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Patent applications and USPTO patent grants for Medvedeva; Marina.The latest application filed is for "method and system for improving aerial image simulation speeds".
Patent | Date |
---|---|
Method and system for improving aerial image simulation speeds Grant 7,406,675 - Uzhakov , et al. July 29, 2 | 2008-07-29 |
Method and system for analyzing the quality of an OPC mask Grant 7,340,706 - Golubtsov , et al. March 4, 2 | 2008-03-04 |
OPC edge correction based on a smoothed mask design Grant 7,260,814 - Rodin , et al. August 21, 2 | 2007-08-21 |
Method and system for improving aerial image simulation speeds App 20070143734 - Uzhakov; Sergey V. ;   et al. | 2007-06-21 |
Method and system for analyzing the quality of an OPC mask App 20070079277 - Golubtsov; Ilya ;   et al. | 2007-04-05 |
OPC edge correction based on a smoothed mask design App 20060129966 - Rodin; Sergei ;   et al. | 2006-06-15 |
Sidelobe correction for attenuated phase shift masks Grant 6,911,285 - Aleshin , et al. June 28, 2 | 2005-06-28 |
First approximation for OPC significant speed-up Grant 6,854,104 - Aleshin , et al. February 8, 2 | 2005-02-08 |
Optical proximity correction driven hierarchy Grant 6,813,758 - Aleshin , et al. November 2, 2 | 2004-11-02 |
Sidelobe correction for attenuated phase shift masks App 20040121242 - Aleshin, Stanislav ;   et al. | 2004-06-24 |
First approximation for OPC significant speed-up App 20040103388 - Aleshin, Stanislav ;   et al. | 2004-05-27 |
Optical proximity correction driven hierarchy App 20030177451 - Aleshin, Stanislav V. ;   et al. | 2003-09-18 |
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