| Patent | Date |
|---|
Measurement Apparatus And A Method For Determining A Substrate Grid
App 20210341846 - BIJNEN; Franciscus Godefridus Casper ; et al. | 2021-11-04 |
Measurement apparatus and a method for determining a substrate grid
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Lithographic method
Grant 11,029,610 - Tinnemans , et al. June 8, 2 | 2021-06-08 |
Source separation from metrology data
Grant 11,016,397 - Middlebrooks , et al. May 25, 2 | 2021-05-25 |
Lithographic method
Grant 10,962,887 - Tinnemans , et al. March 30, 2 | 2021-03-30 |
Lithographic Method
App 20200272061 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2020-08-27 |
Lithographic Method
App 20200081356 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2020-03-12 |
Lithographic method
Grant 10,527,958 - Tinnemans , et al. J | 2020-01-07 |
Measurement Apparatus And A Method For Determining A Substrate Grid
App 20190235391 - BIJNEN; Franciscus Godefridus Casper ; et al. | 2019-08-01 |
Lithographic Method
App 20190094721 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2019-03-28 |
Method of determining critical-dimension-related properties, inspection apparatus and device manufacturing method
Grant 10,180,628 - Cramer , et al. Ja | 2019-01-15 |
Method of controlling a lithographic apparatus, device manufacturing method, lithographic apparatus, computer program product and method of improving a mathematical model of a lithographic process
Grant 9,696,635 - Engelen , et al. July 4, 2 | 2017-07-04 |
Method and apparatus for determining lithographic quality of a structure
Grant 9,518,936 - Grootjans , et al. December 13, 2 | 2016-12-13 |
Method Of Determining Critical-dimension-related Properties, Inspection Apparatus And Device Manufacturing Method
App 20160116849 - CRAMER; Hugo Augustinus Joseph ; et al. | 2016-04-28 |
Methods and scatterometers, lithographic systems, and lithographic processing cells
Grant 9,081,303 - Cramer , et al. July 14, 2 | 2015-07-14 |
Methods and scatterometers, lithographic systems, and lithographic processing cells
Grant 8,994,944 - Cramer , et al. March 31, 2 | 2015-03-31 |
Method and apparatus for overlay measurement
Grant 8,982,328 - Megens , et al. March 17, 2 | 2015-03-17 |
Alignment system, lithographic system and method
Grant 8,706,442 - Mos , et al. April 22, 2 | 2014-04-22 |
Method of determining a characteristic
Grant 8,502,955 - Megens , et al. August 6, 2 | 2013-08-06 |
Method, inspection apparatus and substrate for determining an approximate structure of an object on a substrate
Grant 8,390,823 - Cramer , et al. March 5, 2 | 2013-03-05 |
Method Of Controlling A Lithographic Apparatus, Device Manufacturing Method, Lithographic Apparatus, Computer Program Product And Method Of Improving A Mathematical Model Of A Lithographic Process
App 20120229786 - ENGELEN; Adrianus Franciscus Petrus ; et al. | 2012-09-13 |
Method and Apparatus for Overlay Measurement
App 20110141450 - MEGENS; Henricus Johannes Lambertus ; et al. | 2011-06-16 |
Method, Inspection Apparatus and Substrate for Determining an Approximate Structure of an Object on a Substrate
App 20110085176 - Cramer; Hugo Augustinus Joseph ; et al. | 2011-04-14 |
Methods and Scatterometers, Lithographic Systems, and Lithographic Processing Cells
App 20110027704 - Cramer; Hugo Augustinus Joseph ; et al. | 2011-02-03 |
Method of Determining a Characteristic
App 20100165312 - Megens; Henricus Johannes Lambertus ; et al. | 2010-07-01 |
Method of selecting a grid model for correcting a process recipe for grid deformations in a lithographic apparatus and lithographic assembly using the same
Grant 7,468,795 - Simons , et al. December 23, 2 | 2008-12-23 |
Device manufacturing method, mask and device
App 20070048626 - Megens; Henricus Johannes Lambertus | 2007-03-01 |
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