grant 7,910,422 - Mehrad , et al. March 22, 2 | 2011-03-22 |
Method for forming CMOS transistors having FUSI gate electrodes and targeted work functions Grant 7,892,906 - Mehrad , et al. February 22, 2 | 2011-02-22 |
Gate Dielectric First Replacement Gate Processes And Integrated Circuits Therefrom App 20110031557 - Kirkpatrick; Brian K. ;   et al. | 2011-02-10 |
Gate dielectric first replacement gate processes and integrated circuits therefrom Grant 7,838,356 - Kirkpatrick , et al. November 23, 2 | 2010-11-23 |
Method of forming a silicided gate utilizing a CMP stack Grant 7,763,540 - Johnson , et al. July 27, 2 | 2010-07-27 |
Method Of Simultaneously Siliciding A Polysilicon Gate And Source/drain Of A Semiconductor Device, And Related Device App 20100176462 - Mehrad; Freidoon ;   et al. | 2010-07-15 |
Method For Integration Of Replacement Gate In Cmos Flow App 20100164008 - Mehrad; Freidoon ;   et al. | 2010-07-01 |
Gate Dielectric First Replacement Gate Processes And Integrated Circuits Therefrom App 20100164006 - KIRKPATRICK; BRIAN K. ;   et al. | 2010-07-01 |
Selective Wet Etch Process For Cmos Ics Having Embedded Strain Inducing Regions And Integrated Circuits Therefrom App 20100164005 - YU; SHAOFENG ;   et al. | 2010-07-01 |
Method of simultaneously siliciding a polysilicon gate and source/drain of a semiconductor device, and related device Grant 7,727,842 - Mehrad , et al. June 1, 2 | 2010-06-01 |
Method of manufacturing metal silicide contacts Grant 7,670,952 - Obeng , et al. March 2, 2 | 2010-03-02 |
Method of Forming Fully Silicided NMOS and PMOS Semiconductor Devices Having Independent Polysilicon Gate Thicknesses, and Related Device App 20090321846 - Mehrad; Freidoon ;   et al. | 2009-12-31 |
Integration of pre-S/D anneal selective nitride/oxide composite cap for improving transistor performance Grant 7,601,575 - Bu , et al. October 13, 2 | 2009-10-13 |
Method of forming a fully silicided semiconductor device with independent gate and source/drain doping and related device Grant 7,585,738 - Yu , et al. September 8, 2 | 2009-09-08 |
Method for Forming CMOS Transistors Having FUSI Gate Electrodes and Targeted Work Functions App 20090191675 - Mehrad; Freidoon ;   et al. | 2009-07-30 |
Reducing Gate Cd Bias In Cmos Processing App 20090166629 - Mehrad; Freidoon ;   et al. | 2009-07-02 |
Method to form shallow trench isolation with rounded upper corner for advanced semiconductor circuits Grant 7,504,339 - Chen , et al. March 17, 2 | 2009-03-17 |
Method Of Forming Fully Silicided Nmos And Pmos Semiconductor Devices Having Independent Polysilicon Gate Thicknesses, And Related Device App 20090057776 - Mehrad; Freidoon ;   et al. | 2009-03-05 |
Process Method To Fully Salicide (fusi) Both N-poly And P-poly On A Cmos Flow App 20090050976 - Mehrad; Freidoon ;   et al. | 2009-02-26 |
Process method to facilitate silicidation Grant 7,448,395 - Lu , et al. November 11, 2 | 2008-11-11 |
Method of Forming a Silicided Gate Utilizing a CMP Stack App 20080268631 - Johnson; Frank Scott ;   et al. | 2008-10-30 |
Method Of Forming A Fully Silicided Semiconductor Device With Independent Gate And Source/drain Doping And Related Device App 20080265420 - Yu; Shaofeng ;   et al. | 2008-10-30 |
Method of Forming a Fully Silicided Semiconductor Device with Independent Gate and Source/Drain Doping and Related Device App 20080265345 - Yu; Shaofeng ;   et al. | 2008-10-30 |
Method Of Simultaneously Siliciding A Polysilicon Gate And Source/drain Of A Semiconductor Device, And Related Device App 20080265344 - Mehrad; Freidoon ;   et al. | 2008-10-30 |
