Mehlkopp; Klaus
Patent Applications and Registrations
Patent applications and USPTO patent grants for Mehlkopp; Klaus.The latest application filed is for "lithographic apparatus and device manufacturing method".
- Mehlkopp; Klaus - Alsdorf DE
| Patent | Date |
|---|---|
| Optical system with isolated measuring structure Grant 6,864,988 - Hof , et al. March 8, 2 | 2005-03-08 |
| Lithographic apparatus and device manufacturing method Grant 6,750,949 - Loopstra , et al. June 15, 2 | 2004-06-15 |
| Lithographic apparatus and device manufacturing method App 20030058422 - Loopstra, Erik Roelof ; et al. | 2003-03-27 |
| Process for manufacturing optical surfaces and shaping machine for carrying out this process Grant 6,523,443 - Hof , et al. February 25, 2 | 2003-02-25 |
| Optical system with a plurality of optical elements App 20030010902 - Hof, Albrecht ; et al. | 2003-01-16 |
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