Method Of Manufacturing Metal Silicide Contacts App 20080230846 - Obeng; Yaw S. ;   et al. | 2008-09-25 |
Semiconductor Device Manufactured Using an Improved Plasma Etch Process for a Fully Silicided Gate Flow Process App 20080233747 - Choi; Jinhan ;   et al. | 2008-09-25 |
Process method to optimize fully silicided gate (FUSI) thru PAI implant App 20080206973 - Johnson; Frank Scott ;   et al. | 2008-08-28 |
Ebeam inspection for detecting gate dielectric punch through and/or incomplete silicidation or metallization events for transistors having metal gate electrodes App 20080176345 - Yu; Shaofeng ;   et al. | 2008-07-24 |
Method to obtain fully silicided poly gate Grant 7,396,716 - Mehrad , et al. July 8, 2 | 2008-07-08 |
Method to obtain fully silicided gate electrodes Grant 7,244,642 - Vitale , et al. July 17, 2 | 2007-07-17 |
Method to obtain fully silicided gate electrodes App 20070066007 - Vitale; Steven A. ;   et al. | 2007-03-22 |
Method to obtain fully silicided poly gate App 20070037342 - Mehrad; Freidoon ;   et al. | 2007-02-15 |
Multi-layer reducible sidewall process Grant 7,112,497 - Mehrad , et al. September 26, 2 | 2006-09-26 |
Method for forming MOS transistors with improved sidewall structures Grant 7,078,347 - Mehrad , et al. July 18, 2 | 2006-07-18 |
Method to design for or modulate the CMOS transistor threshold voltage using shallow trench isolation (STI) Grant 7,045,410 - Mehrad , et al. May 16, 2 | 2006-05-16 |
Multi-doped semiconductor e-fuse App 20060065946 - Mehrad; Freidoon ;   et al. | 2006-03-30 |
Thermal oxidation for improved silicide formation App 20060057853 - Mehrotra; Manoj ;   et al. | 2006-03-16 |
Method to design for or modulate the CMOS transistor inverse narrow width effect (INWE) using shallow trench isolation (STI) App 20060024911 - Mehrad; Freidoon ;   et al. | 2006-02-02 |
Process method to facilitate silicidation App 20060014393 - Lu; Jiong-Ping ;   et al. | 2006-01-19 |
Multi-layer reducible sidewall process App 20050287751 - Mehrad, Freidoon ;   et al. | 2005-12-29 |
Shallow trench isolation structure and method App 20050247994 - Mehrad, Freidoon ;   et al. | 2005-11-10 |
Method to form shallow trench isolation with rounded upper corner for advanced semiconductor circuits App 20050208732 - Chen, Zhihao ;   et al. | 2005-09-22 |
Shallow trench isolation structure and method Grant 6,930,018 - Mehrad , et al. August 16, 2 | 2005-08-16 |
Integration of pre-S/D anneal selective nitride/oxide composite cap for improving transistor performance Grant 6,930,007 - Bu , et al. August 16, 2 | 2005-08-16 |
Integration of pre-S/D anneal selective nitride/oxide composite cap for improving transistor performance App 20050164431 - Bu, Haowen ;   et al. | 2005-07-28 |
Method to form shallow trench isolation with rounded upper corner for advanced semiconductor circuits Grant 6,917,093 - Chen , et al. July 12, 2 | 2005-07-12 |
Forming a trench to define one or more isolation regions in a semiconductor structure Grant 6,905,943 - DeLoach , et al. June 14, 2 | 2005-06-14 |
Flash memory array structure and method of forming Grant 6,897,516 - Mehrad , et al. May 24, 2 | 2005-05-24 |
Forming A Trench To Define One Or More Isolation Regions In A Semiconductor Structure App 20050101101 - DeLoach, Juanita ;   et al. | 2005-05-12 |
Method to form shallow trench isolation with rounded upper corner for advanced semiconductor circuits App 20050062127 - Chen, Zhihao ;   et al. | 2005-03-24 |
Integration of pre-S/D anneal selective nitride/oxide composite cap for improving transistor performance App 20050059228 - Bu, Haowen ;   et al. | 2005-03-17 |
Method to improve STI nano gap fill and moat nitride pull back Grant 6,828,213 - Mehrad , et al. December 7, 2 | 2004-12-07 |
Semiconductor device isolation structure and method of forming App 20040238915 - Chen, Zhihao ;   et al. | 2004-12-02 |
Method for moat nitride pull back for shallow trench isolation Grant 6,818,526 - Mehrad , et al. November 16, 2 | 2004-11-16 |
Method to salicide source-line in flash memory with STI Grant 6,803,273 - Ambrose , et al. October 12, 2 | 2004-10-12 |
Method for forming MOS transistors with improved sidewall structures App 20040175911 - Mehrad, Freidoon ;   et al. | 2004-09-09 |
Flash memory cell process using a hardmask Grant 6,784,056 - Schneider , et al. August 31, 2 | 2004-08-31 |
Implanted vertical source-line under straight stack for flash eprom Grant 6,765,257 - Mehrad , et al. July 20, 2 | 2004-07-20 |
Semiconductor device isolation structure and method of forming Grant 6,737,333 - Chen , et al. May 18, 2 | 2004-05-18 |
Flash memory cell process using a hardmask App 20040085830 - Schneider, Paul A. ;   et al. | 2004-05-06 |
Multi-layer silicide block process Grant 6,730,554 - Baldwin , et al. May 4, 2 | 2004-05-04 |
Method for moat nitride pull back for shallow trench isolation App 20040067620 - Mehrad, Freidoon ;   et al. | 2004-04-08 |
Transistor formed from stacked disposable sidewall spacer Grant 6,706,605 - Ekbote , et al. March 16, 2 | 2004-03-16 |
Shallow trench isolation structure and method App 20040014291 - Mehrad, Freidoon ;   et al. | 2004-01-22 |
Shallow trench isolation step height detection method Grant 6,677,766 - Mehrad , et al. January 13, 2 | 2004-01-13 |
Flash memory cell process using a hardmask Grant 6,667,210 - Schneider , et al. December 23, 2 | 2003-12-23 |
Flash memory array structure and method of forming App 20030207527 - Mehrad, Freidoon ;   et al. | 2003-11-06 |
Method to improve STI nano gap fill and moat nitride pull back App 20030181022 - Mehrad, Freidoon ;   et al. | 2003-09-25 |
Semiconductor device isolation structure and method of forming App 20030006476 - Chen, Zhihao ;   et al. | 2003-01-09 |
Flash memory array structure and method of forming App 20030006448 - Mehrad, Freidoon ;   et al. | 2003-01-09 |
Flash memory cell process using a hardmask App 20020127800 - Schneider, Paul A. ;   et al. | 2002-09-12 |
Hard-mask etch process App 20020072225 - Laaksonen, Reima T. ;   et al. | 2002-06-13 |
Shallow trench isolation step height detection method App 20020060575 - Mehrad, Freidoon ;   et al. | 2002-05-23 |
Sidewall process to improve the flash memory cell performance App 20020055228 - Ambrose, Thomas M. ;   et al. | 2002-05-09 |
Method to reduce source-line resistance in flash memory with sti Grant 6,306,737 - Mehrad , et al. October 23, 2 | 2001-10-23 |
Nonvolatile memory cell with P-N junction formed in polysilicon floating gate Grant 5,753,952 - Mehrad May 19, 1 | 1998-05-19 |
Nonvolatile memory array with compatible vertical source lines Grant 5,659,500 - Mehrad August 19, 1 | 1997-08-19 |
Channel-stop process for use with thick-field isolation regions in triple-well structures Grant 5,604,150 - Mehrad February 18, 1 | 1997-02-18 |
Extended-life method for soft-programming floating-gate memory cells Grant 5,576,992 - Mehrad November 19, 1 | 1996-11-19 |